• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2003년도 춘계학술대회논문집
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• pp.755-761
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• 2003

Recently, the development of mobile devices demands information storage systems to use micro drive devices and cheap media. These should have several characteristics, for example, the subminiature of size, the robustness of shock, the minimum of cost and power consumption, and the removability of multiple applications. A conventional optical disk drive is more suitable for these specifications than the others. The optical storage system of the new generation to use a blue laser and a high numerical aperture (NA) is the perfect candidate for micro optical disk drives. In this paper, the micro actuator that can be applied to a micro optical disk drive is designed by response surface methodology to use a structural analysis and an electro-magnetic analysis. Based on above results, the coarse actuator and fine actuator are designed and improved from the point of view of the size and the power. Consequently, the designs of a micro actuator are proposed through these courses.

• 한국정밀공학회지
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• 제23권3호
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• pp.156-162
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• 2006

Direct fabrication of nano patterns has been studied employing a nano-stereolithography (NSL) process. The needs of nano patterning techniques have been intensively increased for diverse applications for nano/micro-devices; micro-fluidic channels, micro-molds. and other novel micro-objects. For fabrication of high-aspect-ratio (HAR) patterns, a thick spin coating of SU-8 process is generally used in the conventional photolithography, however, additional processes such as pre- and post-baking processes and expansive precise photomasks are inevitably required. In this work, direct fabrication of HAR patterns with a high spatial resolution is tried employing two-photon polymerization in the NSL process. The precision and aspect ratio of patterns can be controlled using process parameters of laser power, exposure time, and numerical aperture of objective lens. It is also feasible to control the aspect ratio of patterns by truncation amounts of patterns, and a layer-by-layer piling up technique is attempted to achieve HAR patterns. Through the fabrication of several patterns using the NSL process, the possibility of effective patterning technique fer various N/MEMS applications has been demonstrated.

• 한국정밀공학회지
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• 제23권5호
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• pp.190-196
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• 2006

Transparent materials are widely used in the fields of optic parts and bio industry. We have experiment to find out the characteristics of the micromachining inside transparent materials using femtosecond laser pulses. With its non-linear effects by very high peak intensity, filament (plasma channel) was formed by the cause of the self-focusing and the self-defocusing. Physical damage could be found when the intensity is high enough to give rise to the thermal stress or evaporation. At the vicinity of the power which makes the visible damage or modification, the structural modification occurs with the slow scanning speed. According to the polarization direction to the scanning direction, the filament quality is quite different. There is a good quality when the polarization direction is parallel to the scanning direction. For fine filament, we could suggest the conditions of the high numerical aperture lens, the short shift of focusing point, the low scanning speed and the low power below 20 mW. As the examples of optics parts, we fabricated the fresnel zone plate with the $225{\mu}m$ diameter and Y-bend optical wave guide with the $5{\mu}m$ width.

• 한국정밀공학회지
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• 제25권1호
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• pp.122-129
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• 2008

Two-photon stereolithography is recognized as a promising process for the fabrication of three-dimensional (3D) microstructures with 100 nm resolution. Generally, beam-scanning system has been used in the conventional process of two-photon stereolithography, which is limited to the fabrication of micro-prototypes in small area of several tens micrometers. For the applications to 3D high-functional micro-devices, the fabrication area of the process is required to be enlarged. In this paper, large-area two-photon stereolithography (L-TPS) employing stage scanning system has been developed. Continuous scanning method is suggested to improve the fabrication speed and parameter study is conducted. An objective lens of high numerical aperture (N.A.) and high strength material were employed in this system. Through this work, 3D microstructures of $600*600*100\;{\mu}m$ were fabricated.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1997년도 추계학술대회 논문집
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• pp.473-476
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• 1997

Focused Ar ion laser beam can be utilized to fabricate microstructures on silicon substrate as well as other materials(e.g. such as ceramic). The laser using in this study is an argon ion laser with maximum power of 6 W, wavelength of 514 nm. This laser beam is focused by objectives with a high numerical aperture, a long working distance. We have achieved line width about 1 ${\mu}{\textrm}{m}$ with high scan speed. The resolution for Si machining is determined by the selectivity of the chemical reaction rather than the laser spot size. In this study, we have obtained the maximum etch rate of 434.7 ${\mu}{\textrm}{m}$/sec with high aspect ratio. The characteristics of etched groove was investigated by scanning electron microscope(SEM) and auger electron spectroscopy(AES). It is assumed that the technique using arson ion laser is applicab1e to fabricate microstructures.

