• 제목/요약/키워드: HSG method

검색결과 11건 처리시간 0.022초

Seeding Method를 이용한 인이 도우핑된 Amorphous-Si에서의 HSG형성 조건 (Hemispherical Grained Silicon formation Condition on In-Situ Phosphorous Doped Amorphous-Si Using The Seeding Method)

  • 정양희;강성준
    • 한국정보통신학회논문지
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    • 제5권6호
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    • pp.1128-1135
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    • 2001
  • 본 논문에서는 HSG형성을 위한 Si$_2$H$_{6}$의 조사와 어닐링을 통한 seeding method를 64Mbit DRAM에 적용하였다. 이 기술을 사용함으로서 인이 도우핑된 Amorphous 실리콘의 전극에 HSG grain 크기를 조절할 수 있었고, 이 새로운 HSG형성조건은 기존의 stack 캐패시터보다 약 2배의 정전용량을 확보할 수 있었다. 이와같은 방법을 이용한 HSG형성에서 인농도, 저장폴리 증착온도 및 HSG의 두께에 대한 공정 최적 조건으로는 각각 3.0-4.OE19atoms/㎤ , 53$0^{\circ}C$ 및 400$\AA$이었다. 이들 최적화된 공정조건으로 64M bit DRAM 캐패시터에 적용시 질화막의 두께 한계는 65$\AA$으로 확인되었다.

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Hemispherical Grain Silicon에 의한 정전용량 확보 및 공정조건 특성에 관한 연구 (A Study on Capacitance Enhancement by Hemispherical Grain Silicon and Process Condition Properties)

  • 정양희;정재영;이승희;강성준;이보희;유일현;최남섭
    • 한국정보통신학회논문지
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    • 제4권4호
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    • pp.809-815
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    • 2000
  • The box capacitor structure with HSG-Si described here reliably achieves a cell capacitance of 28fF with a cell area of a $0.4820\mum^2$ for 128Mbit DRAM. An HSG-Si formation technology with seeding method, which employs Si2H6 molecule irradiation and annealing, was applied for realizing 64Mbit and larger DRAMS. By using this technique, grain size controlled HSG-Si can be fabricated on in-situ phosphorous doped amorphous silicon electrodes. The HSG-Si fabrication technology achieves twice the storage capacitance with high reliability for the stacked capacitors.The box capacitor structure with HSG-Si described here reliably achieves a cell capacitance of 28fF with a cell area of a $0.4820\mum^2$ for 128Mbit DRAM. An HSG-Si formation technology with seeding method, which employs Si2H6 molecule irradiation and annealing, was applied for realizing 64Mbit and larger DRAMS. By using this technique, grain size controlled HSG-Si can be fabricated on in-situ phosphorous doped amorphous silicon electrodes. The HSG-Si fabrication technology achieves twice the storage capacitance with high reliability for the stacked capacitors.

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A Proposal of Hazard/Risk Assessment Criteria and an Asbestos Management Method for Asbestos-containing Building Materials

  • Park, Wha-Me;Kim, Yoon-Shin
    • 한국환경보건학회지
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    • 제38권1호
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    • pp.66-72
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    • 2012
  • Objectives: The AHERA method by the US EPA, ASTM E2356-04, and HSG264 by the UK HSE, all of which are hazard/risk assessment methods for asbestos-containing building materials, were reviewed and compared based on 231 homogeneous areas. In addition, the current Act on Asbestos Safety Management (enforcement: April 29, 2012) was reviewed and analyzed. This trial provided fundamental data for improving the current asbestos hazard/risk assessment method. Methods: For the hazard/risk assessment of 77 asbestos-containing public buildings including schools, 231 homogeneous areas were selected, each of which was assessed using AHERA, ASTM E2356-04, and HSG264. Results: The matching rate of the hazard/risk assessment stood at 20.4 percent between AHERA and ASTM, at 71.4 percent between AHERA and HSG264 and at 17.8 percent between ASTM and HSG264. The AHERA method includes a seven-category rating scale. There were three categories, two of which have three subcategories. ASTM provides two decision-making charts consisting of ten rating scales for current condition estimation and for potential for disturbance estimation. In addition, the HSG264 method has a total of 20 scores with four items, and then provides four grades. This HSG264 method cannot clearly separate current condition and potential for disturbance. Conclusions: In the Korean Act on Asbestos Safety Management, the hazard/risk assessment method for asbestos-containing building materials should consider balance between current condition estimation and the potential for disturbance estimation.

