Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Design of a 6-DOF Stage for Precision Positioning and Large Force Generation

정밀 위치 결정 및 고하중 부담 능력을 지닌 6-자유도 스테이지의 설계

  • Shin, Hyun-Pyo (Manufacturing Engineering R&D Institute, Samsung Electro-Mechanics)
  • 신현표 (삼성전기 생산기술연구소)
  • Received : 2012.08.27
  • Accepted : 2012.10.09
  • Published : 2013.01.01
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Abstract

This paper presents the structural design and finite element analysis of precision stage based on a double triangular parallel mechanism for precision positioning and large force generation. Recently, with the acceleration of miniaturization in mobile appliances, the demand for precision aligning and bonding has been increasing. Such processes require both high precision and large force generation, which are difficult to obtain simultaneously. This study aimed at constructing a precision stage that has high precision, long stroke, and large force generation. Actuators were tactically placed and flexure hinges were carefully designed by optimization process to constitute a parallel mechanism with a double triangular configuration. The three actuators in the inner triangle function as an in-plane positioner, whereas the three actuators in the outer triangle as an out-of-plane positioner. Finite element analysis is performed to validate load carrying performances of the developed precision stage.

Keywords

References

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  1. Optimal Design for Parallelogram Type Flexure Hinge vol.32, pp.1, 2015, https://doi.org/10.7736/KSPE.2015.32.1.107
  2. Kinematic Analysis of a 6-DOF Ultra-Precision Positioning Stage Based on Flexure Hinge vol.33, pp.7, 2016, https://doi.org/10.7736/KSPE.2016.33.7.579