• 터널과지하공간
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• 제29권3호
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• pp.197-213
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• 2019

본 연구에서는 TOUGH-FLAC 연동해석기법을 이용하여 Mont Terri 지하연구시설에서 수행된 단층 내 물 주입시험을 수치적으로 모델링하고, 단층의 재활성과 수리역학적 거동 특성을 살펴보았다. TOUGH2 해석에서는 단층을 Darcy의 법칙과 삼승법칙(Cubic law)을 따르는 연속체 요소로 모델링하였으며, FLAC3D 해석에서는 미끄러짐과 개폐가 허용되는 불연속 인터페이스 요소를 통해 모사하였다. 현장에서 획득한 단층의 균열개방압력(fracture opening pressure), 주입율, 모니터링 압력, 변위 곡선 등을 바탕으로, 단층의 탄성적 변형과 파괴에 의한 수직팽창 특성을 반영할 수 있는 수리간극모델과 수리역학 커플링 관계를 해석모델에 반영하였다. 한편, 현지응력 조건, 단층의 강도 및 변형 특성에 따른 파라미터 해석을 실시하여 각 입력변수가 해석 결과에 미치는 영향을 분석하였으며, 이를 통해 현장시험 결과를 가장 잘 재현할 수 있는 파라미터 조합을 선정하였다. 해석 결과, 균열개방압력에서 단층의 주입율과 모니터링 압력이 크게 증가하는 현상을 합리적으로 재현할 수 있었다. 하지만, 동일한 입력 변수 조건에서 단층의 전단변위와 파괴영역의 범위는 현장시험 결과에 비해 과대평가되는 결과를 보였다. 이는 해석모델에서는 고압의 주입조건에서 단층의 지속적인 전단파괴가 유도되는 반면, 현장에서는 수리간극의 변화가 전단 미끄러짐보다는 인장력에 의한 단층면의 개방(tensile opening)에 크게 의존하는 것으로 추정되기 때문이다.

• 한국지구과학회지
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• 제39권4호
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• pp.305-316
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• 2018

Satellite-derived sea surface winds (SSWs) and atmospheric motion vectors (AMVs) over the global ocean, particularly including the areas in and around tropical cyclones (TCs), have been provided in a real-time and continuous manner. More and better information is now derived from technologically improved multiple satellite missions and wind retrieving techniques. The status and prospects of key SSW products retrieved from scatterometers, passive microwave radiometers, synthetic aperture radar, and altimeters as well as AMVs derived by tracking features from multiple geostationary satellites are reviewed here. The quality and error characteristics, limitations, and challenges of satellite wind observations described in the literature, which need to be carefully considered to apply the observations for both operational and scientific uses, i.e., assimilation in numerical weather forecasting, are also described. Additionally, on-going efforts toward merging them, particularly for monitoring three-dimensional TC wind fields in a real-time and continuous manner and for providing global profiles of high-quality wind observations with the new mission are introduced. Future research is recommended to develop plans for providing more and better SSW and AMV products in a real-time and continuous manner from existing and new missions.

• 한국생산제조학회지
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• 제21권5호
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• pp.773-777
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• 2012

Recently UV laser micromachining processes is widely introduced to meet the needs of advanced components of IT, BT and ET industries. Due to the characteristics of non-contact and high-speed laser processing, UV laser micromachining is applied to manufacture very thin substrate such as polymer, metals and composite. These minimum line width obtained by UV laser micromachining is generally determined from laser wavelength, optical lens and its numerical aperture. In this paper we will show the lens effect of water droplet on the surface of workpiece to reduce the line width when UV laser light is irradiated and focused through the water droplet. Because of the refraction effect generated by the semi-spherical or spherical shape of water droplet, we can find smaller line width. And water droplet could not only protect thermal deformation, but also carry away burr around micro dent. Firstly fundamental theory of minimum line width was derived from relationship between the geometry of water droplet and laser light trace, and then experimental and simulation results will be finally compared to verify the effectiveness of water droplet lens effect of UV laser micromachining process.

• 한국광학회지
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• 제18권4호
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• pp.286-291
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• 2007

높은 수치구경의 대물렌즈를 사용하는 간섭성 반스톡스 라만 산란 현미경(coherent anti-Stokes Raman scattering microscopy)에서 폴리스틸렌구에서 발생한 신호의 먼거리장 방사패턴에 대한 이론적 계산 연구를 수행하였다. 극초점 조건에서 입사 레이저 광의 전기장 분포를 계산하였고, CARS 신호 생성원인인 비선형 분극(헤르치안 쌍극자) 방사의 간섭성 합을 통하여 먼거리장 방사 패턴을 계산하였다. 폴리스틸렌구의 크기에 따른 후방 방사패턴을 계산하였고, 1100 nm 직경을 가진 폴리스틸렌구와 폴리스틸렌 구껍질의 방사패턴을 비교하였다. 또한, 극초점으로부터 폴리스틸렌구의 중심이 이동함에 따른 방사패턴의 변화를 보였다.

• 한국정밀공학회지
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• 제27권12호
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• pp.15-21
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• 2010

Recently, there is a demand for a thermal imaging microscope in the medical field as well as the semi-conductor industry Although the demand of the advanced thermal imaging microscope has been increased, it is very difficult to obtain the technology of developing a thermal camera, because it is used for defense industry. We developed the ${\times}5$ zoom microscope which has $3\;{\mu}m$ spatial resolution to research the design and fabrication of the IR (Infrared) optical system. The optical system of the IR microscope consists of four spherical lenses and four aspheric lenses. We verified individual sensitivity of each optical parameter as the first order approach to the analysis. And we also performed structure and vibration analysis. The optical elements are fabricated using Freeform 700A. The measurement results of surface roughness and form accuracy using NT 2000 and UA3P are Ra 2.36 nm and P-V $0.13\;{\mu}m$. Finally we ascertained resolution power of $3\;{\mu}m$ using USAF (United State Air Force) 1951 IR resolution test chart.