• 한국재료학회지
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• 제2권3호
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• pp.163-171
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• 1992

$TiO_2$가 5-50wt%첨가된 $SnO_2/TiO_2$ 후막형 감습소자를 스크린 프린팅 법을 이용하여 제조 하였다. 소자의 표면결정구조를 XRD, SEM 그리고 FTIR로 조사하였으며, 전기적 특성에 의한 후막소자의 감습특성을 측정하였다. $SnO_2/TiO_2$ 후막은 $TiO_2$ 결정상 보다 주로$(SnO^2){\cdot}6T$ 결정상으로 나타났으며, $1300^{\circ}C$에서 소결된 후막소자의 평균입경은 $2.0{\mu}m$이었다. 또한 $1300^{\circ}C$에서 소결된 10wt% $TiO_2$가 첨가된 $SnO_2/TiO_2$ 후막소자는 상대습도 20-90%에서 높은 감습특성을 나타내었다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1992년도 하계학술대회 논문집 B
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• pp.737-739
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• 1992

The microstructure and humidity sensitive characteristics of $V_2O_5$ doped $CaTiO_3$ were studied. Sensing elements were prepared in bulk form. This element exhibits a porous structure. The grain grows and electrical conductivity increases as doping amount of $V_2O_5$ increases. The change of impedance and capacitance under different r.h is remarkable, and the conduction carriers of this element were ions.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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• pp.814-817
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• 2003

As additive Pt of a little to $SnO_2$ that gas sensing property is superior oxide-semiconductor material to fabricate gas sensor that operation is possible at room temperature and fabricated ceramic gas sensing devices. And, the change amount and sintering temperature of addition material investigated gas sensitivity by change of operation temperature, humidity relativity, Long-term stability and hysteresis. And achieved SEM and XRD analysis for characteristics searching examination of devices.

• 마이크로전자및패키징학회지
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• 제13권4호
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• pp.65-70
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• 2006

CVD 및 PECVD법으로 탄소 나노튜브를 성장하고, 그 후 $400{\sim}500^{\circ}C$에서 산화 열처리한 센서의 이산화질소 감지특성을 $200^{\circ}C$ 및 1.5ppm의 이산화질소 농도 하에서 측정하였다. 탄소 나노튜브 센서의 전기저항은 온도 증가에 따라 감소하는 반도체 특성을 보였으며, 이산화질소 흡착에 따라 전기저항은 감소하였다. 공기 중의 수분은 센서감도에 영향을 주고 있으며, 센서를 마이크로파에 3분간 노출하면 센서의 특성은 저하되었다. 또한 CVD법으로 제조한 시편에 비하여 PECVD법으로 성장한 탄소 나노튜브 센서의 감도는 향상 되었다.

• 융합신호처리학회논문지
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• 제9권2호
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• pp.146-153
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• 2008

본 연구에서는 $0.8{\mu}m$ 아날로그 혼합 CMOS 기술에 의한 2단 연산 증폭기를 가진 집적화된 습도센서 시스템을 설계 및 제작하였다. 시스템은 28핀 및 $2mm{\times}4mm$의 크기를 가졌으며, 휘스톤 브릿지형 습도센서, 저항형 습도센서, 온도센서 및 신호의 증폭과 처리를 위한 연산증폭기를 단일 칩에 구성하였다. 기존의 CMOS 공정에 트렌치형의 감지 영역을 형성하기 위해 폴리-질화 에치 스탑 공정을 시도하였다. 이러한 수정된 기술은 CMOS 소자의 특성에 영향을 주지 않았고, 표준 공정으로 동일 칩 상에 센서와 시스템을 제작할 수 있도록 하였다. 연산증폭기는 이득 폭이 5.46 MHz 이상, 슬루율이 10 V/uS 이상으로 센서를 동작하기에 안정된 특성을 보였다. N형 습도감지 전계효과 트랜지스터의 드레인 전류는 상대습도가 10%에서 70%로 변화할 때 0.54mA에서 0.68 mA로 변화하였다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1994년도 춘계학술대회 논문집
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• pp.67-70
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• 1994

On this study, we fabricated humudity sensor with polyimide thin film from the nonaqueous emulsion by the electrophoretic deposition as a function of film thickness. then evaluated performance of the sensor with increasing relative humidity if constant temperature constant humidity chamber, which is electronically controlled. we designed upper electrode of the sensor to brush type to make moisture particles permeate into the polymer bulk. sensing properties of the sensor on % RH shows proportion on the low %RH. Fer the 30V-30S- 200$^{\circ}C$ sample, percentage changing of capacitance on from 30 %RH to 90 %RH is 45.8 %, and increasing rate per 1 % RH of capacitance is 11.25 pF

