Browse > Article

Nano-master fabrication for photonic crystal waveguides  

최춘기 (한국전자통신연구원, 반도체원천기술연구소, 광접속모듈팀)
한상필 (한국전자통신연구원, 반도체원천기술연구소, 광접속모듈팀)
정명영 (부산대학교 나노과학기술학부)
Publication Information
Journal of the Korean Vacuum Society / v.12, no.4, 2003 , pp. 288-292 More about this Journal
Abstract
The fabrication of silicon nano-master with pillar structures using E-beam lithography and ICP etching was investigated for application of 2-dimensional polymer photonic crystal waveguides with air hole structures. Pillar structures with square, hexagon, dodecagon and circle were successfully fabricated. The diameters and structures of fabricated pillars were measured by CD-SEM and SPM-AFM. It was found that the optimal dose for complete circle pillar structures was 432 $\mu$C/$\textrm{cm}^2$.
Keywords
Photonic crystals; Electron-beam lithography; Nano-master; Exposure dose;
Citations & Related Records
연도 인용수 순위
  • Reference
1 /
[ V.Grigaliunas;V.Kopustinskas;S.Meskinis;M.Margelevicius;I.Mikulskas;R.Tomasiunas ] / Optical Materials
2 /
[ J.Seekamp;S.Zankovych;A.H.Helfer;P.Maury;C.M.Sotomayor Torres;G.Bottger;C.Liguda;M.Eich;B.Heidari;L.Montelius;J.Ahopelto ] / Nanotechnology   ScienceOn
3 /
[ J.Murakowski;D.Pustai;D.Prather ] / J. Vac. Sci. Technol. B
4 /
[ D.M.Tanebaum;C.W.Lo;M.Isaacson;H.G.Craighead;M.J.Rooks;K.Y.Lee;W.S.Huang;T.H.P.Chang ] / J. Vac. Sci. Technol. B
5 /
[ S.Y.Chou;P.R.Krauss;W.Zhang;L.Guo;L.Zhuang ] / J. Vac. Sci. Technol. B   ScienceOn
6 /
[ E.Chomski;G.A.Ozin ] / Adv. Mater.   ScienceOn