Preparation and properties of BST (Barium Strontium Titanate) thin films for the capacitor dielectrics of ULSI DRAM's (ULSI DRAM의 capacitor 절연막용 BST(Barium Strontium Titanate)박막의 제작과 특성에 관한 연구)
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- Electrical & Electronic Materials
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- v.9 no.4
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- pp.336-343
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- 1996