• Title/Summary/Keyword: Hole fabrication

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The Effects of Oxygen Plasma and Cross-link Process on Quantum-dot Light Emitting Diodes

  • Cho, Nam-Kwang;Kang, Seong Jun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.215-215
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    • 2014
  • Red color light emitting diodes (LEDs) were fabricated using CdSe/CdZnS quantum dots (QDs). During the device fabrication process, oxygen plasma treatment on the ITO surface was performed to improve the interfacial contact between ITO anode and the hole injection layer. CdSe/CdZnS quantum dots were cross-linked to remove their surrounded organic surfactants. The device shows red emission at 622 nm, which is consistent with the dimension of the QDs (band gap=1.99 eV). The luminance shows 6026% improvement compared with that of LEDs fabricated without oxygen plasma treatment and quantum dots cross-linking process. This approach would be useful for the fabrication of high-performance QLEDs with ITO electrode and PEDOT:PSS hole injection layers.

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Nano-master fabrication for photonic crystal waveguides (광결정 도파로용 나노 마스터 제작)

  • 최춘기;한상필;정명영
    • Journal of the Korean Vacuum Society
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    • v.12 no.4
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    • pp.288-292
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    • 2003
  • The fabrication of silicon nano-master with pillar structures using E-beam lithography and ICP etching was investigated for application of 2-dimensional polymer photonic crystal waveguides with air hole structures. Pillar structures with square, hexagon, dodecagon and circle were successfully fabricated. The diameters and structures of fabricated pillars were measured by CD-SEM and SPM-AFM. It was found that the optimal dose for complete circle pillar structures was 432 $\mu$C/$\textrm{cm}^2$.

A Study on the Characteristics of Electrode Fabrication for Micro Hole-making (미세 구멍가공을 위한 전극성형 가공특성에 관한 연구)

  • Lee, Ju-Kyoung;Lee, Jong-Hang;Park, Cheol-Woo;Cho, Woong-Sick
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.31 no.11
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    • pp.1053-1058
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    • 2007
  • Micro-EDM technology (or the manufacture of miniature parts is used to make a micro hole. Two electrode shaping methods, mechanical electrode grinding and WEDG technique, have been studied. In this study, an electrode shaping method by using previously machined hole is introduced in order to obtain an optimal hole-making condition. Key factors such as applied voltage, capacitance, feedrate, and hole-dimension have an influence on the fabricating error of electrode shaping, which are taper ratio of a hole, electrode form accuracy, and electrode surface. Therefore, we try to investigate the optimal fabricating of electrode shaping from various experiments. Results from experiments, it was able to minimize the electrode fabricating error as voltage increases, and also applied feedrate and capacitance decreases.

AC전압 인가에 따른 알루미늄 양극산화 공정 및 박막 특성

  • Lee, Jeong-Taek;Choe, Jae-Ho;Kim, Geun-Ju
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.11a
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    • pp.242-242
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    • 2009
  • Fabrication of Anodic aluminum oxide under DC vias condition has been studied. When bias and time of anodic aluminum oxide process change, the hole distance and diameter size change. Comparison of fabricated AAO between AC vias and DC vias condition has been studied in this experiment. The first and second anodization of one aluminum is done by using DC and AC power supplier. And first and second anodization of another aluminum is done by DC power supplier. The size of the aluminum is $1cm{\times}3cm$, and second anodic aluminum oxide process takes about 45min. It is found that the hexagonal shape appears on the surface of the AAO. AC power source can fabricate aao which have a nano hole array. We can see that the hole on the surface of the AC vias has a better rounded hole than DC vias AAO. we need more data so we can get characteristic about AC power generated AAO.

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The Study on Properties of AAO(Anodic Aluminum Oxide) Structures with Hole Effect (Hole effect를 고려한 AAO(Anodic Aluminum Oxide) 구조물의 물성치에 대한 연구)

  • 고성현;이대웅;지상은;박현철;이건홍;황운봉
    • Journal of the Korean Society for Precision Engineering
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    • v.21 no.4
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    • pp.186-193
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    • 2004
  • Porous anodic alumina has been used widely for corrosion protection of aluminum surfaces or as dielectric material in micro-electronics applications. It exhibits a homogeneous morphology of parallel pores which can easily be controlled between 10 and 400nm. It has been applied as a template for fabrication of the nanometer-scale composite. In this study, mechanical properties of the AAO structures are measured by the nano indentation method. Nano indentation technique is one of the most effective methods to measure the mechanical properties of nano-structures. Basically, hardness and elastic modulus can be obtained by the nano-indentation. Using the nano-indentation method, we investigated the mechanical properties of the AAO structure with different size of nano-holes. In results, we find the hole effect that changes the mechanical properties as size of nano hole.

