• Proceedings of the KIEE Conference
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• 2008.07a
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• pp.1440-1441
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• 2008

In this paper, we investigated the diffraction grating efficiency on AsSeS and Ag-doped amorphous chalcogenide Ag/AsSeS thin film for used to volume hologram. The Chalcogenide film thickness was 0.5um and Ag thin film was varied from 10nm and 20nm. Diffraction efficiency was obtained from (P:P) polarized Diode Pumped Solid State laser(DPSS, 532.0nm: 200mW) beam on AsSeS and Ag/AsSeS thin films. As a results, diffraction grating was not formed at AsSeS thin film but at Ag-doped AsSeS thin film, diffraction grating was formed well compare with the former.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.445-446
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• 2008

In this paper, we investigated the diffraction grating efficiency on Ag-doped amorphous chalcogenide Ag/AsSeS thin film for used to volume hologram. The film thickness was 2 um and diffraction efficiency was obtained from He-Ne (632.8nm) and DPSS(532nm) (P:P) polarized laser beam on Ag/AsSeS thin films. As a result, for the films, the maximum grating diffraction efficiency using He-Ne laser(632nm) is 0.15%[2000sec]. And then The recording speed of DPSS laser was about 40s which of batter than He-Ne lasers.

• Journal of the Semiconductor & Display Technology
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• v.18 no.2
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• pp.58-62
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• 2019

Diffractive Optical Elements(DOEs) diffracts incident light using the diffraction phenomenon of light to generate a desired diffraction image. In recent years, the use of diffraction optics, which can replace existing refractive optical elements with flat plates, has been increased by implementing various optical functions that could not be implemented in refractive optical devices and by becoming miniaturized and compacted optical elements. Direct laser lithography is typically used to effectively fabrication such a diffractive optical element in a large area with a low process cost. In this study, the process conditions for fabricating patterns of diffractive optical elements in various shapes were found using direct laser lithographic system, and optical performance evaluation was performed through fabrication.

• Proceedings of the Optical Society of Korea Conference
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• 2000.02a
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• pp.310-311
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• 2000

Jo Bessel 빔은 무회절 빔으로서 빔이 전파해 가면서 강도 분포의 변화가 없는 빔이다.$^{[1]}$ 이 베셀빔을 구현하기 위해서는 무한대의 크기를 갖는 수렴렌즈를 사용하여야 하기 때문에 완벽한 베셀빔을 구현할 수는 없다. 그러나 원고리형 슬릿$^{[3]}$ , Axicon 및 Computer -Generated Hologram(CGH)을 사용하여 근사적인 Bessel 빔을 만들 수 있다. 본 실험에서는 Negative Branch Unstable Resonator(NBUR) 고리형 Nd:YAG 공진기와 scraper 출력경을 사용하여 원고리형 출력광을 얻으며, 이에 의한 Bessel 빔을 구현 하기 위한 이론적인 배경과 이의 전산시늉을 시도하고, 실험결과와의 비교, 분석하였다. (중략)

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2015.11a
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• pp.182-182
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• 2015

레이저 홀로그램을 이용하여 $N_2$ 플라즈마를 진단하였다. 홀로그램 이미지에서 추출한 데이터는 optical emission spectroscopy와 langmuir probe로 측정한 데이터와 매우 유사한 경향성을 보였다. 이는 홀로그램 센서가 플라즈마의 전기 광학적 입자 정보를 제공할 수 있음을 의미한다. 홀로그램 안에 이 같은 정보가 저장될 수 있는 원리는 빛을 구성하는 양의 전하를 가지는 입자와 진공을 채우고 있는 음의 입자가 함께 형성하는 전자기적 에너지 필드의 형성에 있음을 밝힌다. 이러한 원리에 기초해서 그간 개발된 센서들을 소개한다.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2015.05a
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• pp.186-186
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• 2015

레이저 홀로그램에서 추출한 입자 데이터와 Langmuir probe로 측정한 이온 플럭스간의 개선된 상관관계를 보고한다. 레이저 홀로그램 센서 시스템을 이용하여 척 온도 변화에 따른 플라즈마 공간에서의 입자에너지 분포를 이미징하였다. 진공에너지분포를 뺀 에너지분포에 나타나는 두 종류의 분포에 관여하는 전체 입자수 분포는 이온플럭스 데이터와 전체 온도 범위에서 매우 유사한 경향성을 보였다.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2015.05a
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• pp.185-185
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• 2015

레이저 홀로그램 이미징 장치를 이용하여 진공챔버의 윈도우 면에서의 입자에너지 분포를 추출하는 센서의 성능을 보고한다. 레이저 홀로그램 센서는 윈도우 면에서의 입자수의 변화를 모니터링할 수 있음을 보였으며, 반복되는 플라즈마 공정 중에 윈도우나 챔버 벽에 증착되는 입자의 두께 변이의 모니터링에의 응용이 기대된다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.06a
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• pp.181-182
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• 2007

In this paper, we investigated the diffraction grating efficiency on $Ge_{75}Se_{25}$ and Ag-doped amorphous chalcogenide $Ag/Ge_{75}Se_{25}$ thin film for used to volume hologram. The film thickness was 2 um and diffraction efficiency was obtained from He-Ne (632.8nm) and DPSS(532nm) (P:P) polarized laser beam on $Ge_{75}Se_{25}$ and Ag/$Ge_{75}Se_{25}$ thin films. As a result. for the films, the diffraction efficiency on Ag/$Ge_{75}Se_{25}$ double layer, was better than single $Ge_{75}Se_{25}$ thin films. The recording speed of DPSS laser is higher than that of He-Ne laser.

• Journal of the Korean Institute of Telematics and Electronics A
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• v.33A no.5
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• pp.125-131
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• 1996

In this paper, we introduced the BQBPH method for making the grating of high efficiency which was improtant in implementing optical PS. The pattern of graing was obtianed by computer simulations using iterative method, and the diffraction efficeincy of designed grating was about 67% through BPM simulation. The grating was fabricated by laser beam writer, and the diffraction efficiency BPM simulation. The grating was fabricated by laser beam writer, and the diffraction efficiency was 47%. We implemented the optical PS with the grating and showed that optical experimental output patterns were good agreement with PS output patterns and first order was main diffraction order.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.447-448
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• 2008

In this paper, we investigated the diffraction grating efficiency on AsSeS and Ag-doped amorphous chalcogenide Ag/AsSeS thin film for used to volume hologram. The film thickness was 0.5um and diffraction efficiency was obtained from (P:P) polarized He-Ne (632.8nm)laser beam on AsSeS and Ag/AsSeS thin films. As a results, diffraction grating was not formed at AsSeS thin film but at Ag-doped AsSeS thin film, diffraction grating was formed well compare with the former.