• 제목/요약/키워드: High Speed Spindle System

검색결과 189건 처리시간 0.031초

다공질 공기 베어링을 적용한 반도체 웨이퍼 연마용 스핀들 개발 (Development of Wafer Grinding Spindle with Porous Air Bearings)

  • 이동현;김병옥;전병찬;허균철;김기수
    • Tribology and Lubricants
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    • 제39권1호
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    • pp.28-34
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    • 2023
  • Because of their cleanliness, low friction, and high stiffness, aerostatic bearings are used in numerous applications. Aerostic bearings that use porous materials as means of flow restriction have higher stiffness than other types of bearings and have been successfully applied as guide bearings, which have high motion accuracy requirements. However, the performances of porous bearings exhibit strong nonlinearity and can vary considerably depending on design parameters. Therefore, accurate prediction of the performance characteristics of porous bearings is necessary or their successful application. This study presents a porous bearing design and performance analysis for a spindle used in wafer polishing. The Reynolds and Darcy flow equations are solved to calculate the pressures in the lubrication film and porous busing, respectively. To verify the validity of the proposed analytical model, the calculated pressure distribution in the designed bearing is compared with that derived from previous research. Additional parametric studies are performed to determine the optimal design parameters. Analytical results show that optimal design parameters that obtain the maximum stiffness can be derived. In addition, the results show that cross-coupled stiffness increases with rotating speed. Thus, issues related to stability should be investigated at the design stage.

An Experimental Study of the Micro Turbojet Engine Fuel Injection System

  • Choi, Hyun-Kyung;Choi, Seong-Man;Lee, Dong-Hun
    • 한국추진공학회:학술대회논문집
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    • 한국추진공학회 2008년 영문 학술대회
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    • pp.1-5
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    • 2008
  • An experimental study was performed to develop the rotational fuel injection system of the micro turbojet engine. In this system, fuel is sprayed by centrifugal forces of engine shaft. The test rig was designed and manufactured to get droplet information on combustion space. This experimental apparatus consist of a high speed rotational device(Air-Spindle), fuel feeder, rotational fuel injector and acrylic case. To understand spray characteristics, spray droplet size, velocity and distribution were measured by PDPA (Phase Doppler Particle Analyzer) and spray was visualized by using Nd-Yag laser-based flash photography. From the test results, the length of liquid column from injection orifice is controlled by the rotational speeds and Sauter Mean Diameter(SMD) is decreased with rotational speed. Also, Sauter Mean Diameter is increased as increasing mass flow rate at same rotational speeds.

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매입형 영구자석 동기전동기의 최적 전류각 제어 (Optimal current angle control method of interior permanent magnet Synchronous Motors)

  • 김명찬;김종구;홍순찬
    • 대한전기학회논문지
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    • 제45권3호
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    • pp.352-357
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    • 1996
  • Recently, Permanent Magnet Synchronous Motor(PMSM) drives are widely used for industrial applications due to its high efficiency and high power factor control strategy. PMSM generally have two classifications such as the SPMSM(Surface Permanent Magnet Synchronous Motors) and IPMSM(Inter Permanent Magnet Synchronous Motors). IPMSA has economical merits over SPMSM in higher speed range, mechanical robustness, and higher power rate by the geometric difference. The maximum torque operation in IPMSM is realized by the current angle control which is to utilize additional reluctance torque due to a rotor saliency. In traction, spindle and compressor drives, constant power operation with higher speed range are desirable. This is simply achieved in the DC motor drives by the reduction of the field current as the speed is increased. However, in the PMSM, direct control of the magnet flux is not available. The airgap flux can be weakened by the appropriate current angle control to demagnetize. In this paper, the control method of optimal current vector in IPMSM is described in order to obtain the maximum torque or maximum output with the speed and load variations. The applied algorithm is realized by the proto system with torque and speed control Experimental results show this approach is satisfied for the high performance servo applications. (author). 6 refs., 9 figs., 1 tab.

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하이브리드 외부가압 공기베어링에서 노즐 위치에 따른 부하지지력 특성 (The development of the air-spindle for using to machining the die and mold)

  • 이득우;이종렬;황성철;이준석
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2000년도 추계학술대회논문집 - 한국공작기계학회
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    • pp.466-470
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    • 2000
  • Externally pressurized air journal bearing has been widely used in high-speed spindle system and precision machinery because of its characteristics such as substantially low frictional loss, low heat generation and averaging effect leading better running accuracy. But air journal bearing have a disadvantage of the low load capacity due to the low viscosity. In this paper, The air journal bearing design to overcome the defects of air bearing such as low stiffness and dimping coefficients was investigated theoretically.

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개방형 CNC를 갖는 공작기계에 실장한 열변형량 예측 시스템 (Prediction System of Thermal Errors Implemented on Machine Tools with Open Architecture Controller)

  • 김선호;고태조;안중환
    • 한국정밀공학회지
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    • 제25권5호
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    • pp.52-59
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    • 2008
  • The accuracy of the machine tools is degraded because of thermal error of structure due to thermal variation. To improve the accuracy of a machine tools, measurement and prediction of thermal error is very important. The main part of thermal source is spindle due to high speed with friction. The thermal error of spindle is very important because it is over 10% in total thermals errors. In this paper, the suitable thermal error prediction technology for machine tools with open architecture controller is developed and implemented to machine tools. Two thermal error prediction technologies, neural network and multi-linear regression, are investigated in several methods. The multi-linear regression method is more effective for implementation to CNC. The developed thermal error prediction technology is implemented on the internal function of CNC.

