The Fabrication of Micro-heaters with Low Consumption Power Using SOI and Trench Structures and Its Characteristics (SOI와 트랜치 구조를 이용한 초저소비전력형 미세발열체의 제작과 그 특성)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.14 no.3
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- pp.228-233
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- 2001