• Clean Technology
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• v.17 no.4
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• pp.300-305
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• 2011

A mixture of supercritical carbon dioxide and a co-solvent was employed to strip a high-dose ion-implanted photoresist (HDIPR) from the surface of semiconductor wafers. The stripping efficiency was highly improved by the physical force generated from a ultrasonication tip inside the reactor. In addition, helium gas was injected in the reactor as a barrier gas before the introduction of pure supercritical $CO_2$ ($scCO_2$), which reduced the rinsing time significantly. The effect of co-solvents on the stripping efficiency was investigated. The wafer surfaces were analyzed by scanning electron microscopy and by an energy dispersive X-ray spectrometer.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.19 no.5
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• pp.228-236
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• 2009

In this study, we investigated morphological characteristics of $SF_6$ clathrate hydrate crystals to understand its formation and growth mechanism. $SF_6$ clathrate hydrate crystals were formed in high-pressure reaction cell charged with pure water and $SF_6$ gas at constant pressure and temperature. Two-phase ($SF_6$ gas/aqueous solution) and three-phase ($SF_6$ gas/aqueous solution/$SF_6$ liquid) conditions were investigated, In both conditions, dendritic shape hydrate crystals were grown as like fibriform crystals along upward growth direction at the gas/aqueous solution interface. In the case of the reaction process of three-phase condition, when the $SF_6$ gas bubbles which were generated in $SF_6$ liquid phase due to the reduction of reaction cell pressure stuck to the gas/aqueous interfaces, the hydrate phase were appeared at the surface of the bubbles. This paper presents the detail growth characteristics of $SF_6$ hydrate crystals including crystal nucleation, migration, growth and interference.

• Journal of the Semiconductor & Display Technology
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• v.4 no.4 s.13
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• pp.19-26
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• 2005

The process optimization of ozone concentration and half life time was investigated in ultra pure water and alkaline solutions for the wet cleaning of silicon wafer surface at room temperature. In the ultra pure water,. the maximum concentration (35 ppm) of ozone was measured at oxygen flow rate of 3 liters/min and ozone generator power over 60%. The half life time of ozone increased at lower power of ozone generator. Additive gases such as $N_2$ and $CO_2$ were added to increase the concentration and half life time of ozone. Although the maximum ozone concentration was higher with the addition of $N_2$ gas, a longer half life time was observed with the addition of $CO_2$. When $NH_4OH$ of 0.05 or 0.10 vol% was added in DI water, the pH of the solution was around 10. The addition of ozone resulted in the half life time less than 1 min. In order to maintain high pH and ozone concentration, ozone was continuously supplied in 0.05 vol% ammonia solutions. 3 ppm of ozone was dissolved in ammonia solutions. The static contact angle of silicon wafer surface became hydrophilic. The particle removal was possible alkaline ozone solutions. The organic contamination can be removed by ozonated ultra pure water and then alkaline solution containing ozone can remove the particles on silicon surface at room temperature.

• Journal of Conservation Science
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• v.37 no.5
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• pp.525-535
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• 2021

This study identified material properties through scientific analysis on Jikgeumdan(satin with gold threads) from Donggungbi-Wonsam and the gold threads used in the embroidery. The Donggungbi-Wonsam's base of gold threads were estimated to have used mulberry fiber's Korean paper(Hanji) because non-wood-based fibers were observed. The X-ray spectrometer showed that the Tongsuseulan of Donggungbi-Wonsam was a flat gold thread of pure gold and Jikgeumdan of flat silver thread of its Saekdong and Hansam. High sulfur levels were detected in the flat silver thread, which appeared to have formed silver sulfide by either manufacturing process using sulfur or conservation environment. he dragon insignia's embroidery is also described as two types twisted gold threads; pure gold and alloying-gold and silver. while dragon insignia's border line is decorated with a twisted gold thread of pure gold. In particular, it was investigated that adhesives such as an animal glue, a protein-based compound by gas chromatography mass spectrometry. Additionally, XRF and Raman spectroscopy analysis on the mixture substances between the metal surface and the base paper of gold threads identified talc and quartz in the gold threads and Seokganju(hematite) in the flat silver threads.

• Journal of Hydrogen and New Energy
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• v.22 no.2
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• pp.152-160
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• 2011

The electromagnetic characteristics of FCEVs (fuel cell electric vehicles) are much different from the existing combustion engine cars as well as hybrid, plug-in-hybrid, and pure electric vehicles due to the high voltage/current generated by a fuel cell stack which uses a compressed hydrogen gas reacted with oxygen. To operate fuel cell stack efficiently, BOP (Balance of Plant) which is consisted of many motors in water pump, air blower, and hydrogen recycling pump as well as inverters for these motors is essential. Furthermore, there are also electric systems for entertainment, information, and vehicle control such as navigation, broadcasting, vehicle dynamic control systems, and so on. Since these systems are connected by high voltage or general cables, EMC (Electromagnetic compatibility) analysis for high voltage and general cable of FCEV is the most important element to prevent the possible electric functional safety errors. In this paper, electromagnetic fields by high voltage and general cables for FCEVs is studied. From numerical analysis results, total time harmonic electromagnetic field strength from high voltage and general cables have difference of 13~16 dB due to ground effect by impedance matching. The EMI results of FECV at 10 m distance shows difference of 41 dB at 30 MHz and 54 dB at 230 MHz compared with only general cable routing.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.442-443
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• 2006

