• Proceedings of the KIEE Conference
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• 2004.11c
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• pp.544-546
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• 2004

This paper designs and evaluates a complementary filter for fusion of inertial sensor signals. Specifically, the designed filter is applied to inverted pendulum control where the pendulum's angle information is obtained from low-cost tilt and gyroscope sensors instead of an optical encoder. The complementary filter under consideration is a conventional one which consists of low- and high-pass filters. However, to improve the performance of the filter on the gyroscope, we use an integrator in the filter's outer loop. Frequency responses are obtained with both tilt and gyroscope sensors. Based on the frequency response results, we determine appropriate parameter values for the filter. The performance of the designed complementary filter is evaluated by applying the filter to inverted pendulum control. Experiments show that the performance of the designed filter is comparable to that of an optical encoder and low-cost inertial sensors can be used for inverted pendulum control with the heir of sensor fusion.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.28 no.9
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• pp.1297-1305
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• 2004

Reliability of MEMS devices is receiving more attention as they are heading towards commercial production. In particular are the reliability and long-term stability of wafer level vacuum packaged MEMS gyroscope sensors subjected to cyclic mechanical stresses at high frequencies. In this study, we carried out several reliability tests such as environmental storage, fatigue, shock, and vibration, and we investigated the failure mechanisms of the anodically bonded vacuum gyroscope sensors. It was found that successful vacuum packaging could be achieved through reducing outgassing inside the cavity by deposition of titanium as well as by pre-taking process. The current gyroscope structure is found to be safe from fatigue failure for 1000 hours of operation test. The gyroscope sensor survives the drop and vibration tests without any damage, indicating robustness of the sensor. The reliability test results presented in this study demonstrate that MEMS gyroscope sensor is very close to commercialization.

• Physical Therapy Rehabilitation Science
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• v.11 no.3
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• pp.311-320
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• 2022

Objective: To investigate the reliability and validity of static balance measurements using an acceleration sensor and a gyroscope sensor in smart phone inertial sensors. Design: Equivalent control group pretest-posttest. Methods: Subjects were forty five healthy adults aged twenty to fifty-years-old who had no disease that could affect the experiment. After pre-test, all participants wore a waist band with smart phone, and conducted six static balance measurements on the force plate twice for 35 seconds each. To investigate the test-retest reliability of both smart phone inertial sensors, we compared the intra-correlation coefficient (ICC 3, 1) between primary and secondary measurements with the calculated root mean scale-total data. To determine the validity of the two sensors, it was measured simultaneously with force plate, and the comparision was done by Pearson's correlation. Results: The test-retest reliability showed excellent correlation for acceleration sensor, and it also showed excellent to good correlation for gyroscope sensor(p<0.05). The concurrent validity of smartphone inertial sensors showed a mostly poor to fair correlation for tandem-stance and one-leg-stance (p<0.05) and unacceptable correlation for the other postures (p>0.05). The gyroscope sensor showed a fair correlation for most of the RMS-Total data, and the other data also showed poor to fair correlation (p<0.05). Conclusions: The result indicates that both acceleration sensor and gyroscope sensor has good reliability, and that compared to force plate, acceleration sensor has unacceptable or poor correlation, and gyroscope sensor has mostly fair correlation.

• 제어로봇시스템학회:학술대회논문집
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• 2004.08a
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• pp.592-595
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• 2004

This paper presents a study on the development of a multi-sensing inertial sensor with a single mechanical structure, which can be used both as a gyroscope and an accelerometer. The proposed MEMS gyro-accelerometer is designed to detect the angular rate and the acceleration at the same time using two separate detection circuits for one proof mass. In this study, the detection and signal processing circuit for an effective signal processing of different inertial measurements is designed, fabricated, and tested. The experimental results show that the performances of the gyro-accelerometer have resolutions of 1mg and 0.025deg/sec and nonlinearities of less than 0.5% for the accelerometer and the gyroscope, respectively, which are similar results with those of sensors with different structures and different detection circuits. The size of the sensor is reduced almost by 50% comparing with the sensors of separated proof mass.

• International conference on construction engineering and project management
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• 2009.05a
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• pp.250-256
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• 2009

