• 한국결정성장학회지
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• 제9권5호
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• pp.504-509
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• 1999

In-situ cleaning and subsequent silicon epitaxial film growth were performed in a load-locked reactor equipped with Hg-grid UV lamp and PBN heater to obtain the smooth and contaminant-free underlying surface and develop low-temperature epitaxial film growth process. The removals of organic and native oxide were investigated using UV-excited $O_2$ and $NF_{3}/H_{2}$, and the effect of the surface condition was examined on the quality of silicon epitaxial film grown at temperature as low as $750^{\circ}C$. UV-excited gas phase cleaning was found to be effective in removing the organic and native oxide successfully providing a smooth surface with RMS roughness of 0.5$\AA$ at optimal condition. Crystalline quality of epitaxial film was determined by smoothness of cleaned surface and the presence of native oxide and impurity. Crystalline defects such as dislocation loops or voids due to the surface roughness were observed by XTEM.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2002년도 춘계학술발표회 초록집
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• pp.46-46
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• 2002

It is well known that thin film growth and surface morphology can be substantially modified by ion-bombardment during the deposition. This is particularly important in case of thin-film deposition at low temperatures where the film growth occurs under highly nonequilibrium conditions. An attractive way to promote crystalline growth and surface morphology is deposition of additional energy in to the surface of the growing film by bombardment with hyperthermal particles. We were deposited crystalline Ti and TiN thin films on Si substrate by magnetron sputtering method with grid. Its thin films were highly smoothed and dense as increasing grid bias. In order explore the benefits of a bombardment of the growing film with high energetic particles. Ti and TiN films were deposited on Si substrates by an unbalanced magnetron sputter source with attached grid assembly for energetic ion extraction. Also, we have studied the variation of the plasma states by Langmuir probe and Optical Emission Spectroscopy (OES). The epitaxial orientation. microstructual characteristics. electrical and surface properties of the films were analyzed by XRD. SEM. Four point probe and AFM.

• 한국해양공학회지
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• 제12권1호
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• pp.39-49
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• 1998

In this work, fatigue tests by axial loading were carried out to investigate the effect of stress ratio on the growth behaviors of surface fatigue crack for SM45C steel and Al 2024-T4 alloy. The growth behaviors of surface crack have been monitored during fatigue process by measuring system attached CCTV and monitor. When the growth rates of surface crack were investigate by the concept of LEFM based on Newman-Raju's .DELTA.K, the dependence of stress ratio appears both SM45C steel and Al 2024-T4 alloy. Therefore, modified stress intensity factor range, .DELTA.K' [=(1+R)/sup n/.DELTA.K] are intorduced to eliminate the dependence of stress ratio. Using .DELTA.K', it is found that the dependence of stress ratio disappears both SM45C steel and Al 2024-T4 alloy.

• International Journal of Railway
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• 제5권3호
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• pp.129-134
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• 2012

Contact fatigue damages on the rail surface, such as head checks and squats are a growing problem. The fatigue cracks forming on the contact surface grow according to load and lubricating conditions and may end up breaking the rail. Rail fracture can be avoided by preventing the cracks from reaching the critical length. Therefore, the crack growth rate needs to be estimated precisely according to the conditions of the track and load to develop a maintenance plan against rail damages. Therefore, it is important to understand the mechanism of cracks initiation and growth on a rail due to repetitive rolling contact. In this study, we have investigated the crack growth behavior on the rail surface by using the twin-disc tests and the finite element analysis.

• Applied Science and Convergence Technology
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• 제27권2호
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• pp.38-41
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• 2018

We demonstrate the growth of a sheet-like ZnO membrane on ZnO nano rod layers. The growth process is composed of 3 steps of ZnO seed formation, ZnO nano rod growth and sheet-like ZnO membrane formation on those nano rods. To confirm the fundamental growth mechanism, the lattice structures of each step were analyzed by X-ray diffraction (XRD) and scanning electron microscope (SEM) measurement. Analysis of the relation between the texture coefficient and the surface shape of the ZnO membrane on the ZnO nano rods shows that the surface morphology of ZnO nano structures can be controlled using the temperature of the growing solution and the concentration of the chemical solution.

• 한국초전도ㆍ저온공학회논문지
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• 제19권3호
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• pp.33-39
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• 2017

This study presents that the orientation and the geometry of seed affect on the growth behavior of melt processed single grain REBCO bulk superconductor and its magnetic properties. The effects of seed geometry have been investigated for thin $30mm{\times}30mm$ rectangular powder compacts. Single grain REBCO bulk superconductors have been grown successfully by a top seed melt growth method for 8-mm thick vertical thin REBCO slab. Asymmetric structures have been developed at the front surface and at the rear surface of the specimen. Higher magnetic properties have been obtained for the specimen that c-axis is normal to the specimen surface. The relationships between microstructure, grain growth and magnetic properties have been discussed.

