Phase Modulation Homodyne Interferometer with a 10-pm Resolution Using a Tunable Laser Diode |
Ishige, Masashi
(Department of Mechanical Engineering, Nagaoka university of technology)
Matsuura, Fumio (Department of Mechanical Engineering, Nagaoka university of technology) Kawasugi, Masaaki (Department of Mechanical Engineering, Nagaoka university of technology) Aketagawa, Masato (Department of Mechanical Engineering, Nagaoka university of technology) |
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