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Dry etching of polycarbonate using O2/SF6, O2/N2 and O2/CH4 plasmas (O2/SF6, O2/N2와 O2/CH4 플라즈마를 이용한 폴리카보네이트 건식 식각)

  • Joo, Y.W.;Park, Y.H.;Noh, H.S.;Kim, J.K.;Lee, S.H.;Cho, G.S.;Song, H.J.;Jeon, M.H.;Lee, J.W.
    • Journal of the Korean Vacuum Society
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    • v.17 no.1
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    • pp.16-22
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    • 2008
  • We studied plasma etching of polycarbonate in $O_2/SF_6$, $O_2/N_2$ and $O_2/CH_4$. A capacitively coupled plasma system was employed for the research. For patterning, we used a photolithography method with UV exposure after coating a photoresist on the polycarbonate. Main variables in the experiment were the mixing ratio of $O_2$ and other gases, and RF chuck power. Especially, we used only a mechanical pump for in order to operate the system. The chamber pressure was fixed at 100 mTorr. All of surface profilometry, atomic force microscopy and scanning electron microscopy were used for characterization of the etched polycarbonate samples. According to the results, $O_2/SF_6$ plasmas gave the higher etch rate of the polycarbonate than pure $O_2$ and $SF_6$ plasmas. For example, with maintaining 100W RF chuck power and 100 mTorr chamber pressure, 20 sccm $O_2$ plasma provided about $0.4{\mu}m$/min of polycarbonate etch rate and 20 sccm $SF_6$ produced only $0.2{\mu}m$/min. However, the mixed plasma of 60 % $O_2$ and 40 % $SF_6$ gas flow rate generated about $0.56{\mu}m$ with even low -DC bias induced compared to that of $O_2$. More addition of $SF_6$ to the mixture reduced etch of polycarbonate. The surface roughness of etched polycarbonate was roughed about 3 times worse measured by atomic force microscopy. However examination with scanning electron microscopy indicated that the surface was comparable to that of photoresist. Increase of RF chuck power raised -DC bias on the chuck and etch rate of polycarbonate almost linearly. The etch selectivity of polycarbonate to photoresist was about 1:1. The meaning of these results was that the simple capacitively coupled plasma system can be used to make a microstructure on polymer with $O_2/SF_6$ plasmas. This result can be applied to plasma processing of other polymers.

Hydrothermal Pretreatment of Ulva pertusa Kjellman Using Microwave Irradiation for Enhanced Enzymatic Hydrolysis (구멍갈파래의 효소 가수분해 증진을 위한 마이크로파 이용 열수 전처리)

  • Kim, Jungmin;Ha, Sung Ho
    • Korean Chemical Engineering Research
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    • v.53 no.5
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    • pp.570-575
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    • 2015
  • The green algae have cellulose as a main structural component of their cell wall and the cellulose content in green algae is much higher than other marine algae such as brown algae and red algae. Furthermore, green algae do not contain lignin in their cell wall and store starch as food in their plastids. Thus, it was investigated that the effect of hydrothermal pretreatment process utilizing microwave irradiation for Ulva pertusa Kjellman, a division of green algae, which is expected to be utilized for bioenergy production, on the enzymatic hydrolysis. The hydrothermal temperature have an effect on the pretreatment of Ulva pertusa Kjellman, but the effect of power of microwave irradiation is negligible. The rate of enzymatic hydrolysis was increased as the hydrothermal temperature increased until $140^{\circ}C$. The enzymatic hydrolysis of pretreated Ulva pertusa Kjellman under the optimum pretreatment conditions (50 W of microwave irradiation power and $150^{\circ}C$ of hydrothermal temperature) with cellulase, ${\alpha}$-amylase, and Novozyme 188 having ${\beta}$-glucosidase acitivity resulted in the saccharification of 96 wt% of total carbohydrate in Ulva pertusa Kjellman during 3 hrs, while it took 24 hrs for the enzymatic hydrolysis of untreated Ulva pertusa Kjellman. It confirmed that the hydrothermal pretreatment was effective on Ulva pertusa Kjellman for the enzymatic hydrolysis.

