• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.05a
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• pp.755-761
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• 2003

Recently, the development of mobile devices demands information storage systems to use micro drive devices and cheap media. These should have several characteristics, for example, the subminiature of size, the robustness of shock, the minimum of cost and power consumption, and the removability of multiple applications. A conventional optical disk drive is more suitable for these specifications than the others. The optical storage system of the new generation to use a blue laser and a high numerical aperture (NA) is the perfect candidate for micro optical disk drives. In this paper, the micro actuator that can be applied to a micro optical disk drive is designed by response surface methodology to use a structural analysis and an electro-magnetic analysis. Based on above results, the coarse actuator and fine actuator are designed and improved from the point of view of the size and the power. Consequently, the designs of a micro actuator are proposed through these courses.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.3 s.180
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• pp.156-162
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• 2006

Direct fabrication of nano patterns has been studied employing a nano-stereolithography (NSL) process. The needs of nano patterning techniques have been intensively increased for diverse applications for nano/micro-devices; micro-fluidic channels, micro-molds. and other novel micro-objects. For fabrication of high-aspect-ratio (HAR) patterns, a thick spin coating of SU-8 process is generally used in the conventional photolithography, however, additional processes such as pre- and post-baking processes and expansive precise photomasks are inevitably required. In this work, direct fabrication of HAR patterns with a high spatial resolution is tried employing two-photon polymerization in the NSL process. The precision and aspect ratio of patterns can be controlled using process parameters of laser power, exposure time, and numerical aperture of objective lens. It is also feasible to control the aspect ratio of patterns by truncation amounts of patterns, and a layer-by-layer piling up technique is attempted to achieve HAR patterns. Through the fabrication of several patterns using the NSL process, the possibility of effective patterning technique fer various N/MEMS applications has been demonstrated.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.5 s.182
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• pp.190-196
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• 2006

Transparent materials are widely used in the fields of optic parts and bio industry. We have experiment to find out the characteristics of the micromachining inside transparent materials using femtosecond laser pulses. With its non-linear effects by very high peak intensity, filament (plasma channel) was formed by the cause of the self-focusing and the self-defocusing. Physical damage could be found when the intensity is high enough to give rise to the thermal stress or evaporation. At the vicinity of the power which makes the visible damage or modification, the structural modification occurs with the slow scanning speed. According to the polarization direction to the scanning direction, the filament quality is quite different. There is a good quality when the polarization direction is parallel to the scanning direction. For fine filament, we could suggest the conditions of the high numerical aperture lens, the short shift of focusing point, the low scanning speed and the low power below 20 mW. As the examples of optics parts, we fabricated the fresnel zone plate with the $225{\mu}m$ diameter and Y-bend optical wave guide with the $5{\mu}m$ width.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.1
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• pp.122-129
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• 2008

Two-photon stereolithography is recognized as a promising process for the fabrication of three-dimensional (3D) microstructures with 100 nm resolution. Generally, beam-scanning system has been used in the conventional process of two-photon stereolithography, which is limited to the fabrication of micro-prototypes in small area of several tens micrometers. For the applications to 3D high-functional micro-devices, the fabrication area of the process is required to be enlarged. In this paper, large-area two-photon stereolithography (L-TPS) employing stage scanning system has been developed. Continuous scanning method is suggested to improve the fabrication speed and parameter study is conducted. An objective lens of high numerical aperture (N.A.) and high strength material were employed in this system. Through this work, 3D microstructures of $600*600*100\;{\mu}m$ were fabricated.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1997.11a
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• pp.473-476
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• 1997

Focused Ar ion laser beam can be utilized to fabricate microstructures on silicon substrate as well as other materials(e.g. such as ceramic). The laser using in this study is an argon ion laser with maximum power of 6 W, wavelength of 514 nm. This laser beam is focused by objectives with a high numerical aperture, a long working distance. We have achieved line width about 1 ${\mu}{\textrm}{m}$ with high scan speed. The resolution for Si machining is determined by the selectivity of the chemical reaction rather than the laser spot size. In this study, we have obtained the maximum etch rate of 434.7 ${\mu}{\textrm}{m}$/sec with high aspect ratio. The characteristics of etched groove was investigated by scanning electron microscope(SEM) and auger electron spectroscopy(AES). It is assumed that the technique using arson ion laser is applicab1e to fabricate microstructures.