• Applied Science and Convergence Technology
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• 제26권6호
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• pp.214-217
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• 2017

AlSb is a promising material for optical devices, particularly for high-frequency and nonlinear-optical applications. We report the effect of growth temperature on structural properties of AlSb grown on GaAs substrate. In particular we studied the surface of AlSb with the growth temperature by atomic force microscopy, and concluded that optimized growth temperature of AlSb is $530^{\circ}C$. We also show the result of real-time monitoring of AlSb growth by in situ ellipsometry. The results of the structural study are good agreement with the previous reported ellipsometric data.

• 한국항공우주학회지
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• 제40권4호
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• pp.336-345
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• 2012

균열성장 수명에는 구조 형상의 복잡함, 작용하중의 변동, 재료물성 분포 등의 영향으로 불확실성이 포함된다. 따라서 이러한 불확실 인자들에 대해 계산된 수명의 강건성을 확보하기 위해서는 신뢰성 평가가 요구된다. 하지만 형상이 복잡한 터빈 휠의 경우 균열성장 수명 계산의 주요 변수인 응력확대계수의 표현식을 알기 힘들며, 이를 유한요소해석으로 계산하므로 수명 계산 및 신뢰성 평가에 많은 시간이 요구된다. 따라서 본 연구에서는 균열성장 수명의 반응표면을 사용함으로써 신뢰성 평가의 효율성을 높일 수 있음을 고찰하였다. 이를 위해 형상이 복잡한 터빈 휠을 모델로 유한요소해석으로 생성된 응력확대계수 데이터를 회귀분석하여 근사모델을 생성한 후 응력확대계수의 회귀계수, Paris 계수, 초기균열길이에 대한 균열성장 수명의 반응표면을 생성하여 신뢰성해석에 사용하였다. 신뢰성해석은 몬테카를로 시뮬레이션으로 수행하였으며, 연구결과 반응표면의 사용이 신뢰성 평가 시 필요한 균열성장 수명의 계산량을 효과적으로 줄일 수 있었다.

• 한국산업융합학회 논문집
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• 제7권4호
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• pp.349-354
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• 2004

The growth mode of the Si layers which were grown on Si(111) by using Ag as surfactant were investigated by intensity oscillations of the RHEED specular spot at the different temperatures. we found that the introduction of Ag as the surfactant alters the growth mode from a three-dimensional clustering mechanism to a two-dimensional layer-by-layer growth. In the growth of Si layers on Si(111) with a surfactant Ag, At $450^{\circ}C$, RHEED intensity oscillation was very stable and periodic from early stage of deposition to 32 ML. RHEED patterns during homoepitaxial growth at $450^{\circ}C$ was changed from $7{\times}7$ structure into ${\sqrt{3}}{\times}{\sqrt{3}}$ structures. Since the ${\sqrt{3}}{\times}{\sqrt{3}}$ structure include no stacking fault, the stacking fault layer seems to be reconstructed into normal stacking one at transition from the $7{\times}7$ structure to a ${\sqrt{3}}{\times}{\sqrt{3}}$ one. We also found that the number of the intensity oscillation of the specular spot for Si growth with a surfactant Ag was more than for Si growth without a surfactant. This result may be explained that the activation energy decrease for the surface diffusion of Si atoms due to segregation of the surfactant toward the growing surface.

• 대한기계학회논문집A
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• 제20권11호
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• pp.3415-3423
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• 1996

The compact tension specimen geometry has been widely used for measuring fatigue crack growth rates at elevated temperature when the fatigue load is under tension/tension condition. However, most of the elevated temperature components which have significant crack growth life experience fatigue load under tension/compression conditions. Thus test techniques are required since the compact tension specimen cannot be used for tension/compression loading. In this paper, a simplified test procedure for measureing fatigue crack growth rates is proposed, which employs a round bar specimen with a small surface crack. Fatigue crack growth rates under tension/ tension loading conditions at elevated temperature were measured according to the proposed procedure and compared with those previously measured by C/(T) specimens. Since both the measured crack growth rates were comparable, the fatigue crack growth rates under tension/ compression load can be reliably measured by the proposed procedure. For monitoring crack depth. DC electric potential method is employed and an optimal probe location and current input conditions were proposed.