Dry etching of polycarbonate using O2/SF6, O2/N2 and O2/CH4 plasmas |
Joo, Y.W.
(School of nano Engineering/Center for Nano Technology, Inje University)
Park, Y.H. (School of nano Engineering/Center for Nano Technology, Inje University) Noh, H.S. (School of nano Engineering/Center for Nano Technology, Inje University) Kim, J.K. (School of nano Engineering/Center for Nano Technology, Inje University) Lee, S.H. (School of nano Engineering/Center for Nano Technology, Inje University) Cho, G.S. (School of nano Engineering/Center for Nano Technology, Inje University) Song, H.J. (School of nano Engineering/Center for Nano Technology, Inje University) Jeon, M.H. (School of nano Engineering/Center for Nano Technology, Inje University) Lee, J.W. (School of nano Engineering/Center for Nano Technology, Inje University) |
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