• 한국입자에어로졸학회지
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• 제13권2호
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• pp.53-63
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• 2017

As semiconductor process was highly integrated, particle contamination became a major issue. Because particle contamination is related with process yields directly, particles with a diameter larger than half pitch of gate should be controlled. PBMS (Particle beam mass spectrometry) is one of powerful nano particle measurement device. It can measure 5~500 nm particles at ~ 100 mtorr condition in real time by in-situ method. However its usage is restricted to research filed only, due to its big device volume and high price. Therefore aperture changeable aerodynamic lenses (ACALs) which can control particle focusing characteristics by changing its aperture diameter was proposed in this study. Unlike conventional aerodynamic lenses which changes particle focusing efficiency when operating condition is changed, ACALs can maintain particle focusing efficiency. Therefore, it can be used for a multi-monitoring system that connects one PBMS and several process chambers, which greatly improves the commercialization possibility of the PBMS. ACALs was designed based on Stokes number and evaluated by numerical method. Numerical analysis results showed aperture diameter changeable aerodynamic lenses can focus 5 to 100 nm standard particles at 0.1 to 10 torr upstream pressure.

• 정보저장시스템학회논문집
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• 제3권3호
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• pp.135-138
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• 2007

Using a Shack-Hartmann sensor and sub-wavelength sized pinhole point source, we develope an optical testing system that measures the wavefront error of high numerical aperture and small sized optical components. The subwavelength sized pinhole generates perfect spherical waves with large diffraction angle and this makes possible to test high numerical aperture optics. The Shack-Hartmann sensor reconstructs the wavefront and calculates the aberrations. We make a home-made reference plane wave source which generates nearly perfect plane waves and the calibration with this plane source gives the overall uncertainty of the optical testing system 0.010 $\lambda$ rms.

• 한국광학회지
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• 제23권1호
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• pp.1-5
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• 2012

근축회절 이론에서는 횡배율이 달라도 파장과 수치구경이 같으면 항상 동일하게 회절한다. 하지만 수치구경이 큰 광학계에서는 비근축 회절효과에 의하여 횡배율에 따라 회절 특성이 변화하게 된다. 이 연구에서는 높은 수치구경을 가지는 무수차 광학계에서 나타나는 비근축 회절효과를 주요면의 만곡이라는 관점에서 해석하고, 배율이 다른 무수차 원추곡면경의 결상에서 비근축회절효과에 의한 MTF의 변화를 살펴보았다.

• 대한원격탐사학회:학술대회논문집
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• 대한원격탐사학회 1998년도 Proceedings of International Symposium on Remote Sensing
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• pp.262-267
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• 1998

In Synthetic Aperture Radar(SAR) imaging, the echoed data are collected by moving radar's position with respect to the target area, and this operation actually gives effect of synthesizing aperture size, which in turn gives better cross range resolution of reconstructed target scene. Among several inversion scheme for SAR Imaging, we uses an inversion scheme which uses no approximation in wave propagation analysis, and try to verify whether the collected data with synthesized aperture actually gives the same support as that with physical aperture in the same size. To do this, we make a signal subspace comparison of two imaging models with physical and synthesized arrays, respectively. Theoretical comparison and numerical analysis using Gram-Schmidt procedures had been performed. The results showed that the synthesized array data fully span the physical array data with the same system geometry and strongly support the proposed inversion scheme valuable in high resolution radar imaging.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 추계학술대회 논문집
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• pp.178-178
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• 2009

High-density optical information storing equipment, which is using Blu-ray, is the next generation information storing equipment that has about form six times to thirty-five times capacities. and high-density optical information storing equipment uses high NA(Numerical Aperture) aspheric glass objective lens as optical pick-up equipment to record and recognize high-density date. Generally this objective lens is developed and produced through a way of GMP(Glass Molding Press) that uses molding core that is performde by Ultra precision grinding, but grinding performing that has high-accuracy is very difficult because objective lens form is high NA. In this research, we preformed Ultra precision turning, using single crystal diamond bite, about WC(Co 0.5%), sintering brittleness material that is used molding core's material for GMP. and we confirmed aspheric glass lens compression of deformities molding core's Ultra precision turning possibility by measuring surface roughness(Ra) and processing surface's condition.

