• 제목/요약/키워드: Hot-film type

검색결과 113건 처리시간 0.026초

측온저항체 온도센서가 집적화된 발열저항체형 마이크로 유량센서의 제작 및 특성 (Fabrication and Characteristics of Hot-Film Type Micro-flowsensors integrated with RTD)

  • 정귀상;홍석우
    • 한국전기전자재료학회논문지
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    • 제13권7호
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    • pp.612-616
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    • 2000
  • This paper describes on the fabrication and characteristics of hot-film type micro-flowsensors integrated with Pt-RTD(resistance thermometer device) and micro-heater on the Si membrane in which MgO thin-film was used as medium layer in order to improve adhesion of Pt thin-film to SiO$_2$layer. The MgO layer improved adhesion of Pt thin-film to SiO$_2$layer without any chemical reactions to Pt thin-film under high annealing temperatures. Output voltages increased due to increase of heat-loss from sensor to external. The output voltage was 82 mV at $N_2$flow rate of 2000 sccm/min heating power of 1.2 W. The response time($\tau$:63%) was about 50 msec when input flow was stepinput

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SOI 멤브레인과 트랜치 구조상에 제작된 발열저항체형 마이크로 유량세선의 특성 (Characteristics of Hot-Film Type Micro-Flowsensors Fabricated on SOI Membrane and Trench Structures)

  • 정귀상;김미목;남태철
    • 한국전기전자재료학회논문지
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    • 제14권8호
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    • pp.658-662
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    • 2001
  • This paper describes on the fabrication and characteristics of hot-film type micro-flowsensors integrated with Pt-RTD(resistance thermometer device) and micro-heater on the SOI(Si-on-insulator) membrane and trench structures, in which MGO thin-film was used as medium layer in order to improve adhesion of Pt thin-film to SiO$_2$ layer. Output voltages increased due to increase of heat-loss from sensor to external. The output voltage was 250 nV at N$_2$ flow rate of 2000 sccm/min, heating power of 0.3 W. The response time($\tau$:63%) was about 42 msec when input flow was step-input. The results indicated that micro-flowsensors with the SOI membrane and trench structures have properties of a high-resolution and ow consume power.

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강판의 열간윤활압연특성 연구I (열간압연마모 시험기의 개발과 시험) (Development of Hot Rolling Wear Simulator and Roll Wear)

  • 김철희
    • 한국윤활학회:학술대회논문집
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    • 한국윤활학회 1996년도 제24회 춘계학술대회
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    • pp.126-132
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    • 1996
  • A laboratory scale hot strip rolling wear simulator(HRWS) was developed for the purpose of investigating the tribological phenomena occurred in production hot strip rolling mills. The HRWS' main parts are the electric heater, the mechanical descaler, tandem type 2-4Hi rolling mill stands, the cooling chamber, the tension controller and coiler. By simulating the tribelogical phenomena in rolling process at laboratory, wear patterns, cracks, cat-ear wear, black film, effect of hot rolling oil lubrication, etc. were reproduced, and discussed on the performace of simulator.

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열전박막을 이용한 마이크로 냉각소자 제작 (Fabrication of a Micro Cooler using Thermoelectric Thin Film)

  • 한승우;최현주;김병일;김병민;김동호;김욱중
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2007년도 춘계학술대회A
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    • pp.1459-1462
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    • 2007
  • In general a thermoelectric cooler (TEC) consists of a series of P type and N type thermoelectric materials sandwiched between two wafers. When a DC current passes through these materials, three different effects take place; Peltier effect, Joule heating effect and heat transfer by conduction due to temperature difference between hot and cold plates. In this study we have developed a micro TEC using $Bi_2Te_3$ (N type) and $Bi_{0.5}Sb_{1.5}Te_3$ (P type) thin films. In order to improve that performance of a micro TEC, we made 10 um height TE legs using special PR only for lift-off. We measured COP (coefficient of performance) and temperature difference between hot and cold connectors with current.

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Polymer Planar-Lightwave-Circuit-Type Variable Optical Attenuator Fabricated by Hot Embossing Process

  • Kim, Jin-Tae;Choi, Choon-Gi;Sung, Hee-Kyung
    • ETRI Journal
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    • 제27권1호
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    • pp.122-125
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    • 2005
  • A polymer-based planar-lightwave-circuit-type variable optical attenuator (VOA) was fabricated using a hot embossing process. With an optimized one-step embossing process, forty micro-channels for the guidance of light were defined on a polymer thin film with an accuracy of ${\pm}0.5{\mu}m$. The fabricated polymeric thermo-optic VOA shows 30 dB attenuation with 110 mW electrical input power at $1.55{\mu}m$. The rise and fall times are less than 5 ms.

