• Journal of IKEEE
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• v.23 no.2
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• pp.594-598
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• 2019

We demonstrate an alternative alignment process using transferring process on solution driven HfZnO film. Parallel pattern is firstly fabricated on a silicon wafer by laser interference lithography. Prepared HfZnO solution fabricated by sol-gel process is spin-coated on a glass substrate. The silicon wafer with parallel pattern is placed on the HfZnO film and annealed at $100^{\circ}C$ for 30 min. After transferring process, parallel grooves on the HfZnO film is obtained which is confirmed by atomic force microscopy and scanning electron microscopy. Uniform liquid crystal alignment is achieved which is attributed to an anisotropic characteristic of HfZnO film by parallel grooves. The liquid crystal cell exhibited a pretilt angle of $0.25^{\circ}$ which showed a homogeneous alignment property.

• The Journal of Internal Korean Medicine
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• v.25 no.4
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• pp.25-33
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• 2004

Objective : The effects of Indium-Gallium-Aluminium-Phosphide(InGaAlP) laser transcutaneous irradiation on heart rate variability(HRV) in healthy adults are investigated with power spectrum analysis(PSA) of HRV. Methods : The control group consisted of 20 healthy volunteers (10 men, 10 women). The experiment was divided into 5 different periods, the pre-1st laser period(10 minutes), the 1st laser period(30 minutes), the post-1st laser period(5 minutes), the 2nd laser period( 30 minutes) and the post-2nd laser period(30 minutes). HRV was measured for 5 minutes at the pre-1 st laser period, the post-l st laser period and the post-2nd laser period. The laser period is the period in which InGaAlP laser transcutaneous Irradiation treatment occurs. Results : 1. SDNN of volunteers at post-1st laser period and post-2nd laser period significantly increased compared with that of the pre- 1 st laser period. 2, Ln(VLF) at post-I st laser period significantly increased compared with that of pre-1st laser period, while Ln(HF) at post-2nd laser period significantly decreased compared with those of pre- I st laser period and post-1st laser period, 3. Ln(TP) at post-1st laser period and post-2nd laser period significantly increased compared with that of pre-1st laser period, 4, LF/HF Ratio at post-2nd laser period significantly increased compared with those of pre-1st laser period and post-1st laser period. But the other variables did not significantly change. Conclusions : The results suggest that InGaAlp laser transcutaneous Irradiation in healthy adults is associated with the autonomic nervous systems. Further study is needed for investigating the effects of laser irradiation on autonomic nervous systems.

• Korean Journal of Materials Research
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• v.5 no.4
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• pp.397-404
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• 1995

반도체 세정공정에서 염기성 세정액(SCI, Standard cleaning 1, $NH_{4}$OH + $H_{2}$O_{2}$ + $H_{2}$O)은 공정상 발생되는 여러 오염물 중 파티클의 제거를 위해 널리 사용되고 있는데, SCI 조성중 $NH_{4}$OH양에 따라 세정 중 실리콘의 식각속도를 증가시킨다. 이 연구에서는 SCI 세정이 CZ(Czochralski)와 에피 실리콘 기판 표면에 미치는 영향을 단순세정과 연속적인 산화-HF 식각-SCI 세정공정을 통해 관찰되었다. CZ와 에피 기판을 8$0^{\circ}C$의 1 : 2 : 10과 1 : 1 : 5 SCI 용액에서 60분까지 단순 세정을 했을 때 laser particle scanner와 KLA사의 웨이퍼 검색장치로 측정된 결함의 수는 세정시간에 따라 변화를 보이지 않았다. 그러나 CZ와 에피 기판을 10분간 SCI 세정후 90$0^{\circ}C$에서 산화 HF식각공정을 4번까지 반복하였을 때 에피 기판 표면의 결함수는 감소하는 반면에 CZ기판에서는 직선적으로 증가하였다. 반복적인 산화-HF 식각-XCI 세정공정을 통해 생성된 CZ기판 표면의 결함은 크기가 0.7$\mu$m 이하의 pit과 같은 형상을 보여주었다. 이들 결함은 열처리 중 CZ 기판내와 표면에 산화 석출물들이 형성, 반복적인 HF 식각-SCI 세정공정을 통해 다른 부위에 비해 식각이 빨리 일어나 표면에 생성되는 것으로 여기어 진다.

