• 한국분말야금학회:학술대회논문집
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• 한국분말야금학회 1998년도 추계학술대회 및 발표대회 강연 및 발표논문 초록집
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• pp.38-38
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• 1998

• 대한전자공학회논문지
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• 제25권12호
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• pp.1649-1655
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• 1988

Thermally growon SiO2 films were thermally nitrided in a hot-wall furnace and in a RF-heated cold-wall reactor and their characteristics were investigated by the AES and the C-V dmeasurements. The Auger depth profile show that 200\ulcornerSiO2 film nitrided at 1200\ulcorner, for 2hrs by the hot-wall process has a nitrogen-rich layer near the SiOxNy-Si interface. However the nitrogen-ri h layer is not observed in the case of cold-wall process. The maximum flat-band voltage for the SiO2 films nitrided by the hot-wall process is higher than by the cold-wall process, and the peak value of flat-band voltage for the hot-wall process appears the longer nitridation time than that for the cold-wall process. The SiOxNy-Si interface shift toward the Si substrate for the case of the hot-wall process is larger than that for the cold-wall process.

• 한국결정성장학회지
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• 제12권4호
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• pp.215-221
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• 2002

$SiH_2Cl_2/H_2$ 기체혼합물을 원료로 사용하여 (100) Si 기판 위에 고온벽 화학기상증착법(hot-wall CVD)으로 에피 실리콘을 증착시켰다. 공정변수(증착온도, 반응기 압력, 입력 기체의 조성비($H_2/SiH_2Cl_2$)등)가 실리콘 증착에 미치는 영향을 조사하기 위해 열화학적 전산모사를 수행하였으며, 전산모사를 통해 얻은 공정조건의 범위를 바탕으로 실험한 결과, 전산모사의 결과와 실험이 잘 일치함을 알 수 있었다. 실험을 통해 얻은 최적 증착 조건은 증착온도가 850~$950^{\circ}C$, 반응기 압력은 2~5 Torr, $H_2/SiH_2Cl_2$비는 30~70 정도임을 알 수 있었고, 증착된 에피 실피콘은 두께 및 비저항의 균일도가 우수하고 불순물 함량이 낮은 양질의 박막임을 확인할 수 있었다.

• 한국결정성장학회:학술대회논문집
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• 한국결정성장학회 1998년도 PROCEEDINGS OF THE 14TH KACG TECHNICAL MEETING AND THE 5TH KOREA-JAPAN EMGS (ELECTRONIC MATERIALS GROWTH SYMPOSIUM)
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• pp.173-176
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• 1998

Epitaxial Si layers were deposited on n- or p-type Si(100) substrates by hot-wall chemical vapor deposition (CVD) technique using the {{{{ {SiH }_{ 2} {Cl }_{2 } - {H }_{ 2} }}}}chemistry. Thermodynamic calculations if the Si-H-Cl system were carried out to predict the window of actual Si deposition procedd and to investigate the effects of process variables(i.e., the deposition temperature, the reactor pressure, and the source gas molar ratios) on the growth of epitaxial layers. The calculated optimum process conditions were applied to the actual growth runs, and the results were in good agreement with the calculation. The expermentally determined optimum process conditions were found to be the deposition temperature between 900 and 9$25^{\circ}C$, the reactor pressure between 2 and 5 Torr, and source gad molar ration({{{{ {H }_{2 }/ {SiH }_{ 2} {Cl }_{2 } }}}}) between 30 and 70, achieving high-quality epitaxial layers.

• Nuclear Engineering and Technology
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• 제29권2호
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• pp.175-180
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• 1997

It has been known that eater-side corrosion of fuel rods in nuclear reactor is accompanied with the metallic loss of wall thickness and hydrogen pickup in the fuel dadding tube. The fuel dad corrosion is one of the major factors to be controlled to maintain the fuel integrity during reactor operation. An oxide later thickness measuring device equipped with ECT probe system was developed by KAERI, and whose performance test was carried out in NDT(Non-destructive Test) hot-cell or PIE(Post Irradiation Examination) Facility. At first, the calibration/performance test was executed for the unirradiated standard specimen rod fabricated with several kinds of plastic thin films whose thickness ore predetermined, and the result of which showed a good precision within 10% of discrepancy. And then, hot test us peformed for the irradiated fuel rod selectively extracted from J44 fuel assembly discharged from Kori Unit-2. The data obtained with this device were compared with the metallographic result obtained from destructive examination in PIEF hot-cell on the same fuel rod to verify the validity of the measurement data.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2010년도 추계학술대회 초록집
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• pp.133.2-133.2
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• 2010