A Study on the Determinants of Stop Smoking by Some Middle-aged Men in Seoul (서울 시내 일부 중년층 남성의 금연 결정요인에 관한 연구)

  • Kim, Eun-Ji;Kim, Myung
    • Korean Journal of Health Education and Promotion
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    • v.8 no.1
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    • pp.45-58
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    • 1991
  • The purpose of this study was to investigate determinants of stop smoking. The data on which the analysis was based come from a survey of 355 middle-aged men in Seoul. The data was analyzed using proportion, x²-test, Pearson's Correlation Coefficient and Stepwise Multiple Regression. The following were the results; 1. Success rate of stop smoking is 19.9% of 229 persons who attempted to quit smoking. 2. As for the number of quit attempts, 33.3% of ex-smokers tried once; 25.4% of current smokers tried twice. 3. As for methods of quit attempts ex-smokers showed higher tendency in using will power and books/guides than current smokers who in using will power alone. 4. For the attitudes on smoking of family, the majority of ex-smokers and current smokers were opposed absolutely. 5. The main opposite to smoking were wives in cases of both ex-smokers and current smokers, but More ex-smokers answered that the main opposite to smoking were others than current smokers. 6. As for the measures of smoking in the office, more ex-smokers answered inviting than current smokers and more current smokers assigned a smoking spot than ex-smokers. 7. Majority of ex-smokers approve of restriction at public spot strongly. 8. As for the attitude about caution on a cigarette case, more ex-smokers insisted than current smokers. 9. There was a relation between the degree of exposure about knowledge and the degree of knowledge. 10. Stepwise Multiple Regression portray that following factors influence stop smoking in order named. (1) attitude on the smoking restriction at public spot, (2) methods of quit attempt, (3) attitude about caution on cigarette case. Even so, it turned out that these factors alone can explain only 20% of self-examination. Therefore study for the other factors ought to be continued. I submit following suggestions ending this study. 1. Continuous study of the other factors affecting stop smoking must be carried on. 2. Since there was a relation the degree of exposure about knowledge and the degree of knowledge, efficient health education is required using campaign and mass media.

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Fuel cell system for SUAV using chemical hydride - II. Lightweight fuel cell propulsion system (화학수소화합물을 이용한 소형 무인항공기용 연료전지 시스템 연구 - II. 경량 연료전지 추진 시스템)

  • Hong, Ji-Seok;Park, Jin-Gu;Sung, Myeong-Hun;Jeon, Chang-Soo;Sung, Hong-Gye;Shin, Seock-Jae;Nam, Suk-Woo
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.41 no.3
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    • pp.233-239
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    • 2013
  • A 100 W fuel cell system using chemical storage method has been applied for a propulsion system of the SUAV(Small Unmanned Aerial Vehicle). A fuel cell and battery have been combined for both the small/light hydrogen generation control system and the hybrid power supply system. A small hydrogen generation device was implemented to utilize NaBH4 aqueous solution and dead-end type PEMFC system, which were evaluated on the ground and by the flight tests. The system pressurized at a 45kpa stably operates and get higher fuel efficiency. The pressure inside of the hydrogen generation control system was maintained at between 45 kPa and 55 kPa. The 100W fuel cell system satisfies the required weight and power consumption rate as well as the propulsion system, and the fuel cell system performance was demonstrated through flight test.

Effect of Whole Body Vibration Training in Drop Landing Jump (전신진동운동이 드랍랜딩점프 동작에 미치는 영향)

  • Hong, Su-Yeon;Jang, Young-Kwan;Kim, Jin-Hyun
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.19 no.3
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    • pp.423-429
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    • 2018
  • Objective: This study was conducted to investigate the effects of WBVE on biomechanical factor analysis of drop landing jumps before and after a four week training program. Methods: Participants were divided into two group: VEG (n=5, age: $25.7{\pm}2.3yrs$, height: $170{\pm}7.6cm$, weight: $69.3{\pm}8.3kg$) and OEG (n=5, age: $24.6{\pm}3.4yrs$, height: $164{\pm}4.9cm$, weight: $58.8{\pm}9.2kg$). Ten infrared cameras (Vicon, UK) with a sampling rate of 100 Hz were used in two GRF measurement systems (AMTI, USA). Results: The variability of the center of mass was largest at the falling phase, and there was a great risk of injury when landing after the jump. Second, the jumping heights of the VEG (vibration exercise group) were higher than those of the OEG (only exercise group), regardless of training period. Third, there were significant differences in the hip joint P1 (flexion) and knee joint P2 (extension) between the exercise groups after 4 weeks of training. However, there were no significant differences among training periods or phases. Conclusion: regardless of training periods, the VEG showed increased jump height compared with the OEG, but the consistency between the jump height and the lower joint power could not be determined.

