• 대한기계학회논문집A
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• 제30권10호
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• pp.1314-1319
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• 2006

This paper describes the novel fabrication method of the high-aspect-ratio nano structure which is impossible by conventional method using a shadow mask and a Deep X-ray Lithography (DXRL). The shadow mask with $1{\mu}m-sized$ apertures is fabricated on the silicon membrane using a conventional UV-lithography. The size of aperture is reduced to 200nm by accumulated low stress silicon nitride using a LPCVD (low pressure chemical vapor deposition) process. The X-ray mask is fabricated by depositing absorber layer (Au, $3{\mu}m$) on the back side of nano shadow mask. The thickness of an absorber layer must deposit dozens micrometers to obtain contrast more than 100 for a conventional DXRL process. The thickness of $3{\mu}m-absorber$ layer can get sufficient contrast using a central beam stop method, blocking high energy X-rays. The nano circle and nano line, 200nm in diameter in width, respectively, were demonstrated 700nm in height with a negative photoresist of SU-8.

• 한국방사선학회논문지
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• 제9권5호
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• pp.301-306
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• 2015

엑스선을 이용하면 다양한 종류의 시료에 대한 투영 영상을 얻을 수 있다. 시료가 저밀도 및 고밀도의 복합 물질로 구성되어 있는 경우는 단일 관전압 엑스선을 이용해서 두 물질을 모두 대조도가 높도록 영상화하기 어렵다. 저관전압과 고관전압을 이용하여 영상을 획득하고 영상처리하면 밀도의 차이가 큰 물질을 영상화하기에 용이하다. 크기가 작은 전자부품을 저관전압과 고관전압에서 영상을 획득하여 visual C++을 이용하여 픽셀-픽셀 영상 합성을 통하여 전자부품의 합성수지부분과 금속부분을 동시에 영상화하여 전자부품의 검사 및 관찰의 가능성을 검증하였다.

• 한국안전학회지
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• 제32권2호
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• pp.34-37
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• 2017

In recent emerging industry, Display field becomes bigger and bigger, and also semiconductor technology becomes high density integration. In Flat Panel Display, there is an issue that electrostatic phenomenon results in fine dust adsorption as electrostatic capacity increases due to bigger size. Destruction of high integrated circuit and pattern deterioration occur in semiconductor and this causes the problem of weakening of thermal resistance. In order to solve this sort of electrostatic failure in this process, Soft X-ray ionizer is mainly used. Soft X-ray Ionizer does not only generate electrical noise and minute particle but also is efficient to remove electrostatic as it has a wide range of ionization. X-ray Generating efficiency has an effect on soft X-ray Ionizer affects neutralizing performance. There exist variable factors such as type of anode, thickness, tube voltage etc., and it takes a lot of time and financial resource to find optimal performance by manufacturing with actual X-ray tube source. MCNPX (Monte Carlo N-Particle Extended) is used for simulation to solve this kind of problem, and optimum efficiency of X-ray generation is anticipated. In this study, X-ray generation efficiency was measured according to target material thickness using MCNPX under the conditions that tube voltage is 5 keV, 10 keV, 15 keV and the target Material is Tungsten(W), Gold(Au), Silver(Ag). At the result, Gold(Au) shows optimum efficiency. In Tube voltage 5 keV, optimal target thickness is $0.05{\mu}m$ and Largest energy of Light flux appears $2.22{\times}10^8$ x-ray flux. In Tube voltage 10 keV, optimal target Thickness is $0.18{\mu}m$ and Largest energy of Light flux appears $1.97{\times}10^9$ x-ray flux. In Tube voltage 15 keV, optimal target Thickness is $0.29{\mu}m$ and Largest energy of Light flux appears $4.59{\times}10^9$ x-ray flux.

