Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
권호 표지

Development of the Ultra Precision Thermal Imaging Optical System

초정밀 열 영상 현미경 광학계 개발

  • Received : 2010.09.20
  • Accepted : 2010.10.22
  • Published : 2010.12.01
Download PDF
⟨ Previous Next ⟩

Abstract

Recently, there is a demand for a thermal imaging microscope in the medical field as well as the semi-conductor industry Although the demand of the advanced thermal imaging microscope has been increased, it is very difficult to obtain the technology of developing a thermal camera, because it is used for defense industry. We developed the ${\times}5$ zoom microscope which has $3\;{\mu}m$ spatial resolution to research the design and fabrication of the IR (Infrared) optical system. The optical system of the IR microscope consists of four spherical lenses and four aspheric lenses. We verified individual sensitivity of each optical parameter as the first order approach to the analysis. And we also performed structure and vibration analysis. The optical elements are fabricated using Freeform 700A. The measurement results of surface roughness and form accuracy using NT 2000 and UA3P are Ra 2.36 nm and P-V $0.13\;{\mu}m$. Finally we ascertained resolution power of $3\;{\mu}m$ using USAF (United State Air Force) 1951 IR resolution test chart.

Keywords

References

  1. Vallett, D. P., "Failure analysis requirement for nanoelectronics," IEEE Trans. on Nanotech., Vol. 1, No. 3, pp. 117-121, 2002. https://doi.org/10.1109/TNANO.2002.806826
  2. Ippolito, S. B., Thorne, S. A., Eraslan, M. G., Goldberg, B. B., Unlu, M. S. and Leblebici, Y., "high spatial resolution subsurface thermal emission microscopy," Appl. Phys. Lett., Vol. 84, No. 22, pp. 4529-4531, 2004. https://doi.org/10.1063/1.1758308
  3. Nowakowski, A., Kaczmarek, M., Ruminski, J., Hryciuk, M., Renkielska, A., Grudzinski, J., Siebert, J., Jagielak, D., Rogowski, J., Roszak, K. and Sojek, W., "Medical applications of model based dynamic thermography," Pro. of SPIE, Vol. 4360, pp. 492-503, 2001.
  4. Gordon, N., Rispler, S., Sideman, S., Shofti, R, and Beyar, R., "Estimation of coronary blood flow by ECG gated cardiac thermography in open-chest conditions," Physiol. Meas., Vol. 19, No. 3, pp. 353-366, 1998. https://doi.org/10.1088/0967-3334/19/3/004
  5. Vainer, B. G., "FPA-based infrared thermography as applied to the study of cutaneous perspiration and stimulated vascular response in humans," Phys. Med. Biol., Vol. 50, No. 23, pp. R63-R94, 2005. https://doi.org/10.1088/0031-9155/50/23/R01
  6. Schroeder, D. J., "Astronomical Optics," Academic, 2000.
  7. Yoder, P. R., "Mounting Optics in Optical Instruments," SPIE Press, 2002.
  8. Tsutsumi, H., Yoshizumi, K. and Takeuchi, H., "Ultrahigh Accurate 3D Profilometer," Proc. of SPIE, Vol. 5638, pp. 387-394, 2005.
  9. Yang, S. C., Kim, G. H., Kim, H. S., Lee, S. Y., Bok, M. G. and Won, J. B., "The Characteristics of Ultra Precision Machining of Optical Element Germanium," Journal of the Korean Society for Precision Engineering, Vol. 23, No. 6, pp. 7-13, 2006.
  10. MIL-STD-150A, Section 5.1.1.7, USAF (1951) 3-Bar Resolving Power Target, Available from: