• Transactions of the Korean Society of Mechanical Engineers A
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• v.30 no.10 s.253
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• pp.1314-1319
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• 2006

This paper describes the novel fabrication method of the high-aspect-ratio nano structure which is impossible by conventional method using a shadow mask and a Deep X-ray Lithography (DXRL). The shadow mask with $1{\mu}m-sized$ apertures is fabricated on the silicon membrane using a conventional UV-lithography. The size of aperture is reduced to 200nm by accumulated low stress silicon nitride using a LPCVD (low pressure chemical vapor deposition) process. The X-ray mask is fabricated by depositing absorber layer (Au, $3{\mu}m$) on the back side of nano shadow mask. The thickness of an absorber layer must deposit dozens micrometers to obtain contrast more than 100 for a conventional DXRL process. The thickness of $3{\mu}m-absorber$ layer can get sufficient contrast using a central beam stop method, blocking high energy X-rays. The nano circle and nano line, 200nm in diameter in width, respectively, were demonstrated 700nm in height with a negative photoresist of SU-8.

• Journal of the Korean Society of Radiology
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• v.9 no.5
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• pp.301-306
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• 2015

X-ray can be applied to obtain a projection image of an object. It is not easy to obtain an high quality image for the object composed of low and high density materials. For the object with large difference in density, it is possible to realize high contrast image using images of low and high tube voltages and image processing. The plastic and metalic parts of the electronic components can be imaged by the dual energy technique which use low and high tube voltages and by processing pixel-by-pixel using visual C++. The contrast-enhanced image can be used to detect and observe defects within the electronic components.

• Journal of the Korean Society of Safety
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• v.32 no.2
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• pp.34-37
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• 2017

In recent emerging industry, Display field becomes bigger and bigger, and also semiconductor technology becomes high density integration. In Flat Panel Display, there is an issue that electrostatic phenomenon results in fine dust adsorption as electrostatic capacity increases due to bigger size. Destruction of high integrated circuit and pattern deterioration occur in semiconductor and this causes the problem of weakening of thermal resistance. In order to solve this sort of electrostatic failure in this process, Soft X-ray ionizer is mainly used. Soft X-ray Ionizer does not only generate electrical noise and minute particle but also is efficient to remove electrostatic as it has a wide range of ionization. X-ray Generating efficiency has an effect on soft X-ray Ionizer affects neutralizing performance. There exist variable factors such as type of anode, thickness, tube voltage etc., and it takes a lot of time and financial resource to find optimal performance by manufacturing with actual X-ray tube source. MCNPX (Monte Carlo N-Particle Extended) is used for simulation to solve this kind of problem, and optimum efficiency of X-ray generation is anticipated. In this study, X-ray generation efficiency was measured according to target material thickness using MCNPX under the conditions that tube voltage is 5 keV, 10 keV, 15 keV and the target Material is Tungsten(W), Gold(Au), Silver(Ag). At the result, Gold(Au) shows optimum efficiency. In Tube voltage 5 keV, optimal target thickness is $0.05{\mu}m$ and Largest energy of Light flux appears $2.22{\times}10^8$ x-ray flux. In Tube voltage 10 keV, optimal target Thickness is $0.18{\mu}m$ and Largest energy of Light flux appears $1.97{\times}10^9$ x-ray flux. In Tube voltage 15 keV, optimal target Thickness is $0.29{\mu}m$ and Largest energy of Light flux appears $4.59{\times}10^9$ x-ray flux.

• Journal of Radiation Protection and Research
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• v.46 no.4
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• pp.160-169
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• 2021

Background: Dual-energy X-ray images (DEI) can distinguish or improve materials of interest in a two-dimensional radiographic image, by combining two images obtained from separate low and high energies. The concepts of DEI performance describing the performance of double-exposure DEI systems in the Fourier domain been previously introduced, however, the performance of double-exposure DEI itself in terms of various parameters, has not been reported. Materials and Methods: To investigate the DEI performance, signal-difference-to-noise ratio, modulation transfer function, noise power spectrum, and noise equivalent quanta were used. Low- and high-energy were 60 and 130 kVp with 0.01-0.09 mGy, respectively. The energy-separation filter material and its thicknesses were tin (Sn) and 0.0-1.0 mm, respectively. Noise-reduction (NR) filtering used the Gaussian-filter NR, median-filter NR, and anti-correlated NR. Results and Discussion: DEI performance was affected by Sn-filter thickness, weighting factor, and dose allocation. All NR filtering successfully reduced noise, when compared with the dual-energy (DE) images without any NR filtering. Conclusion: The results indicated the significance of investigating, and evaluating suitable DEI performance, for DE images in chest radiography applications. Additionally, all the NR filtering methods were effective at reducing noise in the resultant DE images.

• Journal of Radiation Industry
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• v.9 no.3
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• pp.137-141
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• 2015

A single-shot dual-energy x-ray imaging technique has been developed using a sandwich detector by stacking two detectors, in which the front and rear detectors respectively produce relatively lower and higher x-ray energy images. Each detector layer is composed of a phosphor screen coupled with a photodiode array. The front detector layer employs a thinner phosphor screen, whereas the rear detector layer employs a thicker phosphor screen considering the quantum efficiency for x-ray photons with higher energies. We have applied the proposed method into the inspection of printed circuit boards, and obtained dual-energy images with background clutter suppressed. In addition, the single-shot dual-energy method provides sharper-edge images than the conventional radiography because of the unsharp masking effect resulting from the use of different thickness phosphors between the two detector layers. It is promising to use the single-shot dual-energy x-ray imaging for high-resolution nondestructive testing. For the reliable use of the developed method, however, more quantitative analysis is further required in comparisons with the conventional method for various types of printed circuit boards.

