A Study on the Growth Rate and Surface Shape of Single Crystalline Diamond According to HFCVD Deposition Temperature (HFCVD 증착 온도 변화에 따른 단결정 다이아몬드 표면 형상 및 성장률 변화)
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- Journal of the Korean Society for Heat Treatment
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- v.34 no.5
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- pp.239-244
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- 2021