SCS-CN 산정을 위한 수치세부정밀토양도 활용과 괴산군 소수면 소유역의 물 유출량 평가 (Estimation of SCS Runoff Curve Number and Hydrograph by Using Highly Detailed Soil Map(1:5,000) in a Small Watershed, Sosu-myeon, Goesan-gun)

  • 홍석영;정강호;최철웅;장민원;김이현;손연규;하상건
    • 한국토양비료학회지
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    • 제43권3호
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    • pp.363-373
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    • 2010
  • 수문 수자원 분야에서의 활용도를 제고하기 위하여 HSG 1995와 HSG 2006 두가지 분류법에 의한 우리나라 수문학적 토양유형의 분포에 대한 정보를 제공하고 이를 각각 충북 괴산군 소수면의 소유역의 수치세부정밀토양도 (1:5,000)에 적용하여 SCS-CN법을 이용한 유효 우량 산정과 유출곡선을 작성한 결과는 다음과 같다. 산악지에서 주로 침투능이 크고 하성 또는 해안평탄지로 가면서 낮아지는 경향을 보였다. HSG 1995 토양 유형 중 A군은 전체의 42.2%로 가장 넓게 분포하는 것으로 나타났고, B군 29.4%, C군 18.5%, D군 9.9% 순으로 나타났다. HSG 2006 토양유형은 A군 35.1%, B군 15.7%, C군 5.5%, D군 43.7%로 D군이 가장 넓게 분포하는 특징을 가진다. HSG 1995에서 A, B, C군으로 분류되었다가 HSG 2006에서 D군으로 분류된 토양 유형의 비율이 약 34.1%로 나타나 국립농업과학원에 의해 분류된 토양유형 중 D군의 면적이 크게 늘어난 것을 알 수 있었다. 충북 괴산군 소수면 소유역의 수치세부정밀토양도에 기반한 수문학적 토양유형 분포특성을 나타낸 것으로 산림과 밭으로 이용되는 토양의 유형이 A로 분류되는 것은 일치하는 경향을 보였다. HSG 2006의 토양유형은 유역에서 C 유형이 거의 없거나 적게 분포하고 HSG 1995에 비해 D 유형이 많게 나타난다. 미계측 유역에 대한 직접유출량 산정에 가장 많이 사용되는 SCS-CN법을 이용하여, 충북 괴산군 소수면 소유역에서 직접유출에 기여하는 유효우량을 산정하고 SCS 삼각단위도를 사용하여 첨두유량과 첨두시간을 계산한 결과는 다음과 같다. HSG 1995와 HSG 2006 수문학적 토양유형과 토지 이용별 CN값을 적용하여 유역의 CN값 (AMC II)을 구한 결과는 각각 54와 62로 나타났다. 이 때, 우량계가 설치된 지점의 강우자료를 평균하여 2004년~2005년 강우사상별로 정리하여 초기손실량 (I)이 총강우량 (P)보다 큰 경우를 제외한 강우사상을 선택하였고, 8월 16일에서 강우사상 전까지 내린 강수에 따라 선행수분조건 III으로 조정하여 유효우량 산출을 위한 CN값을 각각 73과 79로 하여 사용하였다. 강우사상에 대한 HSG 2006 기준의 유효우량이 56.67 mm로 HSG 1995 기준의 44.87 mm 보다 약 25% 많게 나타났다. 두 가지 수문학적 토양 유형 분류 기준에 따라 계산된 각 유효 우량에 대하여 수문곡선을 합성하여 실제 관측치와 비교한 결과 두 개 기준 모두 관측치와 유사한 변화 패턴을 보이고 있으나 실측치보다 감수부에서 급격하게 감소되는 특징을 나타냈다. 첨두유량은 HSG 1995 보다는 HSG 2006 기준을 사용할 때 관측치와 더 가까운 값을 나타내었다.

