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http://dx.doi.org/10.5757/JKVS.2012.21.6.348

High-Resolution X-Ray Photoelectron Spectroscopy Study of a Sb2Te3 Thin Film with the Polycrystalline Phase  

Lee, Y.M. (Department of Materials Engineering, Chungnam University, Brain Korea 21 Project (BK21))
Kim, K. (AE Group, Samsung Advanced Institute of Technology, Samsung Electornics Co. Ltd.)
Shin, H.J. (Beamline Division, Pohang Accelerator Laboratory, POSTECH)
Jung, M.C. (Energy Materials and Surface Sciences Unit, Okinawa Institute of Science and Technology Graduate University)
Qi, Y. (Energy Materials and Surface Sciences Unit, Okinawa Institute of Science and Technology Graduate University)
Publication Information
Journal of the Korean Vacuum Society / v.21, no.6, 2012 , pp. 348-353 More about this Journal
Abstract
We investigated chemical states of a $Sb_2Te_3$ thin film with the polycrystalline phase by using high-resolution x-ray photoelectron spectroscopy with synchrotron radiation. The $Sb_2Te_3$ thin film was formed by sputtering. The rhombohedral phase was confirmed by x-ray diffraction. To remove the surface oxide, we performed $Ne^+$ ion sputtering for 1 hour with the beam energy of 1 kV and post-annealing at $100^{\circ}C$ for 5 min in ultra-high vacuum. We obtained the Te and Sb 4d core-levels spectra with the peaks at the binding energies of 40.4 and 33.0 eV, respectively. The full-width of half maximum of both the Te and Sb $4d_{5/2}$ core-levels is 0.9 eV. The Te and Sb core-levels only show a single chemical state, and we also confirmed the stoichiometry of approximately 2 : 3.
Keywords
$Sb_2Te_3$; Chemical state; High-resolution x-ray photoelectron spectroscopy;
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