• 전자공학회논문지 IE
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• v.43 no.3
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• pp.1-5
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• 2006

[ $CaZrO_3$ ] humidity sensors were prepared using the solid-state synthetic method and their humidity sensitive characteristics have been investigated. It was found that the impedance of the humidity sensors decreased with increasing relative humidity and the humidity sensitivity depended on the applied frequencies. The sensitivity of sensor is stable with heat treatment and a negligible hysteresis under cyclic humidity changes is shown, and the activation energy for electrical conduction is reduced with water adsorption.

• Journal of Environmental Science International
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• v.19 no.2
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• pp.125-136
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• 2010

The most important factors relating to the indoor air environment are temperature, airflow, humidity, and contaminant concentration. A sensitivity analysis of indoor environment factors was carried out to grasp influences along with changes of atmospheric conditions. An integrated multizone model was used to predict these sensitivities. This model was applied to an apartment with six zones. Airflow rates are influenced very seriously by changes of wind direct or wind velocity, but are influenced very slightly by changes of outdoor air temperature and are not influenced at all by changes of outdoor air humidity or contaminant concentration. Indoor air temperatures are influenced very directly by changes of outdoor air temperature, but are influenced very slightly by wind direction or wind velocity and are not influenced at all by changes of outdoor air humidity or contaminant concentration. Indoor air humidities are influenced very directly by changes of outdoor air humidity, but are not influenced at all by changes of outdoor air contaminant concentration and have little or no influence by changes of wind direction, wind velocity, or outdoor air temperature. Indoor air contaminant concentrations are influenced very seriously by changes of wind direct or wind velocity, but are influenced somewhat by changes of outdoor air contaminant concentration and are influenced very slightly by changes of outdoor air temperature and are not influenced at all by changes of outdoor air humidity.

• Proceedings of the KIEE Conference
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• 2009.07a
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• pp.1515_1516
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• 2009

A 440MHz wireless and passive surface acoustic wave (SAW) based micro-sensor was developed for simultaneous measurement of temperature and humidity. The developed sensor is composed of a SAW reflective delay lines structured by an IDT (Inter-Digital Transducer), four reflectors and humidity sensitive film (polyimide). Polyimide was dry-ecthed by RIE (Reactive Ion Etching) to obtain high roughness, which gives the large reaction area resulting in high sensitivity. In wireless testing using a network analyzer, sharp reflection peaks with high S/N ratio, small signal attenuation, and few spurious peaks were observed in the time domain. High sensitivity towards the temperature and humidiy were also observed in the large concentration range. The obtained sensitivity was $16.8^{\circ}/^{\circ}C$ for temperature sensor and $15.8^{\circ}$/%RH for humidity sensor.

• Journal of the Korean Institute of Telematics and Electronics T
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• v.35T no.2
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• pp.1-5
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• 1998

$CaSnO_3$ specimens were fabricated by solid reaction method, and their humidity sensitive characteristics have been investigated. Capacitance increases with increasing relative humidity, better humidity sensitivity are shown at lower frequencies. Humidity sensitivity are stable at variable temperatures, and hysteresis phenomenon is shown with adsorption and desorption. Drift phenomenon is exhibited by exposing the specimens in the air, and a decrease of humidity sensitive by contamination is inhibited by heat cleaning.

• Journal of the Korean Ceramic Society
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• v.32 no.11
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• pp.1283-1291
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• 1995

The electrical conductivity, flammable gas response and their humidity effect of porous ZnO, added with 5wt% corn starch as the fugitive phase, were examined. Porous ZnO showed different conductivity curves during increasing and decreasing temperature, and its electrical conductivity decreased rapidly by desorption of OH- between 20$0^{\circ}C$ and 35$0^{\circ}C$ when the temperature increased in dry air. The CO gas sensitivity of starchadded ZnO samples was higher than that of ZnO without starch addition. The sensitivity of porous, starchadded ZnO to 200ppm CO gas was much less in humid atmosphere than in dry atmosphere since water vapor increased the conductivity of porous ZnO in air, but decreased the conductivity in CO. Maximum sensitivity to 200 ppm CO gas balanced by air was about 100 in dry atmosphere and about 15 in RH 23% atmosphere.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1995.11a
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• pp.343-346
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• 1995