An Analysis on the Effect of Policy Using Macro-economic Forecasting Model of Jeju (제주지역 거시경제 전망모형을 이용한 정책효과 분석)

  • Ko, Bong-Hyun
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.21 no.5
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    • pp.458-465
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    • 2020
  • The purpose of this study is to analyze the effect of policy in Jeju, using a macro-economic forecasting model of Jeju. First, the model's reality explanatory power improved by updating its statistics to 2017 and expanding new policy variables and modules. Also, the industrial structure of the model was further subdivided and extended to be considered simultaneously in the demand side of Keynesian theory. Second, it was determined that the predictive power for the model of this study was better than that of the existing model. However, with some endogenous variables, it was possible to identify implications that should be developed and considered when the model is improved with additional data in the future. Third, when the second airport construction was considered, it was observed that its effect was an increase of 1.25 times for GRDP, 1.2 times for employment, 1.48 times for private consumption, and 2.06 times for investment. Also, the economic growth rate was estimated to be 1.6% point higher than when the second airport was not constructed. Finally, the results of this study are expected to be used for policy decision making of the Jeju Government.

The characteristics of nuclear powered submarine and the use of enriched uranium (원자력 추진 잠수함의 특성과 농축우라늄 사용)

  • Jang, Jun-Seop
    • Strategy21
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    • s.41
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    • pp.261-293
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    • 2017
  • Nuclear power is a way of attaining an enormous amount of energy with relatively small amount of resources and after it has been introduced to the submarine since 1954, there are approximately 150 of nuclear powered submarine currently on a mission around the world. This is due to the maneuverability, mountability and covertness of nuclear submarines. However, there are other tasks, not only the high level of nuclear technology that are needed to be dealt with in order to construct nuclear powered submarine. The biggest task of all is to secure the enriched uranium. Accordingly, this research is about the way of enriching and securing the nuclear fuel that are used in the nuclear submarine with the characteristics, merits and demerits of the nuclear submarine. Due to the fact that the pressurized water reactor in South Korea is the reactor that was originally built for the development of nuclear powered submarine, many parts is designed to be suitable for the submarine propulsion. However, in order to apply this to submarine it is needed to consider additional requests such as the position of reactor, accident-coping system, radioactive covering, reactor output adjustment and ship's pitch and roll in order to apply this to submarine. Nuclear submarines have much higher speed based on the powerful propulsion in comparison with diesel-electric submarine and also have bigger loading area. Besides, there is no need to snorkel and they also have advantages in covertness with the multi-noise proof system. The nuclear technology in South Korea has seen the dramatic development since 1962 and in 1998 reached to the level that we have succeeded in the localization of nuclear plant and exported the world-class one-piece small-sized reactor (SMART) to UAE. To operate these reactors, we import the whole quantity of low-enriched uranium and having our own uranium enrich facility is not probable because of the budget and international regulations. With the ROK/US nuclear agreement revised on 2015 November, the enrichment of uranium that are available without special permission has changed up to 20%. According to the assumption that we use the 20% enrichment of Uranium on U.S. virginia class submarine, it is necessary to change the fuel after 11 years and it will cause additional cost of 1 billion dollars. But the replace period by the uranium's enrichment rate is not fixed so that it is possible to change according to the design of reactor. Therefore, I would like to make a suggestion on two types of design concepts of nuclear submarine that can be operated for 30 years without nuclear fuel change by using the 20% enriched uranium from ONNp.First of all, it is possible by increasing the size of reactor by 3 times and it results in the 1,000t increase of the weight. And secondly, it is by designing the one piece reactor to insert devices such as steam turbine, condenser into the inside of nuclear core like the Rubis class submarines of France.