• Korean Journal of Optics and Photonics
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• v.2 no.4
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• pp.227-232
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• 1991

The possibility for the high intensity and energy possessing a short pulse in the HF chemical laser system which contained fluoride molecules (RF) was demonstrated theoretically through the numerical model simulation. The calculation was accomplished by assuming that the thermal branched chain mechanism of RF was occurred in the initiation step of $H_2+F_2$ chain reaction. Variations of the major chemicals and the temperature in the system were calculated as a function of time. An analysis was also performed to evaluate output pulse profile through parametric studies.

• Journal of the Korean Vacuum Society
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• v.9 no.3
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• pp.249-253
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• 2000

We have analyzed electrical characteristics of the amorphous $MgTiO_3$thin films deposited by pulsed laser deposition (PLD) technique with the temperature of 400~$500^{\circ}C$. The electrical characteristics of $MgTiO_3$films heavily depend on the deposition temperature. We speculate that the density of anomalous positive charge (APC) substantially increases as the deposition temperature lowers, causing the HF C-V curves shift to the direction of the negative gate voltage. We further observed that both the degree of C-V shift as a function of the deposition temperature and the density of APC were minimized by the use of $SiO_2$with thickness of approximately 100 $\AA$ between $MgTiO_3$films and the Si substrate.

• The Journal of the Korea institute of electronic communication sciences
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• v.14 no.5
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• pp.871-876
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• 2019

We fabricated concave optical fiber tips using hydrofluoric acid solution and photothermal effect induced by $1.55{\mu}m$ wavelength laser applied to an optical fiber. The radius of curvature of the concave optical fiber tips fabricated with different applied laser power, etching time, and concentration of hydrofluoric acid was measured with an optical microscope. Then, we analyzed how the radius of curvature changes for those three variables. In addition, the reliability of the measurement method using a microscope was verified through a free spectral range(FSR) and a scanning electron microscope(SEM). Through this paper, the radius of curvature can be adjusted by the variables of the fabrication process of concave optical fiber tips; thus, it is overcoming the limitations of conventional optical fiber etching methods using hydrofluoric acid solutions.

• The Journal of Advanced Prosthodontics
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• v.12 no.4
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• pp.189-196
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• 2020

PURPOSE. The aim of the present study was to investigate the effects of surface treatments on the bond strengths between polymer-containing restorative materials and two dual-cure resin cements. MATERIALS AND METHODS. In the present study, rectangular samples prepared from Lava Ultimate (LU) and Vita Enamic (VE) blocks were used. The specimen surfaces were treated using CoJet sandblasting, 50 ㎛ Al₂O₃ sandblasting, % 9 HF (hydrofluoric) acid, ER,Cr:YSGG laser treatment, and Z-Prime. Dual-cure resin cements (TheraCem and 3M RelyX U 200) were applied on each specimen's treated surface. A micro-tensile device was used to evaluate shear bond strength. Statistical analysis was performed using the SAS 9.4v3. RESULTS. While the bond strength using TheraCem with LU or VE was not statistically significant (P=.164), the bond strength using U200 with VE was statistically significant (P=.006). In the TheraCem applied VE groups, Z-Prime and HF acid were statistically different from CoJet, Laser, and Sandblast groups. In comparison of TheraCem used LU group, there was a statistically significant difference between HF acid and other surface treatments. CONCLUSION. The bonding performance between the restorative materials and cements were material type-dependent and surface treatment had a large effect on the bond strength. Within the limitations of the study, the use of both U200 and TheraCem may be suggested if Z-prime was applied to intaglio surfaces of VE. The cementation of LU using TheraCem is suitable after HF acid conditioning of the restoration surfaces.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.06a
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• pp.19-19
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• 2007

