• Journal of the Korean Society of Manufacturing Process Engineers
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• v.13 no.6
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• pp.15-22
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• 2014

With a conventional positioning apparatus, it is very difficult simultaneously to achieve desired driving ranges and precision levels at the sub-micrometer level. Generally, a lead screw and friction drive have been used as servo control systems. These have large driving ranges, and high-speed positioning is feasible. In this study, we present a global servo system controlled by a laser interferometer acting as a displacement measurement sensor for achieving positioning accuracy at the sub-micrometer level.

• Proceedings of the KSME Conference
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• 2003.04a
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• pp.1309-1314
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• 2003

The high precision positioning mechanism is used in various industrial fields. It is used in semiconductor manufacturing line, test instrument, Bioengineering, and MEMS and so on. This paper presents a positioning mechanism with dual servo system. Dual servo system consists of a coarse stage and a fine motion stage. The course stage is driven by VCM and the actuator of fine stage is the PZT. The purposes of dual servo system are stability, higher bandwidth, and robustness. Lead compensator is applied to this control system, and is designed by PQ method. Designed compensator can improve property of positioning mechanism.

• Journal of Positioning, Navigation, and Timing
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• v.12 no.3
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• pp.281-288
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• 2023

The International Maritime Organization (IMO) states that the recommended horizontal accuracy for coastal and offshore areas is 10 m, the Alert Limit (AL) is 25 m, the time to alert is 10 seconds, and the integrity risk (IR) is 10^-5 per three hours. For operations requiring high accuracy, such as tugs and pushers, icebreakers, and automated docking, the IMO dictates that a high level of positioning accuracy of less than one meter and a protection level of 0.25 meters (for automated docking) to 2.5 meters should be achieved. In this paper, we analyze a method of calculating the user-side protection level of the centimeter-level precision Global Navigation Satellite System (GNSS) that is being studied to provide augmentation information for the precision Positioning, Navigation and Timing (PNT) service. In addition, we analyze standardized integrity forms based on RTCM SC-134 to propose an integrity information form and generate a centimeter-level precise PNT service plan.

• International Journal of Precision Engineering and Manufacturing
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• v.8 no.2
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• pp.49-53
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• 2007

In this study, we investigated experimentally the potential of a planer positioning mechanism with three degrees of freedom using a flexure guide and an electromagnetic linear motor. The goal was to produce a multi-axis positioning system with nanometric resolution over a 1-mm stroke. An $X-Y-\theta$ stage was designed based on previous results from a single-axis prototype and was constructed with a flexure guide mechanism and voice coil motor type linear actuators. We examined the necessity of a driving method and control system to ensure high resolution for multi-axis positioning. Experiments were conducted to evaluate the performance, and the results confirmed the mechanism's potential; fine point-to-point (PTP) positioning was achieved over a 1-mm stroke, with a resolution of 2 nm for translation in X-Y and 0.01 asec for yaw in $\theta$.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1991.11a
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• pp.101-104
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• 1991

Bal1 screw systems has been used for positioning elements of machine tools. In order to maintain high rigidity and accuracy, preload is applied between nut and screw. However, large amount of preload increases frictional heat. Temperature rises remarkably at high speed notion, Thermal expansion degrades positioning accuracy, In this paper, finite differance method is applied to compute temperature distributions and thermal expansions of ball screw systems according to preload condition and rotational steed. Some simulation results show that the developed methodology is good to study thermal expansion of ball screw systems.

• Journal of Positioning, Navigation, and Timing
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• v.11 no.4
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• pp.351-360
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• 2022

Autonomous vehicles require precise knowledge of their position, velocity and orientation in all weather and traffic conditions in any time. And, these information is effectively used for path planning, perception, and control that are key factors for safety of vehicle driving. For this purpose, a high precision GNSS technology is widely adopted in autonomous vehicles as a core localization and navigation method. However, due to the lack of infrastructure as well as cost issue regarding GNSS correction data communication, only a few high precision GNSS technology will be available for future commercial autonomous vehicles. Recently, a high precision GNSS sensor that is based on a Broadcast-RTK system to dramatically reduce network maintenance cost by utilizing the existing broadcasting network is released. In this paper, we present the performance test result of the broadcast-RTK-based commercial high precision GNSS receiver to test the feasibility of the system for autonomous driving in Korea. Massive measurement campaigns covering of Korea region were performed, and the obtained measurements were analyzed in terms of ambiguity fixing rate, integer ambiguity loss recovery, time to retry ambiguity fixing, average correction information update rate as well as accuracy in comparison to other high precision systems.

• 제어로봇시스템학회:학술대회논문집
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• 2003.10a
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• pp.2524-2528
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• 2003

High-precision position system is widely used in lots of fields such as semiconductor industry, biotechnology, display and other up-to-date industry field. One of the main issues is to have a long traveling range with precision. There are a few solutions. For instance, there are inchworm methods, lever principle. In this study, we use lever principle to amplify output displacement with a new mechanical amplification structure. We designed new type 3DOF stage with PZT actuator and capacitive sensor. Non-monolithic structure is suggested to obtain the convenience of assembly and modification. Driving parts are designed as modules that generate displacement amplification of each axis. Designed motion module consists of 3 flexure hinges and a PZT actuator with double L lever structure.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.424-427
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• 2002

Pneumatic control systems have the potential to provide high output power to weight and size ratios at a relatively low cost. However, they are mainly employed in open-loop control applications where positioning repeatability is not of great importance. This paper presents precision positioning control of pneumatic servo cylinder with on-off valve, Pneumatic low-friction cylinder with servo valve and DC servo motor under parameter variations. Basically positioning control uses PID controller, where needs a linearized model. A neural network is added to a PID controller to compensator nonlinearity of the system and an influence of friction force is consider as disturbance. The performances of the proposed algorithms were compared by experiments with them of PID controller. From those experiments is was shown that the proposed algorithms are more efficient about settling time, steady 7tate error and overshoot than PID control algorithm.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2005.05a
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• pp.125-128
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• 2005

The equipments in semi-conductor, display and measurement fields require high precision and resolution positioning technology. High positioning control can be carried out by using linear motors with little vibration, backlash and friction. In this paper, the acceleration patterns of the moving Part are analyzed to obtain the optimum pattern which leads to the less vibration reduction of equipment. In addition, the effect of friction force in guide rail on position control accuracy is investigated to identify possibility of using current bearing system for nano-positioning control.