Raman Scattering Characteristics of Polycrystalline 3C-SiC Thin Films deposited on AlN Buffer Layer (AlN 버퍼층위에 증착된 다결정 3C-SiC 박막의 라만 산란 특성)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.21 no.6
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- pp.493-498
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- 2008