Timed Petri-nets Modeling and Performance Evaluation of Modular Cell TFT-LCD Manufacturing System (모듈러 셀 TFT-LCD 제조시스템의 시간 페트리네트 모델링과 성능평가)
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- The Transactions of the Korean Institute of Electrical Engineers A
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- v.48 no.10
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- pp.1303-1310
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- 1999