• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.18 no.5
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• pp.389-395
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• 2005

The etching technology of the high aspect ratio contact(HARC) is necessary at the critical contact processes of semiconductor devices. Etching the $SiO_{2}$ contact hole with the sub-micron design rule in manufacturing VLSI devices, the unexpected phenomenon of 'profile tilting' or 'bottom distortion' is often observed. This makes a short circuit between neighboring contact holes, which causes to drop seriously the device yield. As the aspect ratio of contact holes increases, the high C/F ratio gases, $C_{4}F_{6}$, $C_{4}F_{8}$ and $C_{5}F_{8}$, become widely used in order to minimize the mask layer loss during the etching process. These gases provide abundant fluorocarbon polymer as well as high selectivity to the mask layer, and the polymer with high sticking yield accumulates at the top-wall of the contact hole. During the etch process, many electrons are accumulated around the asymmetric hole mouth to distort the electric field, and this distorts the ion trajectory arriving at the hole bottom. These ions with the distorted trajectory induce the deformation of the hole bottom, which is called 'profile tilting' or 'bottom distortion'. To prevent this phenomenon, three methods are suggested here. 1) Using lower C/F ratio gases, $CF_{4}$ or $C_{3}F_{8}$, the amount of the Polymer at the hole mouth is reduced to minimize the asymmetry of the hole top. 2) The number of the neighboring holes with equal distance is maximized to get the more symmetry of the oxygen distribution around the hole. 3) The dual frequency plasma source is used to release the excessive charge build-up at the hole mouth. From the suggested methods, we have obtained the nearly circular hole bottom, which Implies that the ion trajectory Incident on the hole bottom is symmetry.

• Water Engineering Research
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• v.1 no.1
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• pp.83-92
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• 2000

Jet flow can occur by gate opening at downstream of a hydraulic structure such as weir of drainage gate. If the stream bed is not hard or the bed protection is not sufficient, vortex erosion occurs and a resulting scour hole will be formed due to the high shear stress of the jet flow. Once the scour hole is formed, a vortex occurs in ti and this vortex causes additional erosion. If this erosion continues and reaches to the hydraulic structure, it can undermine the bottom of the hydraulic structure and this will lead to failure of the structure itself. Thus, it is necessary to define the physical features of the vortex structure in the scour hole for the design of the bed protection. This study presents the turbulent vortex structure in the scour hole by the gate opening of the hydraulic structure. Characteristics of vortex motion, circulation, vortex scale and vortex were analyzed through experiments. Experimental results of the vortex velocity were compared with theoretical ones. From these, circulation and vortex scale were obtained with known values of inflow depth, inflow velocity and scale of scour hole

• Journal of Biosystems Engineering
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• v.27 no.6
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• pp.557-564
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• 2002

Corrugated board is an efficient low-cost structure material fur the boxes that are widely used for transporting, storing and distributing goods. Corrugated board is also considered as an orthotropic because the principal material directions are the same as in paperboard. The purpose of this study was to elucidate the principal design parameters of ventilating box through the FEA on the various types of ventilating hole. From the viewpoint of the stress distribution and stress level, the optimum pattern and location of the ventilating hole were vertically oblong, and symmetry position with a short distance to the right and left from the center of front and rear panel. And, the optimum location and pattern of hand hole were a short distance to the top from the center of both side panels, and modified shape to increase the radius of curvature of both side in horizontal oblong. In general, the optimum pattern and location of both the ventilating hole and hand hole based on the FEM analysis were well verified by experimental investigation. It is suggested that decrease in compressive strength of the box could be minimized in the same ventilating hole area under the condition of the length of major axis of ventilating hole is less than 1/4 of box length, the ratio of minor axis/major axis is 113.5∼l/2.5, and number of the ventilating holes is even and symmetrical.

• Proceedings of the Materials Research Society of Korea Conference
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• 2009.05a
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• pp.37.1-37.1
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• 2009

최근 휘어짐이 가능한 flexible display의 개발이 활발히 진행됨에 따라 OLED(organic light emitting diode)의 발전 가능성은 커지고 있다. 하지만 cathode 재료인 Cr, Al등은 tensile 또는 bending에 취약하다. 따라서 본 연구에서는, 인장시험용 아령모형의 PET($125\;{\mu}m$) 필름에 Al, Cr, Cr+Al을 각각 코팅하고 부분적으로 hole을 patterning함으로써 인장 시 미소크랙의 발생을 감소시켜 전기저항(R) 변화를 최소화하는 패턴형상을 design하고 세 가지 금속의 전기저항 변화를 통해 좀 더 우수한 flexible display용 금속을 찾는데 그 목적이 있다. 전극에 형성된 미세패턴의 영향과 패턴 된 hole size에 따른 전기저항의 변화를 알아보기 위해 hole size는 $50\;{\mu}m$, $30\;{\mu}m$, $10\;{\mu}m$로 제작하였고 각각의 금속막에 patterning하였다. 제작된 시편을 인장시험 장치에 설치 후 2mm/min의 속도로 인장응력을 가하면서 Load의 증가에 따른 금속막의 전기저항($\bigtriangleup$R)을 동시동작으로 측정하였다. 실험결과 인장시험 시 저항변화는 Cr이 짧은 시간에 가장 급격하게 변하였으며 다음으로 Cr+Al, Al순 이였다. 또한, hole size의 크기에 따른 전기저항의 변화는 $50\;{\mu}m$ size의 hole을 pattern한 시편이 가장 안정한 저항 변화를 보였다.

