• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.660-663
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• 2003

This paper proposes a systematic approach for an accurate control of the Terfenol-D actuator taking into account hysteresis, modeled by applying the classical Preisach operator with memory curve. A desired input displacement is calculated by using the hysteresis inverter, which is fed into the actuator. Then the PI compensator corrects the error between the commanded and actual displacements. Experiments with the step responses show that the PI controller settles in 70 ms and the hybrid controller in 20 ms. It means that the concurrent application of two control schemes is effective to control the actuator.

• Journal of the Korean Society for Precision Engineering
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• v.14 no.1
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• pp.119-125
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• 1997

This paper deals with an experimental investigation on an active vibration control of ahybrid smart structure(HSS) via an electro-rheological fluid actuator(ERFA) and a piezoelectric film actuator(PFA). Firstly, an HSS is constructed by inserting a silicone oil-based electro-rheological fluid into a hollow can- tilevered beam and perfectly bonding piezoelectric films ofn the upper and lower surfaces of the beam as an actuator and a sensor, respectively. The control scheme of the ERFA tuning stiffness and damping charac- teristics of the HSS with imposed electric fields is formulated as a function of excitation frequencies on the basis of field-dependent respnses. On the other hand, as for the control scheme of the PFA permitting control voltages to generate axial forces or bending moments for suppressing deflections of the HSS, a neuro sliding mode controller(NSC) is employed. Furthermore, an experimental implementation activating the ERFA and the PFA independently is established to carry out an active vibration control in both the transient and forced vibrations. The experimental results exhibit a superior ability of the gtbrid actuation system to tailor elastodynamic response characteristics of the HSS rather than a single class of actuator system alone.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.16 no.7 s.112
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• pp.739-745
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• 2006

This paper presents a novel type of hybrid dispensing head for IC fabrication and surface mount technology. The proposed mechanism consists of solenoid valve and piezoelectric stack as actuators, and provides positive-displacement and jet dispensing. The positive-displacement dispensing can produce desired adhesive amount without viscosity effect, while the jet dispensing can produce high precision adhesive amount. In order to determine the relationship between required voltage of the piezoelectric actuator and needle displacement, both static and dynamic analysis are undertaken, In addition, finite element analysis is performed in order to find optimal design parameters. Dispensing flow rate and pressure in the chamber are evaluated through fluid dynamic model.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.10
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• pp.148-153
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• 2001

Active control of flexural vibrations of smart laminated composite beams has been carried out using piezoceramic sensor/actuator and viscoelastic material. The beams with passive constrained layer damping hale been analyzed by formulating the equations of motion through the use of extended Hamilton's principle. The dynamic characteristics such as damping ratio and modal damping of the beam are calculated for various fiber orientations by means of iterative complex eigensolution method. This paper addresses a design strategy of laminated composite under flexural vibrations to design structure with maximum possible damping capacity.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2006.05a
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• pp.821-826
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• 2006

This paper presents a novel type of hybrid dispensing head for IC fabrication and surface mount technology. The proposed mechanism consists of solenoid valve and piezoelectric stack as actuators, and provides positive-displacement and jet dispensing. The positive-displacement dispensing can produce desired adhesive amount without viscosity effect, while the jet dispensing can produce high precision adhesive amount. In order to determine the relationship between required voltage of the piezo actuator and needle displacement, both static and dynamic analysis are undertaken, In addition, finite element analysis is performed in order to find optimal design parameters. Dispensing flow rate and pressure in the chamber are evaluated through fluid dynamic model.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.25 no.8
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• pp.1308-1316
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• 2001

A hybrid type master system is proposed to take the advantage of the link mechanism and magnetic levitation mechanism without using a force sensor. Two different types of electromagnetic actuators, moving coil type and moving magnet types are used to drive the master system which is capable of 4-DOF actuation. It is designed that the rotation motions about x-y axis are decoupled and the whole system is represented by simple dynamic equations. The force reflection is achieved by using the simple relation between the force and applied current and position. The simulation and experimental results are presented to show its performance.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2004.11a
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• pp.275-278
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• 2004

Electro-Active Paper (EAPap) is attractive for EAP actuator due to its merit in terms of light weight, dry condition, large displacement output, low actuation voltage and low power consumption. The EAPap is based on cellulose paper, and is shown to involve primarily transport of ions in response to an external electric field. This actuating mechanism is similar to conductive polymer based actuators. For performance improvement of EAPap, hybrid actuators are tried. The actuators based on cellulose paper attached conducting polypyrrole, polyaniline and single wall carbon nanotube/polyaniline(emeraldine base) have been achieved by Electro chemical deposition and mechanical deposition of the polymers onto cellulose paper.

• Journal of the Semiconductor & Display Technology
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• v.20 no.4
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• pp.171-176
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• 2021

Die-to-wafer (D2W) hybrid bonding in the multilayer semiconductor manufacturing process is one of wafer direct bonding, and various studies are being conducted around the world. A noteworthy point in the current die-to-wafer process is that a lot of voids occur on the bonding surface of the die during bonding. In this study, as a suggested method for removing voids generated during the D2W hybrid bonding process, a flexible mechanism for implementing convex for die bonding to be applied to the bond head is proposed. In addition, modeling of flexible mechanisms, analysis/design/control/evaluation of static/dynamics properties are performed. The proposed system was controlled by capacitive sensor (lion precision, CPL 290), piezo actuator (P-888,91), and dSpace. This flexure mechanism implemented a working range of 200 ㎛, resolution(3σ) of 7.276nm, Inposition(3σ) of 3.503nm, settling time(2%) of 500.133ms by applying a reverse bridge type mechanism and leaf spring guide, and at the same time realized a maximum step difference of 6 ㎛ between die edge and center. The results of this study are applied to the D2W hybrid bonding process and are expected to bring about an effect of increasing semiconductor yield through void removal. In addition, it is expected that it can be utilized as a system that meets the convex variable amount required for each device by adjusting the elongation amount of the piezo actuator coupled to the flexible mechanism in a precise unit.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.4 no.2
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• pp.63-70
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• 2003

In this paper, an MFC (Mass Flow Controller) which is widely used in many semiconductor manufacturing processes for controlling the mass flow rate of a gas is designed and implemented using the PIC 16F876 of Microchip, Inc. The MFC implemented in this thesis has the form of hybrid-type, i.e., the mixed-type of the analog-type MFC, which has many problems such as low accurary, and digital-type MFC, which use an expensive DSP (Digital Signal Processor) and an ADC (Analog to Digital Convertor) with high precision. The MFC is consists of the sensor unit, the control unit and the actuator unit, and it has used the automatic calibration algorithm and the reference table method for the improvement of the performance.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.13 no.7
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• pp.524-531
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• 2003

This paper presents an active vibration control of a flexible beam structure using a hybrid mount which consists of elastic rubber and Piezoelectric material. After identifying stiffness and damping properties of the rubber and piezoelectric elements, a mechanical model of the hybrid mount is established. The mount model is then Incorporated into the beam structure, and the governing equation of motion is obtained in a state space. A sliding mode controller is designed in order to actively attenuate the vibration of the beam structure subjected to high frequency and small magnitude excitations. The controller is experimentally realized and control responses such as acceleration of the beam structure and force transmission through the hybrid mount are evaluated. In addition. a comparative work is done between the passive and hybrid mount systems.