• Proceedings of the KIEE Conference
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• 1996.07c
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• pp.1738-1740
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• 1996

Laser Doppler Vibrometer using heterodyne method with a 632.8 nm He-Ne laser, has been developed for the measurement of small displacement and velocity. The measurement uses heterodyne method can be made insensitive to undesired vibration effect acting the system and can yield the sign of Doppler shift at the expense of increased complexity. A Bragg cell gives a frequency shift of 40MHz for heterodyne method. Frequency Modulated output is detected by spectrum analyzer.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.203-206
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• 2002

One of the ever-increasing demands on the performances of heterodyne interferometers is to improve the measurement resolution, of which current state-of-the-art reaches the region of sub-nanometers. We propose a new scheme of phase-measuring electronics that reduces the measurement resolution without further increase in clock speed. Our scheme adopts a super-heterodyne technique that lowers the original beat frequency to a level of 1 MHz by mixing it with electrically generated reference signal. The technique enables us to measure the phase of Doppler shift with a resolution of 1.58 nanometer at a sampling rate of 1 MHz. To avoid the undesirable decrease in the maximum measurable speed caused by the lowered beat frequency, a special from of frequency up-down counting technique is combined with the super-heterodyning. This alloys performing required phase unwrapping simply by using programmable digital gates without 2$\pi$ ambiguities up to the maximum velocity of 2.35 m/s.

• Proceedings of the Optical Society of Korea Conference
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• 2002.11a
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• pp.204-205
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• 2002

• Korean Journal of Optics and Photonics
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• v.7 no.1
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• pp.37-43
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• 1996

Two type interference air refractometers have been developed by using a frequency stabilized He-Ne laser in a transverse magnetic field. The refractometers were based on symmetric multiple pass interferometer. In this system, One part of the beams passed through air whose refractivity is to be measured and the other part of the beams passed through a vacuum champer to be used as a reference. Several measurements were performed under normal air condition. Maximum difference between two interference refractometers was ${\pm}2{\times}10^{-8}$.

• International Journal of Precision Engineering and Manufacturing
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• v.2 no.4
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• pp.81-88
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• 2001

We present a new digital phase measuring method for heterodyne optical interferometry, which providers high measuring speed up to 6 m/s with a fine displacement resolution of 0.1 nanometer. The key idea is combining two distinctive digital phase measuring techniques with mutually complementary characteristics to earth other one is counting the Doppler shift frequency counting with 20 MHz beat frequency for high-velocity measurement and the other is the synchronous phase demodulation with 2.0 kHz beat frequency for extremely fine displacement resolution. The two techniques are operated in switching mode in accordance wish the object speed in a synchronized way. Experimental results prove that the proposed dual mode phase measuring scheme is realized with a set of relatively simple electronic circuits of beat frequency shifting, heterodyne phase detection. and low-pass filtering.

• Journal of the Korean Society for Precision Engineering
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• v.13 no.6
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• pp.128-135
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• 1996

This paper proposes a high precision measurement technique to obtain the height of gage block with a few millimeter height. The proposed technique is consisted of two steps : In the first step, laser position transducer and electric micrometer are adopted to obtain a coarse value of the height of gage block, and then, in the second step, heterodyne laser interferometry is adopted to acquire the precision value. A new kind of phase detector is constructed in the low cost for the heterodyne interferometer and its linearity with ${\pm}1%$ is confirmed by experiment. Also measurement error factors due to enviroments are discussed and methodology to reduce such errors is proposed. Preliminary experiments are carried out for the gage blocks of as high as a few millimeter.

• Journal of Power System Engineering
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• v.10 no.2
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• pp.99-103
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• 2006

The laser interferometer has been used for measurement of the micro displacement error. Although the laser interferometer is widely accepted as a tool for measurement of motion accuracy, the set-up procedure is time-consuming because of the strict requirement on alignment between a laser head and optic units. This paper addresses the development of a laser interferometer to measure the micro displacement for a micro machine. The portable laser interferometer which integrates a laser probe and optics, is developed for the convenient measurement. For the experiment, moving mirror set up on the micro stage. The velocity decoding board is also added to calculate doppler shift frequency directly. The output signal is obtained and analyzed by LabView. Finally experiments are found out the relation between micro displacement and output signal.

• Korean Journal of Optics and Photonics
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• v.10 no.4
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• pp.283-288
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• 1999

We investigated the characteristics of surface roughness evaluation using phase-measuring interferometer for a few ten $\AA$ and sub $\AA$-rough substrates. The influence of phase averaging and intensity averaging on the roughness measurement by phase measuring interferometer was investigated and the optimal number of phase and intensity averaging for the least measurement error was searched. For a few ten $\AA$-rough sample, roughness value did not depend so much on the data averaging. Whereas, measurement error for sub $\AA$-rough sample was significantly improved as the number of phase and intensity averaging increased. At the phase averaging of 30 and the intensity averaging of 20, roughness value that measurement error was minimized was obtained, and it was in good agreement with that by optical heterodyne interferometer. Roughness measurement at the optimal data averaging showed also good repeatability error less than 0.01$\AA$.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.9
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• pp.172-178
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• 2002

One of the ever-increasing demands on the performances of heterodyne interferometers is to improve the measurement resolution, of which current state -of-the-art reaches the region of sub-nanometers. So far, the demand has been met by increasing the clock speed that drives the electronics involved fur the phase measurement of the Doppler shift, but its further advance is being hampered by the technological limit of modem electronics. To cope with the problem, in this investigation, we propose a new scheme of phase -measuring electronics that reduces the measurement resolution without further increase in clock speed. Our scheme adopts a super-heterodyne technique that lowers the original beat frequency to a level of 1 MHz by mixing it with a stable reference signal generated from a special phase- locked-loop. The technique enables us to measure the phase of Doppler shift with a resolution of 1.58 nanometer at a sampling rate of 1 MHz. To avoid the undesirable decrease in the maximum measurable speed caused by the lowered beat frequency, a special form of frequency up-down counting technique is combined with the super-heterodyning. This allows performing required phase unwrapping simply by using programmable digital gates without 2n ambiguities up to the maximum velocity guaranteed by the original beat frequency.

• International Journal of Precision Engineering and Manufacturing
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• v.8 no.2
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• pp.80-84
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• 2007

We propose a new displacement measurement method using a phase modulation homodyne interferometer and a tunable laser diode as a light source to determine an arbitrary length with a resolution in the order of 10 pm. In the proposed instrument, the displacement of a movable mirror in the interferometer can be converted to a frequency shift of the tunable laser diode. We discuss the principles of the proposed method, the instrumentation, and the experimental results, and compare the proposed method with two commercial displacement sensors. The commercial sensors used are a heterodyne interferometer, the interpolation error of which is also measured, and a capacitive sensor.