• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.61-61
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• 2010

By using high resolution x-ray photoelectron spectroscopy, we show that inelastic scattering of photoelectron at low temperature (30K~50K) generates two kinds of oxygen species on Pt (111) surface. Intense synchrotron radiation source dissociates oxygen molecules into chemisorbed atomic oxygen and induces the formation of PtO on surface. Estimated coverage of dissociated atomic oxygen is 0.5 ML, suggesting possible formation of p($2{\times}1$) surface structure, while PtO coverage shows saturation coverage of 0.5 ML. Molecular oxygen dosed at 30 K undergoes thermally activated transition from physisorbed to chemisorbed state at around 40K.

• Proceedings of the Materials Research Society of Korea Conference
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• 2006.05a
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• pp.22.2-22.2
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• 2006

• Journal of the Korean Vacuum Society
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• v.21 no.6
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• pp.348-353
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• 2012

We investigated chemical states of a $Sb_2Te_3$ thin film with the polycrystalline phase by using high-resolution x-ray photoelectron spectroscopy with synchrotron radiation. The $Sb_2Te_3$ thin film was formed by sputtering. The rhombohedral phase was confirmed by x-ray diffraction. To remove the surface oxide, we performed $Ne^+$ ion sputtering for 1 hour with the beam energy of 1 kV and post-annealing at $100^{\circ}C$ for 5 min in ultra-high vacuum. We obtained the Te and Sb 4d core-levels spectra with the peaks at the binding energies of 40.4 and 33.0 eV, respectively. The full-width of half maximum of both the Te and Sb $4d_{5/2}$ core-levels is 0.9 eV. The Te and Sb core-levels only show a single chemical state, and we also confirmed the stoichiometry of approximately 2 : 3.

• Particle and aerosol research
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• v.9 no.4
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• pp.209-219
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• 2013

We have used the modified diffusion flame burner to synthesize silica coated iron oxide nanoparticles having enhanced superparamagnetic property. Silica-encapsulated iron oxide particles were directly observed using a high resolution transmission electron microscope. From the energy dispersive X-ray spectroscopy (EDS) and zeta potential measurements, the iron oxide particles were found to be completely covered by a silica coating layer. X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD) measurements revealed that the iron oxide core consists of ${\gamma}-Fe_2O_3$ rather than ${\alpha}-Fe_2O_3$. Our magnetization measurements support this conclusion. Biocompatibility test of the silica-coated iron oxide nanoparticles is also conducted using the protein adsorption onto the coated particle.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.270-270
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• 2010

4족 반도체 원소 양자점들은 원소가 가지고 있는 반도체적 성질과, 양자점에서 나타나는 quantum confinements 적인 특성 때문에 전자재료나 광학적 분야, 특히 태양전지 분야에서 그 쓰임이 대두되고 있다. 이러한 4족 반도체 원소의 양자점들을 만들기 위한 여러 방법들이 시도되고 있는데, 그 중에서 특히 절연체 박막에 4족 반도체 원소의 양자점들을 만드는 방법에는 이온주입, PVD, 그리고 CVD 를 통한 multi-layer 증착후 열처리 과정을 반드시 포함하는 Stranski- krastanov 방법이 주로 사용되고 있다. 본 실험에서는 고체원소 이온주입이라는 방법을 통해 절연체 박막의 증착과 이온주입이 한 진공용기 내에서 연속공정으로 이루어 지면서, 별도의 열처리 과정 없이 결정화된 게르마늄 양자점을 만들어 보았다. 이는 (X-ray diffraction) XRD와 Raman spectroscopy로 결정화된 게르마늄을 확인할 수 있었으며, (X-ray photoelectron spectroscopy)XPS 데이터로도 순수한 게르마늄이 표면에서 깊이 방향으로 약 $1,000\;{\AA}$ 만큼 게르마늄 양자점들이 만들어 짐을 알 수 있었다. 마지막으로 (High resolution transmittance electron microscopy) HRTEM으로 그 양자점의 크기와 분포도 그리고 결정성을 알아 보았다.