Electrical, optical, surface, and structural properties of amorphous indium zinc oxide (IZO) films grown on $SiO_2$/PES/$SiO_2$ substrate by a RF sputtering in pure Ar ambient at room temperature were investigated. A sheet resistance of $13.5\;{\Omega}{\square}$, average transmittance above 85 % in 550 nm, and root mean square roughness of $10.5\;{\AA}$ were obtained even in the IZO layers grown at room temperature in pure Ar ambient. Without addition of oxygen gas during IZO sputtering process, we can obtain high quality IZO anode films from the specially synthesized oxygen rich IZO target. XRD result shows that the IZO films grown at room temperature is completely amorphous structure due to low substrate temperature. In addition, the electrical and optical properties of the flexible OLED fabricated on IZO/$SiO_2$/PES/$SiO_2$ is critically influenced by the electrical properties of a IZO anode. This findings indicate that the IZO/$SiO_2$/PES/$SiO_2$ is a promising anode/substrate scheme for realizing organic based flexible displays.

• Fire Science and Engineering
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• v.18 no.2
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• pp.12-19
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• 2004

The commercially available IG-541 extinguished agent composed of inert gases was developed for environmental protection. The extinguished agents were considered in terms of physical properties, efficient characteristic, environment, stability, and economical efficiency. The pure and mixture components of physical properties of $N_2$, Ar and $CO_2$ were chosen and compared. The physical properties of density, viscosity and surface tension of inert gases were plotted with the molar ratios of $N_2$/$CO_2$ and Ar/$CO_2$ in terms of a temperature. The extinguished agent in the composition of $N_2$, Ar and $CO_2$, 50/40/10 (mol %) showed relatively high density, low viscosity and moderate surface tension, therefore it was suitable for the alternative extinguished agents.

• Membrane Journal
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• v.24 no.5
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• pp.409-415
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• 2014

This study is aimed to separate propylene and propane using membrane process instead of NCC(Naphtha Cracking Center) $C_3$ splitter. Membrane process is a low energy consumption and eco-friendly process while $C_3$ splitter requires high energy consumption in petrochemical processes. In this study, high performance facilitated transport membrane (FTM) is used for propylene/propane separation. FTM module was prepared on top of porous polyetherimide hollow fiber using PVP/$AgBF_4$/TCNQ. We developed simulation program predicting the membrane separation properties under operation conditions. Separation properties of FTM module for propylene and propane were obtained from the simulation program based on the pure gas permeation data. Based on these results, it is predicted that an one-stage membrane process provides 99.5% of propylene at permeate side from a binary gas mixture of 95/5 vol% $C_3H_6$ / vol% $C_3H_8$ supplied as a feed gas.

• Membrane Journal
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• v.13 no.4
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• pp.246-256
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• 2003

For the olefin recovery from polyolefin off-gas, the permeation behaviors of olefins and nitrogen were investigated through three kinds of PDMS membranes - cross-linked PDMS membranes, a polysiloxaneimide membrane, and oligo-PDMS modified PDMS membranes. Their pure gas permeabilities were measured as a function of operation temperature(-20 to $50^{\circ}C$) and pressure(1 to 25 atm) with ethylene($C_2\;H_4$), propylene($C_3\;H_6$), butylene($C_4\;H_8$), and nitrogen($N_2$) gases. The permeabilities of olefins and nitrogen highly depended upon the nature of PDMS membranes. Among these membranes, cross-linked PDMS membranes showed stable and high olefin/nitrogen selectivities over a wide operation pressure range and further study in various test conditions. Their permeability of olefin and nitrogen were governed by the condensation temperature(solubility selectivity) and plasticization, not the order of the size(diffusivity selectivity) of gases, which matched well with the general permeation behavior of rubbery polymeric membranes for condensable and non-condensable gases. With increasing feed pressure or decreasing feed temperature, the permeabilities of more condensible olefins increase highly, presumably due to high solubility and plasticization, but that of non-condensible nitrogen decreases slightly and thus, the selectivities of olefin/nitrogen increase highly.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.20 no.4
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• pp.497-502
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• 2019

Metal oxide nanostructures are promising materials for advanced applications, such as high sensitive gas sensors, and high capacitance lithium-ion batteries. In this study, tin oxide (SnO) nanostructures were grown on a Si wafer substrate using a two-zone horizontal furnace system for a various substrate temperatures. The raw material of tin dioxide ($SnO_2$) powder was vaporized at $1070^{\circ}C$ in an alumina crucible. High purity Ar gas, as a carrier gas, was flown with a flow rate of 1000 standard cubic centimeters per minute. The SnO nanostructures were grown on a Si substrate at $350{\sim}450^{\circ}C$ under 545 Pa for 30 minutes. The surface morphology of the as-grown SnO nanostructures on Si substrate was characterized by field-emission scanning electron microscopy (FE-SEM) and atomic force microscopy (AFM). Raman spectroscopy was used to confirm the phase of the as-grown SnO nanostructures. As the results, the as-grown tin oxide nanostructures exhibited a pure tin monoxide phase. As the substrate temperature was increased from $350^{\circ}C$ to $424^{\circ}C$, the thickness and grain size of the SnO nanostructures were increased. The SnO nanostructures grown at $450^{\circ}C$ exhibited complex polycrystalline structures, whereas the SnO nanostructures grown at $350^{\circ}C$ to $424^{\circ}C$ exhibited simple grain structures parallel to the substrate.