• 한국광학회지
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• 제30권3호
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• pp.94-100
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• 2019

본 연구에서는 광 지연선로를 이용한 스퀸팅(squinting)이 없는 위상배열 안테나의 근접장 미세파장 포커싱(subwavelength focusing)을 디자인하고 전산모사를 통해 검증하였다. 마이크로파 파장에서 위상배열 안테나의 수치적 계산을 위해 호이겐스-프레넬(Huygens-Fresnel) 원리를 적용하였다. 제안하는 시스템은 첩 광섬유 격자(chirped fiber grating)에 기반한 광 지연선로를 이용하여 빔 스퀸팅이 생기지 않는다는 것을 전산모사를 통해 확인하였다. 그리고 개별 안테나의 배열은 광학렌즈시스템에서 회절 소자로 간주할 수 있음에 착안해 높은 개구율(numerical aperture)을 구현하고 미세파장 포커싱을 얻었다. 또한, 위상배열 안테나의 안테나 사이 거리를 반파장 이하로 줄여 사이드 로브를 억제할 수 있음을 보였다.

• 정보저장시스템학회논문집
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• 제1권1호
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• pp.78-83
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• 2005

The Blu-ray disc as a next generation high density optical medium uses an objective lens of high numerical aperture(NA 0.85) and blue laser in order to increase the recording density. The double layer is also useful for doubling the density. The spherical aberration of Blu-ray disc is very sensitive to the thickness of the disk because of high numerical aperture. This paper suggests a method to compensate the spherical aberration caused by the change of disk thickness, by using the Liquid Crystal lens instead of the Liquid Crystal panel. It was possible to develop both the LC panel generating the optical phase difference and LC lens changing the optical power. In this paper, we analyzed the aberration performance and a position sensitivity of the two type LC elements when the samples deviate from the optical axis of the objective lens. The results of applying this analysis show that the LC lenses rather than the LC panels have a significant assembling tolerance. The theoretical characteristics of the two elements are calculated and compared with the measurement data.

• Journal of the Optical Society of Korea
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• 제18권5호
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• pp.531-537
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• 2014

Through-silicon vias (TSVs) are fine, deep holes fabricated for connecting vertically stacked wafers during three-dimensional packaging of semiconductors. Measurement of the TSV geometry is very important because TSVs that are not manufactured as designed can cause many problems, and measuring the critical dimension (CD) of TSVs becomes more and more important, along with depth measurement. Applying white-light scanning interferometry to TSV measurement, especially the bottom CD measurement, is difficult due to the attenuation of light around the edge of the bottom of the hole when using a low numerical aperture. In this paper we propose and demonstrate four bottom CD measurement methods for TSVs: the cross section method, profile analysis method, tomographic image analysis method, and the two-dimensional Gaussian fitting method. To verify and demonstrate these methods, a practical TSV sample with a high aspect ratio of 11.2 is prepared and tested. The results from the proposed measurement methods using white-light scanning interferometry are compared to results from scanning electron microscope (SEM) measurements. The accuracy is highest for the cross section method, with an error of 3.5%, while a relative repeatability of 3.2% is achieved by the two-dimensional Gaussian fitting method.

• 전자공학회논문지D
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• 제36D권4호
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• pp.34-41
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• 1999

Synthetic Aperture Radar 시스템은 레이더 또는 목적물을 일정거리 또는 시간 간격동안 움직여가면서 반사되는 신호를 측정하여 동시에 처리해 줌으로써 안테나 크기를 크게 하는 효과를 가지게 되므로 목적물의 형체를 파악하는 Imaging 시스템의 일종이다. Imaging의 성패는 어떤 Modeling 과 Inversion 과정을 거치느냐에 달려 있는데 본 논문에서는 가장 Approximation이 적은 Wavefront reconstruction 기법을 적용하여 SAR 모델에서 획득한 데이터와 같은 크기의 실제 안테나가 있다고 가정하였을 때의 데이터와 이론적이고 실험적인 Signal Subspace 비교를 수행하였다. 이 연구를 통해 새로운 기법인 Wavefront reconstruction 알고리즘을 충분히 뒷받침해 줄 수 있는 결과를 얻을 수 있다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.290-290
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• 2009

Blu-ray Disk, the next generation optical information storing equipment used Blu-ray is the next generation leading storing equipment that has capacity is about from six times to thirty-five times bigger than the existing CDs, DVDs. Especially, we need elaborate optical pick-Up equipment to record and recognize detailed date. Moreover, Blu-ray disk has so narrow track-pitch so it is used high NA(Numerical Aperture) aspheric glass objective lens. In this research, we processed optical pick-up aspheric glass objective lens molding press core by parallel grinding method with ultra precision machining and mold core surface measured form accuracy(PV), surface roughness(Ra).