• 대한원격탐사학회:학술대회논문집
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• 대한원격탐사학회 2002년도 Proceedings of International Symposium on Remote Sensing
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• pp.644-648
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• 2002

Though it was difficult of globally monitor latent heat flux aver the ocean for many years, the situation is rapidly changing by the use of satellite data. Since a bulk formula is used to estimate turbulent heat flux using satellite data, we need wind speed, sea surface temperature and specific humidity data. However, it is not easy to accurately estimate specific humidity using satellite data. Now several algorithms for estimating specific humidity have been proposed and applied to construct latent heat flux data sets. Latent heat flux data sets derived from satellite data such as J-OFURO, HOAPS and GSSTF are available at present. Since the algorithm and used satellite data are not the same between them. the characteristics of each data set may be different. Therefore, it is important to clarify the difference between each data set and investigate the cause of the difference in latent heat flux estimates. In this paper we summarize the present state of the art with regard to the turbulent heat flux estimation by using satellite data. Also we present the comparison results of latent heat flux fields including not only satellite-derived flux fields but also analysis fields.

• 한국표면공학회지
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• 제56권6호
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• pp.393-400
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• 2023

Acetone, a metabolite detected from the exhaled breath of people doing a diet, can be used for non-invasive monitoring of diet efficiency. Thus, gas sensors with rapid response and recovery characteristics to acetone need to be developed. Herein, we report ultrafast acetone sensors using Ce-doped In₂O₃ nanoparticles prepared by the one-pot microwave-assisted hydrothermal method. The pure In₂O₃ sensor shows a high response and fast response time (τ_res = 6 s) upon exposure to 2 ppm acetone at 300 ℃, while exhibiting a relatively sluggish recovery speed (τ_recov = 1129 s). When 20 wt% Ce is doped, the τ_recov of the sensor significantly decreased to 45 s withholding the fast-responding characteristic (τ_res = 6 s). In addition, the acetone response (resistance ratio, S) of the sensor is as high as 5.8, sufficiently high to detect breath acetone. Moreover, the sensor shows similar acetone sensing characteristics even under a highly humid condition (relative humidity of 60%) in terms of τ_res (6 s), τ_recov (47 s), and S (4.7), demonstrating its high potential in real applications. The excellent acetone sensing characteristics of Ce-doped In₂O₃ nanoparticles are discussed in terms of their size, composition, phase, and oxygen adsorption on the sensing surface.

• 설비공학논문집
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• 제20권5호
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• pp.304-313
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• 2008

This paper investigates the indoor-air-quality (IAQ) characteristics of the interior space equipped with system air-conditioner. The behaviors of individual variables such as temperature, humidity and concentration of carbon dioxide ($CO_2$) that influence on IAQ of the interior space were characterized under various cooling conditions by numerical and experimental studies. The numerical analysis predicting the temperature behavior of the interior space was conducted, and its results showed a good agreement with the experimental ones. The $CO_2$ concentration and humidity were measured and their time dependent behaviors were monitored and analyzed. From the results, it was found that there existed the differences of the time-dependent behaviors of IAQ variables according to the locations. In addition, it is demonstrated that the large discharge angle of $45^{\circ}$ made the temperature profile more irregular and the high discharge flow of 5.34 m/s produced similar temperature profiles at three different sensing locations. Finally, the humidity of interior space was less sensitive to the changes of the air cooling conditions than the case of temperature and the $CO_2$ concentration increase mainly depended on the number of individuals inside the space.

• 전기학회논문지
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• 제62권7호
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• pp.974-979
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• 2013

$TiO_2$ thin films are fabricated using R.F.sputtering method. $TiO_2$ thin films are coated on $Al_2O_3$ substrate printed IDE(interdigitated electrode). Impedance of thin films decreases according to increase relative humidity and it increases according to decrease measuring frequency. When substrate temperature is room temperature, impedance of thin films is from 45.68[MHz] to 37.76[MHz] within the limits from 30[%RH] to 75[%RH] at 1[kHz]. Whereas when substrate temperature is 100[$^{\circ}C$], impedance of thin films is from 692[kHz] to 539[kHz] within the limits from 30[%RH] to 75[%RH] at 1[kHz]. Impedance variation of thin films is bigger in low frequency regions than in high frequency regions. When substrate temperature is 100[$^{\circ}C$], impedance of thin films is lower than that of room temperature.