고속 회전 유연 디스크 시스템에서 곡면 안정기에 가공된 모세관형 오리피스의 감쇠계수 해석 (An Analysis of Damping Coefficients for Capillary Type Orifices on a Curved Stabilizer used in a High Speed Rotating Flexible Optical Disk System)

  • 송기욱;임윤철
    • 정보저장시스템학회논문집
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    • 제7권1호
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    • pp.25-30
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    • 2011
  • In the last couple of years, the flexible optical disk(FOD) system that consists of a thin polycarbonate(PC) film of 95 ${\mu}m$ thick, a rigid stabilizer, and a high speed spindle motor has been spot-lighted as the next-generation optical system for archival use of digital data. The air film between the rotating disk and stabilizer provides a means for damping out the lateral disk vibrations. However, its damping-capability drops significantly as the rotational speed of the disk exceeds a specific limit and, eventually, the disk vibration propagates inward causing the whole span of the disk exhibits large vibration amplitudes. Based on the numerical simulations as well as the experimental results, the present work aims to evaluate the damping coefficient of the air-film near the outer region of the disk where the capillary type orifices are applied to the edge of the curved stabilizer.

초경 인서트 드릴의 절삭 조건에 관한 연구 (Cutting Conditions of Carbide Insert Drill)

  • 최성윤;황철웅;이상태
    • 한국기계가공학회지
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    • 제20권6호
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    • pp.10-16
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    • 2021
  • Drilling is a crucial process that takes up a significant amount of weight during machining operations. In addition, drill tip-type tools and related operations have been developed for manufacturing industries to achieve economic efficiency. In this study, SM45C carbon steel, widely used for machine structures, was utilized as the working material after quenching and tempering. Insert-tip types of carbide tools, such as TiN and TiAlN, were used as tool materials. Drilling conditions such as the spindle revolution, feed rate, step of cut, and tool diameter were used to measure roughness, roundness, and straightness using the orthogonal array table statistical method. The surface roughness, roundness, and straightness characteristics based on the conditions were analyzed using ANOVA. The results showed that the spindle speed and feed rate were the main factors influencing carbide insert-tip drilling under the same conditions as the experimental conditions.

CNC선반 C축 밀링가공에서 표면 거칠기에 미치는 절삭조건의 영향 (Effect of Cutting Conditions on Surface Roughness in CNC Lathe C-axis Milling Cutting)

  • 신국식
    • 한국기계가공학회지
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    • 제11권3호
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    • pp.110-115
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    • 2012
  • For domestic aircraft industry, not mass production of components is limited, small production scale of the order is made by part because many kinds of hundreds of thousands of kinds of small quantity batch production system are taking. But the high reliability and stability are required during the processing because they require high precision parts are required. It is found that when C-axis rotation speed was increased, the diameter of the cutting tool decreased with increasing surface roughness, while the turn-mail feed rate was increased with increasing the surface roughness.

슬라이딩 커버의 신뢰성 시험 및 구조개선 연구 (A study on the Reliability Experiment and the Structural Improvement of Sliding Cover)

  • 송준엽;강재훈;김태형;김옥구
    • 한국정밀공학회지
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    • 제22권7호
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    • pp.146-154
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    • 2005
  • Recently, the high-speed and intelligence technology of machine tools are developed for the high efficiency of productivity Under the operating condition from the high-speed of machine tools, the various failure modes can occur in core units of manufacturing system. Therefore it is for the reliability concept of machine tool to be required in a design level. And the above-stated technology must be accommodated in the feeding and spindle subsystem, etc those are the core units of machine tools. In this study, we are developed the test-bed of sliding cover (C-plate) in order to evaluating reliability and estimating failure modes of feeding subsystem under operating conditions. The reliability experiment using the developed test-bed and the additional structural analysis executed on single and double structure. We found out the weak parts of sliding cover and were able to predict a life cycle from the experiment results. In this study, we propose the new C-plate model with double link structure to apply the high-speed machine tool in the fundamental guideline.

정밀 공작기계의 회전 영역별 진동 및 불평형량 감소에 따른 가공 정밀도 영향에 관한 연구 (A Study on the Machining Accuracy according to Vibration and Unbalance Decrease in Rotational Speed Domains of High Precision Machine Tools)

  • 손덕수;김상화;박일환
    • 한국기계가공학회지
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    • 제12권2호
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    • pp.121-126
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    • 2013
  • Precision machine tools for high dignity cutting are needed for efforts to improve machining accuracy. However, there are many factors to improve machining accuracy. This study investigated how machining accuracy changes when variation and unbalance amount in rotational speed domain is decreased. Machining accuracy of initial machine tools depends on manufacturing and assembly of parts such as bearing. And then, vibration and noise vary with volume of unbalance amount when it is rotation, so it effects unbalance amount. Also vibration and noise increased by unbalance shorten spindle's life and it especially makes worse boring accuracy. Therefore, this study studied the change of roundness and cylindricity of workpiece when it decreases variation and unbalance in rotational speed domain.