• Tunnel and Underground Space
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• v.29 no.3
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• pp.197-213
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• 2019

We simulated the fault reactivation experiment conducted at 'Main Fault' intersecting the low permeability clay formations of Mont Terri Underground Research Laboratory in Switzerland using TOUGH-FLAC simulator. The fluid flow along a fault was modelled with solid elements and governed by Darcy's law with the cubic law in TOUGH2, whereas the mechanical behavior of a single fault was represented by creating interface elements between two separating rock blocks in FLAC3D. We formulate the hydro-mechanical coupling relation of hydraulic aperture to consider the elastic fracture opening and failure-induced dilation for reproducing the abrupt changes in injection flow rate and monitoring pressure at fracture opening pressure. A parametric study was conducted to examine the effects of in-situ stress condition and fault deformation and strength parameters and to find the optimal parameter set to reproduce the field observations. In the best matching simulation, the fracture opening pressure and variations of injection flow rate and monitoring pressure showed good agreement with field experiment results, which suggests the capability of the numerical model to reasonably capture the fracture opening and propagation process. The model overestimated the fault displacement in shear direction and the range of reactivated zone, which was attributed to the progressive shear failures along the fault at high injection pressure. In the field experiment results, however, fracture tensile opening seems the dominant mechanism affecting the hydraulic aperture increase.

• Journal of the Korean earth science society
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• v.39 no.4
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• pp.305-316
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• 2018

Satellite-derived sea surface winds (SSWs) and atmospheric motion vectors (AMVs) over the global ocean, particularly including the areas in and around tropical cyclones (TCs), have been provided in a real-time and continuous manner. More and better information is now derived from technologically improved multiple satellite missions and wind retrieving techniques. The status and prospects of key SSW products retrieved from scatterometers, passive microwave radiometers, synthetic aperture radar, and altimeters as well as AMVs derived by tracking features from multiple geostationary satellites are reviewed here. The quality and error characteristics, limitations, and challenges of satellite wind observations described in the literature, which need to be carefully considered to apply the observations for both operational and scientific uses, i.e., assimilation in numerical weather forecasting, are also described. Additionally, on-going efforts toward merging them, particularly for monitoring three-dimensional TC wind fields in a real-time and continuous manner and for providing global profiles of high-quality wind observations with the new mission are introduced. Future research is recommended to develop plans for providing more and better SSW and AMV products in a real-time and continuous manner from existing and new missions.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.21 no.5
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• pp.773-777
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• 2012

Recently UV laser micromachining processes is widely introduced to meet the needs of advanced components of IT, BT and ET industries. Due to the characteristics of non-contact and high-speed laser processing, UV laser micromachining is applied to manufacture very thin substrate such as polymer, metals and composite. These minimum line width obtained by UV laser micromachining is generally determined from laser wavelength, optical lens and its numerical aperture. In this paper we will show the lens effect of water droplet on the surface of workpiece to reduce the line width when UV laser light is irradiated and focused through the water droplet. Because of the refraction effect generated by the semi-spherical or spherical shape of water droplet, we can find smaller line width. And water droplet could not only protect thermal deformation, but also carry away burr around micro dent. Firstly fundamental theory of minimum line width was derived from relationship between the geometry of water droplet and laser light trace, and then experimental and simulation results will be finally compared to verify the effectiveness of water droplet lens effect of UV laser micromachining process.

• Korean Journal of Optics and Photonics
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• v.18 no.4
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• pp.286-291
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• 2007

We theoretically investigated the far-field radiation pattern of epi-signal from a polystyrene sphere in coherent anti-Stokes Raman scattering (CARS) microscopy with an objective lens of high numerical aperture. We calculated the field distribution of the incident laser beams under the tight-focusing condition and the far-field radiation pattern through coherent addition of radiation from the nonlinear polarizations (Hertzian dipoles) as the origin of CARS signal generation. The epi-radiation patterns for polystyrene spheres of different diameters are calculated, and the pattern of a sphere is also compared with that of a shell fer a diameter of 1100 nm. We finally show how the radiation pattern of the polystyrene sphere changes as the center of the sphere shifts from the focus of the beam.

• Journal of the Korean Society for Precision Engineering
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• v.27 no.12
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• pp.15-21
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• 2010

Recently, there is a demand for a thermal imaging microscope in the medical field as well as the semi-conductor industry Although the demand of the advanced thermal imaging microscope has been increased, it is very difficult to obtain the technology of developing a thermal camera, because it is used for defense industry. We developed the ${\times}5$ zoom microscope which has $3\;{\mu}m$ spatial resolution to research the design and fabrication of the IR (Infrared) optical system. The optical system of the IR microscope consists of four spherical lenses and four aspheric lenses. We verified individual sensitivity of each optical parameter as the first order approach to the analysis. And we also performed structure and vibration analysis. The optical elements are fabricated using Freeform 700A. The measurement results of surface roughness and form accuracy using NT 2000 and UA3P are Ra 2.36 nm and P-V $0.13\;{\mu}m$. Finally we ascertained resolution power of $3\;{\mu}m$ using USAF (United State Air Force) 1951 IR resolution test chart.