• 한국정밀공학회지
• /
• 제25권7호
• /
• pp.39-46
• /
• 2008

High precision machining technology has become one of the important parts in the development of a precision machine. Such a machine requires high speed on a large workspace as well as high precision positioning. For machining systems having a long stroke with ultra precision, a dual-stage system including a global stage (coarse stage) and a micro stage (fine stage) is designed in this paper. Though linear motors have a long stroke and high precision feed drivers, they have some limitations for submicron positioning. Piezo-actuators with high precision also have severe disadvantage for the travel range, and the stroke is limited to a few microns. In the milling experiments, the positional accuracy has been readily achieved within 0.2 micron over the typical 20 mm stroke, and the path error over 2 micron was reduced within 0.2 micron. Therefore, this technique can be applied to develop high precision positioning and machining in the micro manufacturing and machining system.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2001년도 춘계학술대회 논문집
• /
• pp.221-225
• /
• 2001

Recently, high accuracy and high precision are required in various industrial fields that are composed of semiconductor manufacturing apparatus and ultra precision positioning apparatus and information system and so on. The positioning technology is a very important one among them. This technology has been rapidly developed, its field needs for positioning accuracy to high as submicron. It is expected that accuracy with 10 nm in precision working and accuracy with 1 nm in ultra precision working are reached at the beginning of 2000s. Recently, to accomplish this positioning technology, many researches are concerned about it and make efforts it. This paper contain design technology of ultra precision 2-axis(X-Y Delta) stage for materialize to positioning accuracy with submicron, where, Delta stage is design as optimum against load and disturbance. And computer simulation is performed for stability and dynamic characteristic of Delta stage.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 1997년도 추계학술대회 논문집
• /
• pp.311-314
• /
• 1997

According to the development of industrial equipment such as semiconductor manufacturing machines, optical device, and precision machine tool, a high-precision translation system with wide range has been required. This paper describes a high-precision 2-axis translation system, which consists of microstage and global stage. In order to achieve the highresolution in the long range, some engineering techniques are used. Three linear guides with flexible coupling are adopted to reduce the motor vibration in the global stage. A simple elastic hinge structure activated by five PZT is applied to reduce the angular dev~atlon. As the result of combination of microstage and global stage associated with some engineering techniques, the 2-axis translation system can measure the 200 X 200 mrn range with the nanometer accuracy.

• 한국정밀공학회지
• /
• 제30권1호
• /
• pp.105-112
• /
• 2013

This paper presents the structural design and finite element analysis of precision stage based on a double triangular parallel mechanism for precision positioning and large force generation. Recently, with the acceleration of miniaturization in mobile appliances, the demand for precision aligning and bonding has been increasing. Such processes require both high precision and large force generation, which are difficult to obtain simultaneously. This study aimed at constructing a precision stage that has high precision, long stroke, and large force generation. Actuators were tactically placed and flexure hinges were carefully designed by optimization process to constitute a parallel mechanism with a double triangular configuration. The three actuators in the inner triangle function as an in-plane positioner, whereas the three actuators in the outer triangle as an out-of-plane positioner. Finite element analysis is performed to validate load carrying performances of the developed precision stage.

• 한국정밀공학회지
• /
• 제22권5호
• /
• pp.103-112
• /
• 2005

This paper presents one-axis high precision scanning system and illustrates the design of modified $X-Y-{\theta}$ stage as a tracker using VCM and commercialized air bearings for it. The scanning system for 100nm resolution is composed of the 3-axis stage and one axis long stroke linear motor stage as a follower. In this study a previous proposed and presented structure of VCM for the fine stage is modified. The tracker has 3 DOF($X-Y-{\theta}$ motions by four VCM actuators which are located on the same plane. So 4 actuating forces are suggested and designed to create least pitch and roll motions. This article will show about the design especially about optimal design. The design focus of this fine stage is to have high acceleration to accomplish high throughput. The optimal design of maximizing acceleration is performed in restrained size. The most sensitive constraint of this optimal design is heat dissipation of coil. There are 5 design variables. Because the relationship between design variables and system parameters are quite complicated, it is very difficult to set design variables manually. Due to it, computer based optimal design procedure using MATLAB is used. Then, this paper also describes the procedures of selecting design variables for the optimal design and a mathematical formulation of the optimization problem. Based on the solution of the optimization problem, the final design of the stage is also presented. The results can be verified by MAXWELL. The designed stage has the acceleration of about 5 $m/s^{2}$ with 40kg total mass including wafer chuck and interferometer mirror. And the temperature of coil is increased $50^{\circ}C$. In addition, the tracker is controlled by high precision controller system with HP interferometer for it and linear scaler for the follower. At that time, the scanning system has high precision resolution about 5nm and scanning resolution about 40nm in 25mm/s constant speed

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2013년도 춘계학술대회 논문집
• /
• pp.741-742
• /
• 2013

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2010년도 춘계학술대회 논문집
• /
• pp.413-414
• /
• 2010

• 한국정밀공학회지
• /
• 제23권2호
• /
• pp.43-50
• /
• 2006

Recently, with rapid development of semiconductor and flat panel display, the manufacturing equipments are required to have large travel range, high productivity, and high accuracy. In this paper, an ultra precision decoupled dual servo (DDS) system is proposed to meet these requirements. And a control scheme for the DDS is studied. The proposed DDS consists of a $XY{\Theta}$ fine stage for handling work-pieces precisely and a XY coarse stage for large travel range. The fine stage consists of four voice coil motors (VCM) and air bearing guides. The coarse stage consists of linear motors and air bearing guides. The DDS is mechanically decoupled between coarse stage and fine stage. Therefore, both stages must be controlled independently and the performance of the DDS is mainly determined by the fine stage. For high performance tracking, the controller of fine stage consists of time delay control (TDC) and perturbation observer while the controller of coarse stage is TDC alone. With these individual controllers, two kinds of dual-servo control strategies are suggested: master-slave type and parallel type. By simulations and experiments, the performances of two dual-servo control strategies are compared.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2008년도 추계학술대회 논문집
• /
• pp.355-356
• /
• 2008

• International Journal of Control, Automation, and Systems
• /
• 제4권1호
• /
• pp.1-9
• /
• 2006

This paper presents the modeling and multivariable feedback control of a novel high-precision multi-dimensional positioning stage. This integrated 6-degree-of-freedom. (DOF) motion stage is levitated by three aerostatic bearings and actuated by 3 three-phase synchronous permanent-magnet planar motors (SPMPMs). It can generate all 6-DOF motions with only a single moving part. With the DQ decomposition theory, this positioning stage is modeled as a multi-input multi-output (MIMO) electromechanical system with six inputs (currents) and six outputs (displacements). To achieve high-precision positioning capability, discrete-time integrator-augmented linear-quadratic-regulator (LQR) and reduced-order linearquadratic-Gaussian (LQG) control methodologies are applied. Digital multivariable controllers are designed and implemented on the positioning system, and experimental results are also presented in this paper to demonstrate the stage's dynamic performance.