Fischer-Tropsch synthesis (FTS) was carried out in heat-exchanger typed reactor with cobalt metallic foam catalyst. Considering the heat and mass transfer limitations in the cobalt catalyst, a Co-foam catalyst with an inner metallic foam frame and an outer cobalt catalyst was developed. The Co-foam catalyst was highly selective toward liquid hydrocarbon production and the liquid hydrocarbon productivity at $203^{\circ}C$ reached to $52.5ml/(kg_{cat}{\cdot}h)$, which was higher than that obtained by the Co-pellet. Furthermore, the heat-exchanger typed reactor was developed to efficiently control the highly exothermic reaction heat. The reaction heat generated in the FTS reaction on the cobalt active site was easily transferred to reactor wall by the metallic foam in the catalyst and the transferred reaction heat was directly removed by the hot oil which circulated the wall side of the heat-exchanger typed reactor.

• 한국결정성장학회지
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• 제5권1호
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• pp.60-66
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• 1995

초음파 분무기에 의해 분무된 질산아연 염($Zn(NO_3)_2$) 용액(0.5M)의 에어로졸 거동과 분포에 대한 실제 실험 결과는 computer simulation 결과와 일치하였다. 즉, 반응관(thermophoresis)에 의해 반응관 중심부로 이동하였다. 또한 에어로졸의 농도 분포는 축길이가 증가함에 따라 반응관 중심쪽에 높았다. 합성된 ZnO 입자 중에서 반응과 중심에서는 볼 수 없었던 깨진 형태의 shell-like aggregates가 반응관 벽근처에서 관찰되었으며, 입자의 크기는 반응관 벽쪽($ 1.2 {\mu\textrm{m}$)이 중심쪽($0.9 {\mu\textrm{m}$)보다 컸다.

• Nuclear Engineering and Technology
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• 제45권4호
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• pp.469-476
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• 2013

In a postulated severe core damage accident in a PHWR, multiple failures of core cooling systems may lead to the collapse of pressure tubes and calandria tubes, which may ultimately relocate inside the calandria vessel forming a terminal debris bed. The debris bed, which may reach high temperatures due to the decay heat, is cooled by the moderator in the calandria. With time, the moderator is evaporated and after some time, a hot dry debris bed is formed. The debris bed transfers heat to the calandria vault water which acts as the ultimate heat sink. However, the questions remain: how long would the vault water be an ultimate heat sink, and what would be the failure mode of the calandria vessel if the heat sink capability of the reactor vault water is lost? In the present study, a numerical analysis is performed to evaluate the thermal loads and the stresses in the calandria vessel following the above accident scenario. The heat transfer from the molten corium pool to the surrounding is assumed to be by a combination of radiation, conduction, and convection from the calandria vessel wall to the vault water. From the temperature distribution in the vessel wall, the transient thermal loads have been evaluated. The strain rate and the vessel failure have been evaluated for the above scenario.

• Nuclear Engineering and Technology
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• 제10권1호
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• pp.26-36
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• 1978

Hot cell의 설계를 위하여 기사용 연료에서의 방사능과 붕괴 에너지의 수치적 계산을 하였다. 고리 1호기와 같은 경수로에서 거의 최대 연소율인 33,000MWD/T(U)으로 태워진 연료봉 시험을 위하여 보관할 수 있는 최적의 벽과 창 두께가 추정되었다. 기사용 연료를 hot cell에 넣기 전에 차폐물질의 두께 추정을 위해 그 연료를 여러 시간 간격동안 저장용기 속에서 냉각시켰다는 가정을 했다. 여러 종류의 차폐물질이 고려되었으며 방사선원과 관측점과의 거리도 변화시켜 보았다.

• 대한기계학회논문집B
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• 제32권2호
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• pp.149-157
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• 2008

During CVD process of semiconductor wafer fabrication, maintaining the uniformity of temperature distribution at wafer top surface is one of the key factors affecting the quality of final products. Effect of contact conductance between wafer and hot plate on predicted temperature of wafer was investigated. The validity of opaque wafer assumption was also examined by comparing the predicted results with Discrete Ordinate solutions accounting for semitransparent radiative characteristics of silicon. As the contact conductance increases predicted wafer temperature increases and the differences between maximum and minimum temperatures within wafer and between wafer and hot plate top surface temperatures decrease. The opaque assumption always overpredicted the wafer temperature compared to semitransparent calculation. The influences of surrounding reactor inner wall temperature and hot plate configuration are then discussed.