Excimer laser annealing (ELA) 방법을 이용하여 결정화하고 게이트 절연체로써 high-k 물질을 가지는 다결정 실리콘박막 트랜지스터의 전기적 특성을 평가하였다. 다결정 실리콘 박막 트랜지스터는 비결정질 실리콘 박막 트랜지스터 보다 높은 전계 효과 이동도와 운전 용이한 장점을 가진다. 기존의 결정화 방법으로는 다결정 실리콘 박막 트랜지스터의 높은 열 공급을 피할 수 없기 때문에, 매몰 산화막 위의 비결정질 박막은 저온에서 다결정 실리콘 결정화를 위해 KrF excimer laser (248nm)를 이용하여 가열 냉각 공정을 했다. 게다가 케이트 절연체로써 atomic layer deposition (ALD) 방법에 의해 저온에서 20 nm의 고 유전율을 가지는 $HfO_2$ 박막을 증착하였다. 알루미늄은 n-MOS 박막 트랜지스터의 게이트 전극으로 사용되었다. 금속 케이트 전극을 사용하여 게이트 공핍 효과와 관계되는 케이트 절연막 두께의 증가를 예방할 수 있고, 게이트 저항의 감소에 의해 소자 속도를 증가 시킬 수 있다. 추가적으로, 비결정질 실리콘 박막의 결정화 기술로써 사용된 ELA 방법은 SPC (solid phase crystallization) 방법과 SLS (sequential lateral solidification) 방법에 의해 비교되었다. 결과적으로, ELA 방법에 의해 결정화된 다결정 실리콘 박막의 결정도와 표면 거칠기는 SPC와 SLS 방법에 비해 개선되었다. 또한, 우리는 ELA 결정화 방법에 의한 다결정 실리콘 박막 트랜지스터로부터 우수한 소자 특성을 얻었다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.331-331
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• 2009

Hafnium oxide ($HfO_2$) attracted by one of the potential candidates for the replacement of si-based oxides. For applications of the high-k gate dielectric material, high thermodynamic stability and low interface-trap density are required. Furthermore, the amorphous film structure would be more effective to reduce the leakage current. To search the gate oxide materials, metal-insulator-metal (MIM) capacitors was fabricated by pulsed laser deposition (PLD) on indium tin oxide (ITO) coated glass with different oxygen pressures (30 and 50 mTorr) at room temperature, and they were deposited by Au/Ti metal as the top electrode patterned by conventional photolithography with an area of $3.14\times10^{-4}\;cm^2$. The results of XRD patterns indicate that all films have amorphous phase. Field emission scanning electron microscopy (FE-SEM) images show that the thickness of the $HfO_2$ films is typical 50 nm, and the grain size of the $HfO_2$ films increases as the oxygen pressure increases. The capacitance and leakage current of films were measured by a Agilent 4284A LCR meter and Keithley 4200 semiconductor parameter analyzer, respectively. Capacitance-voltage characteristics show that the capacitance at 1 MHz are 150 and 58 nF, and leakage current density of films indicate $7.8\times10^{-4}$ and $1.6\times10^{-3}\;A/cm^2$ grown at 30 and 50 mTorr, respectively. The optical properties of the $HfO_2$ films were demonstrated by UV-VIS spectrophotometer (Scinco, S-3100) having the wavelength from 190 to 900 nm. Because films show high transmittance (around 85 %), they are suitable as transparent devices.

• The Journal of Advanced Prosthodontics
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• v.6 no.1
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• pp.8-13
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• 2014

PURPOSE. The purpose of this study was to evaluate whether surface treatments affect the translucency of laminate veneers with different shades and thicknesses. MATERIALS AND METHODS. A total of 224 disc-shaped ceramic veneers were prepared from A1, A3, HT (High Translucent) and HO (High Opaque) shades of IPS e.max Press (Ivoclar Vivadent) with 0.5 mm and 1.0 mm thicknesses. The ceramics were divided into four groups for surface treatments. Group C: no surface treatments; Group HF: etched with hydrofluoric acid; Group SB: sandblasted with 50-${\mu}m$ $Al_2O_3$; and Group L; irradiated with an Er;YAG laser. A translucent shade of resin cement (Rely X Veneer, 3M ESPE) was chosen for cementation. The color values of the veneers were measured with a colorimeter and translucency parameter (TP) values were calculated. A three-way ANOVA with interactions for TP values was performed and Bonferroni tests were used when appropriate (${\alpha}=0.05$). RESULTS. There were significant interactions between the surface treatments, ceramic shades and thicknesses (P=.001). For the 0.5-mm-thick specimens there were significant differences after the SB and L treatments. There was no significant difference between the HF and C treatments for any shades or thicknesses (P>.05). For the 1-mm-thick ceramics, there was only a significant difference between the L and C treatments for the HT shade ceramics (P=.01). There were also significant differences between the SB and C treatments except not for the HO shades (P=.768). CONCLUSION. The SB and L treatments caused laminate veneers to become more opaque; however, HF treatment did not affect the TP values. When the laminate veneers were thinner, both the shade of the ceramic and the SB and laser treatments had a greater effect on the TP values.