A Study on the Fabrication and Evaluation of Burnishing Drills for Aluminum Hole Making (알루미늄 홀 가공용 버니싱 드릴의 제작 및 평가에 관한 연구)

  • Ha, Jeong-Ho;Kim, Dong-Gyu;Sa, Min-Woo
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.21 no.7
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    • pp.53-63
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    • 2022
  • Recently, the use of aluminum components in the reduction of the vehicle weight to improve fuel efficiency and reduce carbon dioxide emissions has increased. In the aluminum machining cutting process, hole-making is an important process that accounts for 30% of the machining process. Although many studies have been conducted using the continuously advancing hole processing technology, studies on the machinability of the tool depending on the type of chuck on the workpiece are still lacking. In this study, the machining performance of cemented carbide burnishing drills was compared and analyzed according to chuck type. The burnishing drill was used to create a hole in the AL6061 workpiece, and the surface roughness and dimensional accuracy of the hole were examined according to the type of chuck while monitoring the spindle load.

Hole Defects on Two-Dimensional Materials Formed by Electron Beam Irradiation: Toward Nanopore Devices

  • Park, Hyo Ju;Ryu, Gyeong Hee;Lee, Zonghoon
    • Applied Microscopy
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    • v.45 no.3
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    • pp.107-114
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    • 2015
  • Two-dimensional (2D) materials containing hole defects are a promising substitute for conventional nanopore membranes like silicon nitride. Hole defects on 2D materials, as atomically thin nanopores, have been used in nanopore devices, such as DNA sensor, gas sensor and purifier at lab-scale. For practical applications of 2D materials to nanopore devices, researches on characteristics of hole defects on graphene, hexagonal boron nitride and molybdenum disulfide have been conducted precisely using transmission electron microscope. Here, we summarized formation, features, structural preference and stability of hole defects on 2D materials with atomic-resolution transmission electron microscope images and theoretical calculations, emphasizing the future challenges in controlling the edge structures and stabilization of hole defects. Exploring the properties at the local structure of hole defects through in situ experiments is also the important issue for the fabrication of realistic 2D nanopore devices.

A Proton Beam Shaping using an Extreme Aspect Ratio Micro-hole (극대세장비 마이크로 홀을 이용한 양성자 빔 집적 응용)

  • Kim, Jin-Nam;Kwon, Won-Tae;Lee, Seong-Gyu
    • Journal of the Korean Society for Precision Engineering
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    • v.29 no.7
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    • pp.737-744
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    • 2012
  • EDM is the manufacturing process that uses the thermal energy to machine electrically conductive part. Despite a lot of research has been conducted for decades, the best aspect ratio of the micro hole using micro-EDM has not been over 30, yet. In the present study, new fabrication scheme was introduced to increase the aspect ratio of micro hole dramatically. Micro holes with less than 10 aspect ratio were aligned and welded together to manufacture a micro hole with extreme aspect ratio. Alignment of the micro hole with over 380 aspect ratio was conducted by the home-made apparatus installed with microscope and laser beam. The micro hole with extreme aspect ratio was used to shape pencil beam from proton beam generated from MC-50 cyclotron. The pencil beam was utilized to machine test specimen whose result was compared with GEANT4 computer simulation. It was shown that the experimental and simulation result were closer as the aspect ratio of the micro hole was bigger.

Fabrication of Plasmon Subwavelength Nanostructures for Nanoimprinting

  • Cho, Eun-Byurl;Yeo, Jong-Souk
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.247-247
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    • 2012
  • Plasmon subwavelength nanostructures enable the structurally modulated color due to the resonance conditions for the specific wavelength range of light with the nanoscale hole arrays on a metal layer. While the unique properties offered from a single layer of metal may open up the potential applications of integrated devices to displays and sensors, fabrication requirements in nanoscale, typically on the order of or smaller than the wavelength of light in a corresponding medium can limit the cost-effective implementation of the plasmonic nanostructures. Simpler nanoscale replication technologies based on the soft lithography or roll-to-roll nanoimprinting can introduce economically feasible manufacturing process for these devices. Such replication requires an optimal design of a master template to produce a stamp that can be applied for a roll-to-roll nanoimprinting. In this paper, a master mold with subwavelength nanostructures is fabricated and optimized using focused ion beam for the applications to nanoimprinting process. Au thin film layer is deposited by sputtering on a glass that serves as a dielectric substrate. Focused ion beam milling (FIB, JEOL JIB-4601F) is used to fabricate surface plasmon subwavelength nanostructures made of periodic hole arrays. The light spectrum of the fabricated nanostructures is characterized by using UV-Vis-NIR spectrophotometer (Agilent, Cary 5000) and the surface morphology is measured by using atomic force microscope (AFM, Park System XE-100) and scanning electron microscope (SEM, JEOL JSM-7100F). Relationship between the parameters of the hole arrays and the corresponding spectral characteristics and their potential applications are also discussed.

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