In this paper, the effect of alkaline oxides on the humidity sensitivity of $V_2O_{5}$(2mol%)-doped $TiO_2$(98mol%) was investigated as functions of $Li_{2}Co_{3}$, $Na_{2}Co_{3}$. III-1. Measurement of Density. When the mole% of $Li_2$O is varied 0,1,2,5mol%, the more the mole% of additives is increased, the more difference of bulk and apparent density is largely narrowed. The difference of two densities of sample containing 2mol% $Na_2O$ was large all the moat. The sample containing 1mol% $Na_2O$ was small most. III-2. Observation of porosity. The porosity and total intrusion volume according to various amounts of $Li_2O$ was reduced and those of sample containing 2mol% $Na_2O$ as 31.13%, 0.1155mL/g was the highest and 1mol% $Na_2O$ was lowed most and 5, 10mol% $Na_2O$ was more high compare with sample without alkaline oxides. III-3. Characteristic of humidity sensitivity. 1. Impedance of samples containing $Li_2O$ was high compare with sample without alkaline oxides, so we thought it showed Poor sensitivity because it have no impedance changing rapidly as function of relative humidity. 2. When the humidity was increasing from 30RH% to 90RH%, the impedance of sample containing 2mol% $Na_2O$ at 120HZ changed exponential rapidly from 6${\times}$$10^{7}$$\Omega$) to 1.25${\times}$$10^4$$\Omega$. At under 50RH% and over 50RH%, the humidity sensitivity of samples containing 2mol% $Na_2O$ was best especially in the range of the low humidity. III-4. Characteristic of TG curves. When algal me oxide $M_{2}CO_{3}$(M=Li, Na) were added into $V_{2}O_{5}$-doped $TiO_2$, the stability of humidity sensitivity of samples containing amounts of $Li_2O$ was unstable. The samples containing 1mol% $Na_2O$ was unstable.

• Proceedings of the KIEE Conference
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• 1995.11a
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• pp.427-429
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• 1995

In this paper, the effect of alkaline oxides on the humidity sensitivity of $V_2O_5$(2mol%)-doped $TiO_2$(98mol%) was investigated as functions of $Li_2CO_3$, $K_2CO_3$, additives (x= 0.0 mol%, 1mol%, 2mol%, 5mol%, 10mol%). 1. The porosity and total intrusion volume of sample containing 1, 2, 5mol% $K_2O$ was increased, and then those of 10mol% $K_2O$ was reduced again. 2. The humidity sensitivity of samples containing 1, 2, 5, 10mol% $K_2O$ were good generally. Especially the sample containing 5mol% $K_2O$ were the better. 3. the stability of the humidity sensitivity of samples containing $K_2O$ at low and high temperatures is very good.

• Proceedings of the KIEE Conference
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• 1995.07c
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• pp.1066-1068
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• 1995

The formation properties and oxidation mechanism of electrochemically oxidized porous silicon(OPS) films have been studied. To examine the humidity-sensitive properties of OPS films, surface-type and bulk-type humidity sensors were fabricated. The oxidized thickness of porous silicon layer(PSL) increases with the charge supplied during electrochemical oxidation and current density. The humidity sensor shows high sensitivity at high relative humidity in low temperature. The sensitivity and linearity can be improved by increasing a porosity of PSL.

• Journal of the Korean institute of surface engineering
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• v.29 no.6
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• pp.703-708
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• 1996

Humidity sensing cheracterisrics of vacuum deposited plasma poly merized $YbPc_2$ films were evaluated. In both films, humidity caused an increase of pro-ton conduction. Polymerised film shows a threshold fo humidity increase and its sensitivity diminishes more than $38^{\circ}C$ of relative humidity. Furthermore, for the polymerized film, two min. of resssponse time and 1 min. of recovery time are also obtained. The sensitivity between 10% and 85% of relative hum-idities is found to be one hundred higher than that of the vacuum deposited film.

• JSTS:Journal of Semiconductor Technology and Science
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• v.4 no.2
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• pp.128-132
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• 2004

This paper presents the design, fabrication sequence and measurement results of a highly sensitive capacitive-type humidity sensor using a polyimide film without hydrophobic elements. The structure of the humidity sensor is MIM (metalinsulator-metal). For a high sensitivity, a modified aromatic polyimides as a moisture absorbing layer has been synthesized instead of using general polyimides containing hydrophobic elements. The polyimide film was obtained by synthesizing and thermally polymerizing polyamic acid composed of m-pyromellitic dianhydride, phenelenediamine and dimethylacetamide. Characteristics of fabricated sensors which include sensitivity, hysteresis and stability have been measured. The measurement result shows the percent normalized capacitance change of 0.37/%RH over a range from 10 to 90%RH, hysteresis of 0.77% over the same %RH range and maximum drift of 0.25% at 50%RH. The result shows that the developed humidity sensor can be applied to evaluate a hermeticity of various sensors and actuator systems as well as micro packages.