• Proceedings of the International Microelectronics And Packaging Society Conference
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• 2002.05a
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• pp.252-254
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• 2002

Metal oxides with high dielectric constants have the potential to expend scaling of transistor gate capacitance beyond that of ultrathin silicon dioxide. However, during deposition of most metal oxides on silicon, an interfacial region of SiOx is formed and limits the specific capacitance of the gate structure. We deposisted aluminum oxide and examined the composition of the interfacial layer by employing high-resolution X-ray photoelectron spectroscopy and X-ray reflectivity. We find that the interfacial region is not pure SiO$_2$, but is composed of a complex depth-dependent ternary oxide of $AlSi_xO_y$ and the pure SiO$_2$.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.173.2-173.2
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• 2014

Thin nitride thin films were synthesized by reactive radio-frequency magnetron sputtering in the ultra high vacuum (UHV) chamber. To control the characteristics of thin films, tin nitride thin films were obtained various argon and nitrogen gas mixtures, especially low nitrogen gas ratios. Tin nitride thin films were analyzed with alpha step, scanning electron microscopy (SEM), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), and 4 point probe measurement. The result of alpha step and SEM showed that the thickness of thin nitride thin films were decreased with increasing nitrogen gas ratios. The metallic tin structure was decreased and the amorphous tin nitride structure were observed by XRD with higher nitrogen gas ratios. The oxidation state of tin and nitride were studied with high resolution Sn 3d and N 1s XP spectra.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.360.2-360.2
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• 2016

CuSn thin films were fabricated by rf magnetron co-sputtering method on the Si(100) substrate for evaluation of the antibacterial effect. The co-sputtering process was performed with different rf powers and sputtering times to regulate the thickness of the films and relative atomic ratio of Cu to Sn. The physicochemical properties of the CuSn thin films were characterized by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), X-ray induced Auger electron spectroscopy (XAES), Optical microscope (OM), 4-point probe, and antibacterial test. An antibacterial test was conducted with Escherichia coli (E. coli) and Staphylococcus aureus (S. aureus) as changing contact times between CuSn fillms and bacteria suspension. We compared to the crystalline structures of films before sterilization and after sterilization by XRD measurement. The changes of oxidation states of Cu and Sn and the chemical environment of films before and after antibacterial test were investigated with high resolution XPS spectra in the regions of Cu 2p, Cu LMM, and Sn 3d. After antibacterial test, the morphology of the films was checked with an OM images. The electrical properties of the CuSn films such as surface resistance and conductivity were measured by using 4-point probe.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.272.2-272.2
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• 2016

Copper-Tin (CuSn) thin films were synthsized by rf magnetron co-sputtering method with pure Cu and Sn metal targets with various rf powers and sputtering times. The obtained CuSn thin films were characterized by a surface profiler (alpha step), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), X-ray induced Auger electron spectroscopy (XAES), and contact angle measurement. The deposition rates were calculated by the thickness of CuSn thin films and sputtering times. We observed hexagonal Cu20Sn6 and cubic Cu39Sn11 phases from the films by XRD measurement. From the survey XPS spectra, the Cu and Sn main peaks were observed. Therefore, we could conclude CuSn thin films were successfully fabricated on the substrate in this study. The changes of oxidation states and chemical environment of the films were investigated with high resolution XPS spectra in the regions of Cu 2p, Cu LMM, and Sn 3d. Surface free energy (SFE) and wettability of the CuSn thin films were studied with distilled water (DW) and ethylene glycol (EG) using the contact angle measurement. The total SFE of CuSn thin films decreased as rf power on Cu target increased. The contribution to the total SFE of dispersive SFE was relatively superior to polar SFE.

• Nuclear Engineering and Technology
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• v.52 no.10
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• pp.2299-2305
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• 2020

Zr alloy specimens were coated with Cr-Al alloy to enhance their resistance to oxidation. The coated samples were oxidized at 1200 ℃ in a steam environment for 300 s and showed extremely low oxidation when compared to uncoated Zr alloy specimens. The microstructure and elemental distribution of the oxides formed on the surface of Cr-Al alloys have been investigated by transmission electron microscopy (TEM) and X-ray photoelectron spectroscopy (XPS). A very thin protective layer of Cr₂O₃ formed on the outer surface of the Cr-Al alloy, and a thin Al₂O₃ layer was also observed in the Cr-Al alloy matrix, near the surface. Our results suggest that these two oxide layers near the surface confers excellent oxidation resistance to the Cr-Al alloy. Even after exposure to a high temperature of 1200 ℃, inter-diffusion between the Cr-Al alloy and the Zr alloy occurred in very few regions near the interface. Analysis of the inter-diffusion layer by high-resolution transmission electron microscopy (HRTEM) and energy dispersive X-ray spectroscopy (EDS) measurement confirmed its identity as Cr₂Zr.