• Journal of Radiation Protection and Research
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• 제46권4호
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• pp.160-169
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• 2021

Background: Dual-energy X-ray images (DEI) can distinguish or improve materials of interest in a two-dimensional radiographic image, by combining two images obtained from separate low and high energies. The concepts of DEI performance describing the performance of double-exposure DEI systems in the Fourier domain been previously introduced, however, the performance of double-exposure DEI itself in terms of various parameters, has not been reported. Materials and Methods: To investigate the DEI performance, signal-difference-to-noise ratio, modulation transfer function, noise power spectrum, and noise equivalent quanta were used. Low- and high-energy were 60 and 130 kVp with 0.01-0.09 mGy, respectively. The energy-separation filter material and its thicknesses were tin (Sn) and 0.0-1.0 mm, respectively. Noise-reduction (NR) filtering used the Gaussian-filter NR, median-filter NR, and anti-correlated NR. Results and Discussion: DEI performance was affected by Sn-filter thickness, weighting factor, and dose allocation. All NR filtering successfully reduced noise, when compared with the dual-energy (DE) images without any NR filtering. Conclusion: The results indicated the significance of investigating, and evaluating suitable DEI performance, for DE images in chest radiography applications. Additionally, all the NR filtering methods were effective at reducing noise in the resultant DE images.

• 방사선산업학회지
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• 제9권3호
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• pp.137-141
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• 2015

A single-shot dual-energy x-ray imaging technique has been developed using a sandwich detector by stacking two detectors, in which the front and rear detectors respectively produce relatively lower and higher x-ray energy images. Each detector layer is composed of a phosphor screen coupled with a photodiode array. The front detector layer employs a thinner phosphor screen, whereas the rear detector layer employs a thicker phosphor screen considering the quantum efficiency for x-ray photons with higher energies. We have applied the proposed method into the inspection of printed circuit boards, and obtained dual-energy images with background clutter suppressed. In addition, the single-shot dual-energy method provides sharper-edge images than the conventional radiography because of the unsharp masking effect resulting from the use of different thickness phosphors between the two detector layers. It is promising to use the single-shot dual-energy x-ray imaging for high-resolution nondestructive testing. For the reliable use of the developed method, however, more quantitative analysis is further required in comparisons with the conventional method for various types of printed circuit boards.

• 암석학회지
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• 제6권2호
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• pp.88-95
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• 1997

High pressure X-ray diffraction study was carried out on a polycrystalline graphite to investigate the phase transition(s) at room temperature. Energy dispersive X-ray diffraction method was employed using a Mao-Bell type diamond anvil cell with an Wiggler synchrotron Radiation at the National Synchrotron Light Source. Sodium chloride power was used as the internal pressure sensor for the high pressure determinations as well as the pressure medium for quasihydrostatic pressure environment. Graphite transforms into a hexagonal didose not agree with the previously reported observations and this phase persists when pressure is released down to 0.1 MPa. This result dose not agree with the previously reported observations and this discrepancy would be due to the kinetics in phase transition as well as the uniaxially oriented pressure field in the diamond anvil cell.

• 한국정보통신학회논문지
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• 제24권12호
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• pp.1711-1717
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• 2020

일반적으로 컨테이너 내부검사를 위해서는 최대 9MeV의 X-선을 사용한다. 이때 사용되는 X-선은 선형가속기를 통해 생성되며 일정한 세기의 X-선량이 시간의 변화에 관계없이 안정적으로 유지되어야 한다. 만약 발생되는 X-선의 세기가 일정하지 않다면 영상의 해상도와 대비도 등에 영향을 미칠 수 있으며 결과적으로 컨테이너 내부의 이상화물에 대한 검사에 영향을 미칠 수 있다. 그러므로 고화질의 영상을 획득하기 위해서는 발생되는 X-선 선량에 대한 지속적인 모니터링이 요구된다. 이와같은 선량 모니터링을 위하여, 본 연구에서는 고에너지 X-선 선량의 변화 측정을 위한 이온전리함 기반의 선량변화 측정장치를 개발하였고 환경변화에 따른 신호처리부의 성능변화를 확인하기 위하여 온도와 습도 변화에 의한 측정값의 변화를 관찰하였다. 또한, 고에너지 X-선 발생장치에서 발생되는 선량의 변화에 따른 응답특성변화를 측정함으로써 개발한 X-선 선량측정장치의 검증을 수행하였다. 측정결과 온도와 습도의 변화에 따른 성능의 차이가 크게 나타나지 않았으며 입사되는 선량의 변화에 따른 출력의 변화가 선형적이었다. 그러므로 개발한 이온전리함 기반의 선량변화측정장치는 고에너지 X-선의 선량변화의 측정에 적용하기에 적합함을 알 수 있었다.