• The Journal of the Petrological Society of Korea
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• v.6 no.2
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• pp.88-95
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• 1997

High pressure X-ray diffraction study was carried out on a polycrystalline graphite to investigate the phase transition(s) at room temperature. Energy dispersive X-ray diffraction method was employed using a Mao-Bell type diamond anvil cell with an Wiggler synchrotron Radiation at the National Synchrotron Light Source. Sodium chloride power was used as the internal pressure sensor for the high pressure determinations as well as the pressure medium for quasihydrostatic pressure environment. Graphite transforms into a hexagonal didose not agree with the previously reported observations and this phase persists when pressure is released down to 0.1 MPa. This result dose not agree with the previously reported observations and this discrepancy would be due to the kinetics in phase transition as well as the uniaxially oriented pressure field in the diamond anvil cell.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.24 no.12
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• pp.1711-1717
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• 2020

X-ray of up to 9MeV are used for container inspection. X-ray intensity must be maintained stably regardless of changes in time. If dose is not constant, it may affect the image quality, and as a result, may affect the inspection of abnormal cargo. Therefore, to acquire high-quality images, continuous dose monitoring is required. In this study, the ion-chamber based device was developed for monitoring the dose change in high-energy x-ray. And to estimate the performance of signal-processing device change according to the environmental change, the output changing due to the change of temperature and humidity was observed. In addition, verification of the device was performed by measuring the output change. As a result of the measurement, there was no significant difference in performance due to changes in temperature and humidity, and the change in output according to the change in exposure was linear. Therefore, it was found that the developed device is suitable for the dose monitoring of high-energy x-ray.

• Progress in Superconductivity
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• v.14 no.2
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• pp.99-101
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• 2012

Fluorescent yield X-ray absorption fine structure (XAFS) spectroscopy is useful for analyzing local structure of specific elements in matrices. We developed an XAFS apparatus with a 100-pixel superconducting tunnel junction (STJ) detector array with a high sensitivity and a high resolution for light-element dopants in wide-gap semiconductors. An STJ detector has a pixel size of $100{\mu}m$ square, and an asymmetric layer structure of Nb(300 nm)-Al(70 nm)/AlOx/Al(70 nm)-Nb(50 nm). The 100-pixel STJ array has an effective area of $1mm^2$. The XAFS apparatus with the STJ array detector was installed in BL-11A of High Energy Accelerator Research Organization, Photon Factory (KEK PF). Fluorescent X-ray spectrum for boron nitride showed that the average energy resolution of the 100-pixels is 12 eV in full width half maximum for the N-K line, and The C-K and N-K lines are separated without peak tail overlap. We analyzed the N dopant atoms implanted into 4H-SiC substrates at a dose of 300 ppm in a 200 nm-thick surface layer. From a comparison between measured X-ray Absorption Near Edge Structure (XANES) spectra and ab initio FEFF calculations, it has been revealed that the N atoms substitute for the C site of the SiC lattice.

• Journal of radiological science and technology
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• v.30 no.3
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• pp.245-250
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• 2007

This research measured the shielding rates of apron 0.25 and 0.5 mmPb for X-ray energy in diagnosis radiation system and gamma-ray energy of $^{99m}Tc$-MDP and $^{18}F$-FDG. X-ray energies were measured on effective energy of $26.2{\sim}45.6\;keV$ when additional filtering plate of 0, 2 mmAl is used within the range of tube voltage $40{\sim}120\;kVp$, and at this time, apron 0.5 mmPb has shown about 5.5% of increase in its shielding rate over 0.25 mmPb at the highest quality. Besides, the aprons of the two types have shown high shielding rate of over 90% for direct X-ray and spatial dose rate. And, in case 0.25 and 0.5 mmPb aprons were used at 140keV of $^{99m}Tc$-MDP, the shielding effects were between 30 and 53%, and at high energy of 511 keV, $^{18}F$-FDG, the shielding effects of apron, $1.3{\sim}3.6%$, were very small.

• The Bulletin of The Korean Astronomical Society
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• v.38 no.1
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• pp.65.1-65.1
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• 2013

The 2011 August 09 Flare is one of the largest X-ray flares of Sunspot Cycle 24 to attract a lot of attention for its various activities detected in coronal images. In this study we concern ourselves mostly on information of high energy electrons produced during this flare provided by hard X ray data from the Reuven Ramaty High-Energy Solar Spectroscopic Imager (RHESSI) and radio data from the Korean Solar Radio Burst Locator (KSRBL) and Ondrejov. EUV images obtained by the Atmospheric Imaging Assembly (AIA) on board the Solar Dynamic Observatory are used to provide the context of magnetic reconnection. In our results, (1) HXR spectra have a rich spectral morphology. Initially it could be fit by one thermal component (T~30MK) and one single power law nonthermal spectrum, but later a better fit could be made by introducing an additional thermal component (T~55 MK). (2) Time delays between the KSRBL burst and the RHESSI hard X-ray emission were found which are more obvious at low frequencies and insignificant at high frequencies. (3) The HXR source lies in the core of the quadrupolar active region. In our interpretation based on AIA 94 A images, the outer part of the active region erupted to be blown out, leaving the intense hard X-ray emission concentrated in the core. We relate the appearance of the second thermal component to the evolution of the AIA 171 and 94 A images. The time delays of microwave peaks to HXR peaks are interpreted as indicating presence of trapped electrons in larger closed magnetic loops. With these result we conclude that the hard X ray and microwaves are due to impulsive acceleration in the low and high heights and a sigmoidal reconnection scenario.