This paper presents a robotic tower-crane system using encoder and gyroscope sensors as path tracking devices. Tower crane work is often associated with falling accidents and industrial disasters. Such problems often incur a loss of time and money for the contractor. For this reason, many studies have been done on an automatic tower crane. As a part of 5-year 23-million-dollar research project in Korea, we are developing a robotic tower crane which aims to improve the safety level and productivity. We selected a luffing tower crane, which is commonly used in urban construction projects today, as a platform for the robotic tower crane system. This system comprises two modules: the automated path planning module and the path tracking module. The automated path planning system uses the 3D Cartesian coordinates. When the robotic tower crane lifts construction material, the algorithm creates a line, which represents a lifting path, in virtual space. This algorithm seeks and generates the best route to lift construction material while avoiding known obstacles from real construction site. The path tracking system detects the location of a lifted material in terms of the 3D coordinate values using various types of sensors including adopts encoder and gyroscope sensors. We are testing various sensors as a candidate for the path tracking device. This specific study focuses on how to employ encoder and gyroscope sensors in the robotic crane These sensors measure a movement and rotary motion of the robotic tower crane. Finally, the movement of the robotic tower crane is displayed in a virtual space that synthesizes the data from two modules: the automatically planned path and the tracked paths. We are currently field-testing the feasibility of the proposed system using an actual tower crane. In the next step, the robotic tower crane will be applied to actual construction sites with a following analysis of the crane's productivity in order to ascertain its economic efficiency.

• Journal of Institute of Control, Robotics and Systems
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• v.18 no.7
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• pp.632-637
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• 2012

This paper introduces a simple and efficient calibration method for three-axis accelerometers and three-axis gyroscopes using three-axis motion rate table. Usually, the performance of low cost MEMS-based inertial sensors is affected by scale and bias errors significantly. The calibration of these errors is a bothersome problem, but the previous calibration methods cannot propose simple and efficient method to calibrate the errors of three-axis inertial sensors. This paper introduces a new simple and efficient method for the calibration of accelerometer and gyroscope. By using a three-axis motion rate table, this method can calibrate the accelerometer and gyroscope simultaneously and simply. Experimental results confirm the performance of the proposed method.

• Journal of Sensor Science and Technology
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• v.24 no.4
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• pp.274-279
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• 2015

This paper describes optimizing fabrication methods for 2-axis electrically levitated MEMS gyroscope. Electrostatically levitated gyroscope has very high potential of performance due to the fact that its proof mass is not mechanically bound to any other structures, but its complex structure and difficulty of fabrication holds back the research that only a few researches have been reported. In this work, fabrication method for glass-silicon-glass 3-floor structure for 2-axis electrically levitated MEMS gyroscope is presented, including simplified multi-level glass etch method utilizing photoresist attack, preventing metal diffusion by adding middle layer of metal electrode, overcoming Deep RIE limitation by separate fabrication of silicon structures and keeping the electrode safe from dicing debris.

• 제어로봇시스템학회:학술대회논문집
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• 2002.10a
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• pp.39.3-39
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• 2002

In this paper, presented is a feedback control loop, for an in-plane gimbaled micro gyroscope based on methodology and state weighted model reduction technique. The micro gyroscope is the basic inertial sensors. To improve the performances such as stability, wide dynamic range, bandwidth and especially robustness, it is necessary to design a feedback control loop, which must be robust, because the manufacturing process errors can be large. Especially, to obtain wide bandwidth, the feedback controller is indispensable, because the gyroscope is high Q factor system and has small open loop bandwidth. Moreover, the feedback controller reduces the effect...

• Journal of Sensor Science and Technology
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• v.26 no.4
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• pp.235-238
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• 2017

In this study, the design of a tri-axis micromachined gyroscope is proposed and the vibration characteristic of the structure is analyzed. Tri-axis vibratory gyroscopes that utilize Coriolis effect are the most commonly used micromachined inertial sensors because of their advantages, such as low cost, small packaging size, and low power consumption. The proposed design is a single structure with four proof masses, which are coupled to their adjacent ones. The coupling springs of the proof masses orthogonally transfer the driving vibrational motion. The resonant frequencies of the gyroscope are analyzed by finite element method (FEM) simulation. The suspension beam spring design of proof masses limits the resonance frequencies of four modes, viz., drive mode, pitch, roll and yaw sensing mode in the range of 110 Hz near 21 kHz, 21173 Hz, 21239 Hz, 21244 Hz, and 21280 Hz, respectively. The unwanted modes are separated from the drive and sense modes by more than 700 Hz. Thereafter the drive and the sense mode vibrations are calculated and simulated to confirm the driving feasibility and estimate the sensitivity of the gyroscope. The cross-axis sensitivities caused by driving motion are 1.5 deg/s for both x- and y-axis, and 0.2 deg/s for z-axis.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.39 no.8
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• pp.796-803
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• 2011

It is called self-alignment or initial alignment that INS(Inertial Navigation System) is aligned using the measurements from the inertial sensors as an accelerometer and a gyroscope and the inserted reference navigation information in the stop state. The main purpose of self-alignment is to obtain the initial attitude of INS. The accuracy of self-alignment is determined by the performance grade of the used inertial sensors, especially horizontal attitude accuracy by the horizontal accelerometer and vertical attitude accuracy by the E-axis gyroscope. Therefore the uncertain errors in the inertial sensors cause the performance of self-alignment to degrade. In this paper, we analyze theoretically and through a simulation how the errors of inertial sensors in the temperature stabilizing state, one of the uncertain errors, affect the accuracy of self-alignment.