시동 발전기 시스템을 이용한 탑재형 충전기의 설계 및 제어 방법 (Design and Control Method of an On-Board Charger using a Hybrid Starter Generator System in Hybrid Electric Vehicles)

  • 강호성;김석민;임동휘;곽래호;김교민;이교범
    • 전력전자학회:학술대회논문집
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    • 전력전자학회 2018년도 전력전자학술대회
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    • pp.466-467
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    • 2018
  • 본 논문은 시동 발전기(Hybrid Starter Generator, HSG) 시스템을 이용한 탑재형 충전기(On Board Charger, OBC)의 설계 및 제어 방법을 제안한다. 일반적으로 하이브리드 자동차(Hybrid Electric Vehicle, HEV)는 인버터 및 발전기로 구성된 HSG 시스템과 전력변환장치를 이용한 배터리 충전 시스템을 포함한다. 본 논문에서는 HSG 시스템에 추가적인 회로를 이용하여 배터리 충전 기능을 수행할 수 있는 OBC의 설계 및 제어 방법을 제안한다. 결과적으로 전력변환장치의 수를 줄여 차량의 내부 공간을 확보하며, 제조 가격을 감소시킬 수 있다. 시뮬레이션을 통해 제안하는 배터리 충전 시스템의 설계 및 제어 방법의 타당성을 검증한다.

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방사핵을 이용한 난관기능검사 (Radionuclide Tubal Function Test)

  • 노태성;김정구;윤보현;문신용;이진용;장윤석;정준기
    • Clinical and Experimental Reproductive Medicine
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    • 제14권1호
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    • pp.1-6
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    • 1987
  • The Radionuclide test (RN test) using radioactively labelled human albumin microspheres was developed recently to evaluate the patency and functional capacity of the fallopian tubes. 57 infertile women underwent this procedure as a part of their infertility work up. The results of the radionuclide evaluation were compared with those of the hysterosalpingography (HSG) and further the surgical findings of the laparoscopy and laparotomy. In 64.9%(37/57) of the cases, there was complete agreement between radionuclide test (RN test), hysterosalpingography(HSG) and surgical findings. In comparison with surgical findings, RN test showed a complete agreement rate of 89.4%(51/57), a partial agreement rate of 5.3%(3/57) and no agreement rate of 5.3%(3/57), respectively. Likewise, HSG revealed a complete agreement rate of 80.7%(46/57), a partial agreement rate of 10.5%(6/57) and no agreement 8.8%(5/57), respectively. It would appear that as opposed to the traditional HSG, RN test may give a better understanding of the functional capacity of the tube and may prove a useful method before and after tubal surgery.

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Daily influent variation for dynamic modeling of wastewater treatment plants

  • Dzubur, Alma;Serdarevic, Amra
    • Coupled systems mechanics
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    • 제9권2호
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    • pp.111-123
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    • 2020
  • Wastewater treatment plants (WWTPs) with activated sludge system are widely used throughout the most common technologies in the world. Most treatment plants require optimization of certain treatment processes using dynamic modeling. A lot of examples of dynamic simulations require reliable data base of diurnal variation of the inflow and typical concentrations of parameters such as Chemical Oxygen Demand (COD), Total Kjeldahl Nitrogen (TKN), etc. Such detailed data are not available, which leads to problemsin the application of dynamic simulations. In many examples of plants, continuous flow measurements are only performed after the primary clarifier, whereas measurements from influent to the plant are missing, as is the case with the examples in this paper. In some cases, a simpler, faster and cheaper way can be applied to determine influent variations, such as the "HSG-Sim" method ("Hochschulgruppe Simulation"). "Hochschulgruppe Simulation" is a group of researchers from Germany, Austria, Switzerland, Luxembourg, Netherlands and Poland (see http://www.hsgsim.org). This paper presents a model for generating daily variations of inflow and concentration of municipal wastewater quality parameters, applied to several existing WWTPs in Bosnia and Herzegovina (B&H). The main goal of the applied method is to generate realistic influent data of the existing plants in B&H, in terms of flow and quality, without any prior comprehensive survey and measurements at the site. The examples of plants show the influence of overflow facilities on the dynamics of input flow and quality of wastewater, and a strong influence of the problems of the sewerage systems.