• Progress in Superconductivity
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• 제14권2호
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• pp.99-101
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• 2012

Fluorescent yield X-ray absorption fine structure (XAFS) spectroscopy is useful for analyzing local structure of specific elements in matrices. We developed an XAFS apparatus with a 100-pixel superconducting tunnel junction (STJ) detector array with a high sensitivity and a high resolution for light-element dopants in wide-gap semiconductors. An STJ detector has a pixel size of $100{\mu}m$ square, and an asymmetric layer structure of Nb(300 nm)-Al(70 nm)/AlOx/Al(70 nm)-Nb(50 nm). The 100-pixel STJ array has an effective area of $1mm^2$. The XAFS apparatus with the STJ array detector was installed in BL-11A of High Energy Accelerator Research Organization, Photon Factory (KEK PF). Fluorescent X-ray spectrum for boron nitride showed that the average energy resolution of the 100-pixels is 12 eV in full width half maximum for the N-K line, and The C-K and N-K lines are separated without peak tail overlap. We analyzed the N dopant atoms implanted into 4H-SiC substrates at a dose of 300 ppm in a 200 nm-thick surface layer. From a comparison between measured X-ray Absorption Near Edge Structure (XANES) spectra and ab initio FEFF calculations, it has been revealed that the N atoms substitute for the C site of the SiC lattice.

• 대한방사선기술학회지:방사선기술과학
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• 제30권3호
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• pp.245-250
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• 2007

진단용 방사선발생장치에서의 X선 에너지와 $^{99m}Tc$-MDP, $^{18}F$-FDG의 감마선 에너지 대한 apron 0.25, 0.5 mmPb에 대한 차폐율을 측정하였다. X선 에너지는 관전압 $40{\sim}120\;kVp$ 범위 내에서 부가여과판 0, 2 mmAl을 사용 한 경우에 실효에너지가 $26.2{\sim}45.6\;keV$로 측정되었으며, 이때 apron 0.5 mmPb은 0.25 mmPb보다 최대 선질에서 5.5% 정도 차폐율이 증가하였다. 또한 두 종류의 apron은 직접선과 공간선량률에 대하여 90% 이상의 높은 차폐율을 나타내었다. 그리고 $^{99m}Tc$-MDP의 140 keV에서 0.25, 0.5 mmPb apron을 사용할 경우 $30{\sim}53%$ 정도의 차폐효과가 있었으며, $^{18}F$-FDG의 511 keV의 높은 에너지에서는 $1.3{\sim}3.6%$로 apron의 차폐효과가 매우 적었다.

• 천문학회보
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• 제38권1호
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• pp.65.1-65.1
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• 2013

The 2011 August 09 Flare is one of the largest X-ray flares of Sunspot Cycle 24 to attract a lot of attention for its various activities detected in coronal images. In this study we concern ourselves mostly on information of high energy electrons produced during this flare provided by hard X ray data from the Reuven Ramaty High-Energy Solar Spectroscopic Imager (RHESSI) and radio data from the Korean Solar Radio Burst Locator (KSRBL) and Ondrejov. EUV images obtained by the Atmospheric Imaging Assembly (AIA) on board the Solar Dynamic Observatory are used to provide the context of magnetic reconnection. In our results, (1) HXR spectra have a rich spectral morphology. Initially it could be fit by one thermal component (T~30MK) and one single power law nonthermal spectrum, but later a better fit could be made by introducing an additional thermal component (T~55 MK). (2) Time delays between the KSRBL burst and the RHESSI hard X-ray emission were found which are more obvious at low frequencies and insignificant at high frequencies. (3) The HXR source lies in the core of the quadrupolar active region. In our interpretation based on AIA 94 A images, the outer part of the active region erupted to be blown out, leaving the intense hard X-ray emission concentrated in the core. We relate the appearance of the second thermal component to the evolution of the AIA 171 and 94 A images. The time delays of microwave peaks to HXR peaks are interpreted as indicating presence of trapped electrons in larger closed magnetic loops. With these result we conclude that the hard X ray and microwaves are due to impulsive acceleration in the low and high heights and a sigmoidal reconnection scenario.