• Journal of Sensor Science and Technology
• /
• v.12 no.4
• /
• pp.149-155
• /
• 2003

A PMOSFET photodetector for highly-sensitive active pixel sensor(APS) is presented. This sensor uses 5V power supply and has been designed and fabricated using I-poly and 2-metal $1.5{\mu}m$ CMOS technology. The feature of a PMOSFET photodetector is that the polysilicon gate of the PMOSFET was connected to n-well, in order to increase the photo sensitivity. The designed MOS photodetector has similar $I_{DS}-V_{DS}$ characteristics with a standard MOSFET. One dimensional image sensor with 16 pixels based on the PMOSFET photodetector has also been designed and fabricated. Unit pixel of the designed sensor consists of a PMOSFET photodetector and 4 NMOSFETs. Unit pixel area is $86{\mu}m{\times}90.5{\mu}m$ and its fill factor is about 12%.