HSC-Si형성에 따른 캐패시턴스의 향상 및 인농도 특성에 관한 연구 (A Study on Capacitance Enhancement by Hemispherical Grain Silicion and Phosphorous Concentration Properties)

  • 정양희;정재영;이승희;강성준
    • 한국정보통신학회:학술대회논문집
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    • 한국해양정보통신학회 2000년도 추계종합학술대회
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    • pp.475-479
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    • 2000
  • The box capacitor structure with H5G-Si described here reliably achieves a cell capacitance of 28fF with a cell area of a 0.482f${\mu}{\textrm}{m}$$^2$ for 128Mbit DRAM. An H5G-Si formation technology with seeding method, which employs Si$_2$H$_{6}$ molecule irradiation and annealing, was applied for realizing 64Mbit and larger DRAMS. By using this technique, grain size controlled H5G-Si can be fabricated on in-situ phosphorous doped amorphous silicon electrodes. The HSG-Si fabrication technology achieves twice the storage capacitance with high reliability for the stacked capacitors.s.

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Tape casting 법과 Sandblasting 법을 이용한 광소자용 기판 제조 (1) (Fabration of PLC susbstrate by slurry filling and sandblasting Method)

  • 조윤희;김용석;이용호
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 추계학술대회 논문집 Vol.14 No.1
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    • pp.341-345
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    • 2001
  • In this study, nano-sized powders of $Si0_2-0^{\sim}15mol%B_2O_3$ composition were prepared by sol-gel processing method using TEOS(Tetra ethyl ortho silicate) and $H_3BO_3$ solution. The powders were tape-cast on High silicate glass sheet(HSG) substrate and sintered to form a layer of undercladding for the planar light wave module, During the sol-gel processing, $H_2O/Si$ mole ratio were varied to modify the size of the powders in a range from 600 to 75nm. The dispersion of the powder was modified by changing the pH of the slurry. Sintering temperature of the tape was observed to decrease with the size of the powder and the $B_2O_3$ content in the powder. When the silica powders of 75-125nm in diameter containing 15mol% $B_2O_3$ were used, 98 TD% was obtained at $1250^{\circ}C$, which is approximately $300^{\circ}C$ reduction in sintering temperature compared with micrometer-sized powders.

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Tape casting법과 Sandblasting법을 이용한 광소자용 기판 제조 (1) (Fabration of PLC susbstrate by slurry filling and sandblasting Method)

  • 조윤희;김응석;이용호
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 추계학술대회 논문집
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    • pp.341-345
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    • 2001
  • In this study, nano-sized powders of SiO$_2$-0∼15mo1%B$_2$O$_3$ composition were prepared by sol-gel processing method using TEOS(Tetra ethyl ortho silicate) and H$_3$BO$_3$ solution. The powders were tape-cast on High silicate glass sheet(HSG) substrate and sintered to form a layer of undercladding for the planar light wave module. During the sol-gel processing, H$_2$O/Si mole ratio were varied to modify the size of the powders in a range from 600 to 75nm. The dispersion of the powder was modified by changing the pH of the slurry. Sintering temperature of the tape was observed to decrease with the size of the powder and the B$_2$O$_3$ content in the powder. When the silica powders of 75∼125nm in diameter containing 15mo1% B$_2$O$_3$ were used, 98 TD% was obtained at 1250$^{\circ}C$, which is approximately 300$^{\circ}C$ reduction in sintering temperature compared with micrometer-sized powders.

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