• KOREAN JOURNAL OF PACKAGING SCIENCE & TECHNOLOGY
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• v.7 no.2
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• pp.19-24
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• 2001

The design criteria of ventilating container is not provided yet in Korea. This caused strength reduction due to the ventilating hole and bad ventilating performance. The purposes of this study were to survey the present situation of ventilating container in Korea, to analyze the strength reduction on the atmosphere condition variation, and to provide the criteria for the optimum design of ventilating container. The ventilating area of container was $1.41{\sim}2.65%$, and strength reduction due to the varied pattern, size and location of ventilating hole was $8.5{\sim}20.2%$. The effect on the strength reduction from the pattern and location of ventilating hole was bigger than that from the ventilating area. Equilibrium arrival time of temperature and relative humidity was shorter as the ventilating area was bigger, and temperature reached to the equilibrium state earlier than the relative humidity. There was no significant difference on the ventilating hole pattern between equilibrium arrival time of temperature and relative humidity and equilibrium arrival temperature and relative humidity if the ventilating area was the same.

• 한국전산유체공학회:학술대회논문집
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• 2010.05a
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• pp.530-533
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• 2010

This paper presents numerical analysis and design optimization of various turbine blade cooling techniques with three-dimensional Reynolds-averaged Navier-Stokes(RANS) analysis. The fluid flow and heat transfer have been performed using ANSYS-CFX 11.0. A fan-shaped hole for film-cooling has been carried out to improve film-cooling effectiveness with the radial basis neural network method. The injection angle of hole, lateral expansion angle of hole and ratio of length-to-diameter of the hole are chosen as design variables and spatially averaged film-cooling effectiveness is considered as an objective function which is to be maximized. The impingement jet cooling has been performed to investigate heat transfer characteristic with geometry variables. Distance between jet nozzle exit and impingement plate, inclination of nozzle and aspect ratio of nozzle hole are considered as geometry variables. The area averaged Nusselt number is evaluated each geometry variables. A rotating rectangular channel with staggered array pin-fins has been investigated to increase heat transfer performance ad to decrease friction loss using KRG modeling. Two non-dimensional variables, the ratio of the eight diameter of the pin-fins and ratio of the spacing between the pin-fins to diameter of the pin-fins selected as design variables. A rotating rectangular channel with staggered dimples on opposite walls are formulated numerically to enhance heat transfer performance. The ratio of the dimple depth and dimple diameter are selected as geometry variables.

• Korean Journal of Computational Design and Engineering
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• v.8 no.1
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• pp.41-47
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• 2003

In this paper, a tetrahedral mesh generation algorithm which uses a grid based method for interior region and an advancing front method for outer surface region is proposed. In order to apply an advancing front method for outer region of an object, a new operator so called a hole operator has been developed to handle multiple shells. With this grid based approach in the interior region, more stable and uniform meshes can be constructed especially in the interior region.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2013.05a
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• pp.529-530
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• 2013

• Journal of the Microelectronics and Packaging Society
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• v.22 no.4
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• pp.71-76
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• 2015

Recently, light emitting diodes (LEDs) have been studied to improve their efficiencies for the uses in various fields. Particularly in the aspect of chip structure, via hole type vertical LED chip is developed for improvement of light output power, and heat dissipations. However, current vertical type LEDs have still drawback, which is current concentration around the n-contact holes. In this research, to solve this phenomenon, we introduced isolation layer under n-contact electrodes. With this sub-electrode, even though the active area was decreased by about 2.7% compared with conventional via-hole type vertical LED, we could decrease the forward voltage by 0.2 V and wall-plug efficiency was improved approximately 4.2%. This is owing to uniform current flow through the area of n-contact.

• Journal of the Korean Society for Precision Engineering
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• v.32 no.11
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• pp.961-968
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• 2015

This study aims to develop an efficient mold structure for the injection molding of a subminiature lens, using shell-type runners instead of traditional cylindrical runners. While the shell runner has the advantage of shorter cooling time due to its thinner geometry, this smaller thickness causes an increase in injection pressure. In this study, the design of the shell runner was modified to contain multiple holes for the purpose of reducing injection pressure. Numerical analyses were performed for shell runners of various hole-shapes, and the resulting filling and cooling characteristics were discussed; the rhombic hole showed the best result for both filling and cooling characteristics. Subsequently, injection molding experiments were performed using an injection mold fabricated based on the rhombic design. The lens parts were successfully molded with highly-reduced cycle time and without degradation of part quality.