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Hot Wall Epitaxy (HWE) 법에 의한 $CuInSe_2$ 단결정 박막 성장과 점결함 연구 (Study point defect and growth for $CuInSe_2$ single crystal thin film by hot wall epitaxy)

  • 유상하;홍광준
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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    • pp.152-153
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    • 2007
  • $CuInSe_2$ single crystal thin film was deposited on thoroughly etched semi-insulating GaAs(100) substrate by the hot wall epitaxy (HWE) system. After the as-grown $CuInSe_2$ single crystal thin films was annealed in Cu-, Se-, and In-atmospheres, the origin of point defects of $CuInSe_2$ single crystal thin films has been investigated by the photoluminescence(PL) at 10 K. The native defects of $V_{Cu}$, $V_{Se}$, $Cu_{lnt}$, and $Se_{lnt}$ obtained by PL measurements were classified as a donors or acceptors type. And we concluded that the heat-treatment in the Cu-atmosphere converted $CuInSe_2$ single crystal thin films to an optical n-type. Also, we confirmed that In in $CuInSe_2$/GaAs did not form the native defects because In in $CuInSe_2$ single crystal thin films existed in the form of stable bonds.

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열선 CVD법으로 증착된 비정질 실리콘 박막과 결정질 실리콘 기판 계면의 passivation 특성 분석 (Interface Passivation Properties of Crystalline Silicon Wafer Using Hydrogenated Amorphous Silicon Thin Film by Hot-Wire CVD)

  • 김찬석;정대영;송준용;박상현;조준식;윤경훈;송진수;김동환;이준신;이정철
    • 한국신재생에너지학회:학술대회논문집
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    • 한국신재생에너지학회 2009년도 춘계학술대회 논문집
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    • pp.172-175
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    • 2009
  • n-type crystalline silicon wafers were passivated with intrinsic a-Si:H thin films on both sides using HWCVD. Minority carrier lifetime measurement was used to verify interface passivation properties between a-Si:H thin film and crystalline Si wafer. Thin film interface characteristics were investigated depending on $H_2/SiH_4$ ratio and hot wire deposition temperature. Vacuum annealing were processed after deposition a-Si:H thin films on both sides to investigate thermal effects from post process steps. We noticed the effect of interface passivation properties according to $H_2/SiH_4$ ratio and hot wire deposition temperature, and we had maximum point of minority carrier lifetime at H2/SiH4 10 ratio and $1600^{\circ}C$ wire temperature.

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Boron Detection Technique in Silicon Thin Film Using Dynamic Time of Flight Secondary Ion Mass Spectrometry

  • Hossion, M. Abul;Arora, Brij M.
    • Mass Spectrometry Letters
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    • 제12권1호
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    • pp.26-30
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    • 2021
  • The impurity concentration is a crucial parameter for semiconductor thin films. Evaluating the impurity distribution in silicon thin film is another challenge. In this study, we have investigated the doping concentration of boron in silicon thin film using time of flight secondary ion mass spectrometry in dynamic mode of operation. Boron doped silicon film was grown on i) p-type silicon wafer and ii) borosilicate glass using hot wire chemical vapor deposition technique for possible applications in optoelectronic devices. Using well-tuned SIMS measurement recipe, we have detected the boron counts 101~104 along with the silicon matrix element. The secondary ion beam sputtering area, sputtering duration and mass analyser analysing duration were used as key variables for the tuning of the recipe. The quantitative analysis of counts to concentration conversion was done following standard relative sensitivity factor. The concentration of boron in silicon was determined 1017~1021 atoms/㎤. The technique will be useful for evaluating distributions of various dopants (arsenic, phosphorous, bismuth etc.) in silicon thin film efficiently.

풋고추의 유통과정중 Vitamin C 함량의 변화 (Studies on the Changes of Vitamin C content in the Hot Green Pepper Fruits during the Circulation Periods)

  • 김상옥
    • 대한가정학회지
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    • 제19권3호
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    • pp.41-45
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    • 1981
  • This study was carried out to observe the changes of Vitamin C content and to preserve the quality for the circulation periods of hot green pepper fruits wrapped with polyethylene film under the indoor temperature, as well as to find the proper time for harvest of hot green pepper fruits as a hot taste food and vegetable. the results obstained were as follows: 1. The consignment rate of hot green pepper fruits was highest, 60.2% on the 25th day after flowering, the nest 25.4% on the 20 th day, 10.3% on the 30th day and 4.1% on the 35th day. 2. the content of Vitamin C I each pepper fruits was highest o the 30th day, considerably high on the 25th day and 20th day. 3. The total content of Vitamin C in each part of hot green pepper fruits; the content in pericarp was much higher than in placenta and seed, and that of hydro type Vitamin C was almost the same. 4. The reduction rate of vitamin C during circulation periods was highest on the 3rd day; 42% in pericarp, 50% in placenta, 65% in seed. But in the package wrapped up with polyethylene film, the reduction rate in the same period was 5% in pericarp, which was very low in reduction, and those in placenta and seed were almost the same as in the unwrapped state.

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분리형 전기순간가열기에 의한 온수 비데 설계 (Design of Hot-water wit an Electric Instantaneous Water Heating Unit)

  • 고석조;김창동
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2004년도 추계학술대회 논문집
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    • pp.69-72
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    • 2004
  • There are an electronic and a manual type in Bidet. The electronic bidet has some advantages. it supplies multiple functions and is up easily. However, it has frequent defects and a high price. The manual bidet is not need to supply electric and is cheaper than the electronic type. However, it is needed to supply hot water and is hard to set up. In order to solve these defects, this study designed a bidet heating unit using an electric instantaneous water heating method. To get a proper heating elements, experiments were performed about a Ni-Cr heater and a film heater.

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