A Study on the Emission Factor of NOx and CO by Burning of Synthetic Biogas (합성 Bio-Gas 연소시 발생되는 질소산화물과 일산화탄소 배출에 관한 연구)

  • An, Jae-Ho;Kim, Tae-Wan;Lee, Sang-Eun
    • Korean Journal of Environmental Agriculture
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    • v.26 no.1
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    • pp.1-6
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    • 2007
  • In view of energy supply, biogas can be seen as alternative fuel by substituting considerable amount of fossil fuel and may be utilized for heat and power production or for transport fuel production ($CH_4-enriched$ biogas). The aim of this research is to analyse the emission of $NO_x$ and CO from biogas fired combustion engine for electric power production. The result indicate a significant effect of biogas composition ($CH_4-CO_2$ ratio) and biogas flow rate on the air pollutants emission. The emission factors from this study were compared with those of U.S. EPA. Low $CH_4-CO_2$ ratio condition typically shows the lower $NO_x$ and CO emission than higher $CH_4-CO_2$ ratio condition. At normal $CH_4-CO_2$ ratio (7:3) emission factors of $NO_x$ and CO were 1.29 and 30.43 g/MMBtu, respectively. At low $CH_4-CO_2$, ratio (6:4) emission factors of $NO_x$ and CO were 0.646 and 60.86 g/MMBtu, respectively, It should be emphasized that the actual emission may vary considerably from these results due to operating conditions including torque load and engine speed.

Rheological Properties of Pear Juice Concentrates (배주스 농축액의 리올로지 특성)

  • Choi, Hee-Don;Kim, Kyung-Tack;Hong, Hee-Do;Lee, Boo-Yong;Kim, Sung-Su
    • Korean Journal of Food Science and Technology
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    • v.27 no.6
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    • pp.845-851
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    • 1995
  • To improve the utilization of pear in its processing, the cloudy and clear juice concentrates were prepared and their rheological properties were investigated in the range of temperatures($5{\sim}60^{\circ}C$) and concentrations($15{\sim}60^{\circ}Brix$). Pear juice concentrates showed flow behavior close to Newtonian fluids. Their flow behavior was also explained by applying Power law model and Herschel-Bulkley model. Flow behavior index did not have good correlation with concentration, but decreased with the increase of temperature, showing pseudoplastic properties. Consistency index increased with the increase of concentration and with the decrease of temperature. The effect of temperature and concentration on the apparent viscosity at 1500 1/s shear rate was examined by applying Arrhenius equation. The activation energy for flow of the cloudy and clear pear juice concentrates increased from $1.5140{\times}10^4\;to\;3.4141{\times}10^4\;J/kg{\cdot}mol$, and from $1.4762{\times}10^4\;to\;3.4963{\times}10^4\;J/kg{\cdot}mol$ with the increase of concentration, respectively. The influence of temperature on the apparent viscosity was more pronounced at higher concentration. And the concentration-dependent constant A decreased from $0.0789\;to\;0.0484^{\circ}Brix^{-1}$, and from $0.0786\;to\;0.0476^{\circ}Brix^1$ with the increase of temperature, respectively.

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The Optimization of Ozone Solubility and Half Life Time in Ultra Pure Water and Alkaline Solution on Semiconductor Wet Cleaning Process (반도체 습식 세정 공정 중 상온의 초순수와 염기성 수용액 내에서 오존의 용해도 최적화)

  • Lee Sang-Ho;Lee Seung-Ho;Kim Kyu-Chae;Kwon Tae-Young;Park Jin-Goo;Bae So-Ik;Lee Gun-Ho;Kim In-Jung
    • Journal of the Semiconductor & Display Technology
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    • v.4 no.4 s.13
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    • pp.19-26
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    • 2005
  • The process optimization of ozone concentration and half life time was investigated in ultra pure water and alkaline solutions for the wet cleaning of silicon wafer surface at room temperature. In the ultra pure water,. the maximum concentration (35 ppm) of ozone was measured at oxygen flow rate of 3 liters/min and ozone generator power over 60%. The half life time of ozone increased at lower power of ozone generator. Additive gases such as $N_2$ and $CO_2$ were added to increase the concentration and half life time of ozone. Although the maximum ozone concentration was higher with the addition of $N_2$ gas, a longer half life time was observed with the addition of $CO_2$. When $NH_4OH$ of 0.05 or 0.10 vol% was added in DI water, the pH of the solution was around 10. The addition of ozone resulted in the half life time less than 1 min. In order to maintain high pH and ozone concentration, ozone was continuously supplied in 0.05 vol% ammonia solutions. 3 ppm of ozone was dissolved in ammonia solutions. The static contact angle of silicon wafer surface became hydrophilic. The particle removal was possible alkaline ozone solutions. The organic contamination can be removed by ozonated ultra pure water and then alkaline solution containing ozone can remove the particles on silicon surface at room temperature.

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