• Journal of Electrical Engineering and Technology
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• 제4권4호
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• pp.546-551
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• 2009

In this paper, we describe a self-aligned fabrication method for a nano-patterned bottom electrode using flood exposure from the backside. Misalignments between layers could cause the final devices to fail after the fabrication of the nano-scale bottom electrodes. A self-alignment was exploited to embed the bottom electrode inside the glass substrate. Aluminum patterns act as a dry etching mask to fabricate glass trenches as well as a self-aligned photomask during the flood exposure from the backside. The patterned photoresist (PR) has a negative sidewall slope using the flood exposure. The sidewall slopes of the glass trench and the patterned PR were $54.00^{\circ}$ and $63.47^{\circ}$, respectively. The negative sidewall enables an embedment of a gold layer inside $0.7{\mu}m$ wide glass trenches. Gold residues on the trench edges were removed by the additional flood exposure with wet etching. The sidewall slopes of the patterned PR are related to the slopes of the glass trenches. Nano-scale bottom electrodes inside the glass trenches will be used in beam resonators operating at high resonant frequencies.

• 대한화학회지
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• 제19권2호
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• pp.104-115
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• 1975

요오드의 전기화학적 환원과정을 여러가지 특성을 가진 물아닌 용매 속에서 polarography, chronopotentiometry, cyclic voltammetry, controlled potential coulometry 등의 전기분석적 방법을 이용하여 적하수은전극, 백금, 금 및 백금아말감전극등을 사용하여 상세히 조사하였다. 메탄올, 에탄올, 이소프로판올 및 피리딘과 같은 양쪽성 용매 속에서는 $I_2{\longrightarrow}I^-$의 I단계 환원과정을 거치며 아세톤, 디메틸포름아미드, 메틸에틸케톤, 디메틸술폭시드, 아세토니릴과 같은 반양성자 용매속에서는 $I_2{\longrightarrow}I_3^-{\longrightarrow}I^-$의 2단계 환원과정을 거쳤다. 적하수은전극, 고인 수은전극, 백금, 금 그리고 백금아말감전극등 전극조건을 다르게 하였을 때에도 $^'I_2$의 환원과정은 같았으며 사용한 모든 전극에서 확산지배적이었다. 반양성자용매에 물을 첨가하여 그 영향을 걸토한 결과 물의 첨가량이 약 $50v/v{\%}$ 이상일때 2단계의 환원과정이 1단계의 환원과정으로 줄어들었다. 또 chronopotentiometric data와 Send의 식으로부터 계산한 각 용매 속에서의 요오드의 확산계수는 $D_{I2}^{AN}=5.96{\times}10^{-6}cm^2/sec,\;D_{13-}^{AN}=9.63{\times}10^{-6}cm^2/sec,\;D_{I2}^{MeOH}=5.30{\times}10^{-6}cm^2/sec$이였다. 전기화학적 환원과정의 stoichiometry를 알아 보고저 controlled potential coulometry로 使用하였으며, 얻은 생성물은 은법적정으로 확인 및 정량하였다.

• Journal of Electrochemical Science and Technology
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• 제11권2호
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• pp.172-179
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• 2020

The impact of effective parameters on the electrodeposition rate optimization of Au-Cu alloy at high thicknesses on the silver substrate was investigated in the present study. After ensuring the formation of gold alloy deposits with the desired and standard percentage of gold with the cartage of 18K and other standard karats that should be observed in the manufacturing of the gold and jewelry artifacts, comparing the rate of gold-copper deposition by direct and pulsed current was done. The rate of deposition with pulse current was significantly higher than direct current. In this process, the duty cycle parameter was effectively optimized by the "one factor at a time" method to achieve maximum deposition rate. Particular parameters in this work were direct and pulse current densities, bath temperature, concentration of gold and cyanide ions in electrolyte, pH, agitation and wetting agent additive. Scanning electron microscopy (SEM) and surface chemical analysis system (EDS) were used to study the effect of deposition on the cross-sections of the formed layers. The results revealed that the Au-Cu alloy layer formed with concentrations of 6gr·L^-1 Au, 55gr·L^-1 Cu, 24 gr·L^-1 KCN and 1 ml·L^-1 Lauryl dimethyl amine oxide (LDAO) in the 0.6 mA·cm^-2 average current density and 30% duty cycle, had 0.841 ㎛·min^-1 Which was the highest deposition rate. The use of electrodeposition of pure and alloy gold thick layers as a production method can reduce the use of gold metal in the production of hallow gold artifacts, create sophisticated and unique models, and diversify production by maintaining standard karats, hardness, thickness and mechanical strength. This will not only make the process economical, it will also provide significant added value to the gold artifacts. By pulsating of currents and increasing the duty cycle means reducing the pulse off-time, and if the pulse off-time becomes too short, the electric double layer would not have sufficient growth time, and its thickness decreases. These results show the effect of pulsed current on increasing the electrodeposition rate of Au-Cu alloy confirming the previous studies on the effect of pulsed current on increasing the deposition rate of Au-Cu alloy.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.386.1-386.1
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• 2014

The ionic polymer-metal composite (IPMC), a type of electro-active polymer material, has received enormous interest in various fields such as robotics, medical sensors, artificial muscles because it has many advantages of flexibility, light weight, high displacement, and low voltage activation, compare to traditional mechanical actuators. Mostly noble metal materials such as gold or platinum were used to form the electrode of an IPMC by using electroless plating process. Furthermore, carbon-based materials, which are carbon nanotube (CNT) and reduced graphene-CNT composite, were used to alter the electrode of IPMC. To form the electrode of IPMC, we employ the synthesized graphene on copper foil by chemical vapor deposition method and use the transfer process by using a support of PET/silicone film. The properties of graphene were evaluated by Raman spectroscopy, UV/Vis spectroscopy, and 4-point probe. The structure and surface of IPMC were analyzed via field emission scanning electron microscope. The fabricated IPMC performance such as displacement and operating frequency was measured in underwater.

• Bulletin of the Korean Chemical Society
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• 제28권8호
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• pp.1405-1409
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• 2007

The potential-induced charge transfer of the dye (Bu4N)2[Ru(dcbpyH)2-(NCS)2] (N719) on Au, Ag, and Cu electrode surfaces has been examined by surface-enhanced Raman scattering (SERS) in the applied voltage range between 0.0 and ?0.8 V. N719 is assumed to have a relatively perpendicular geometry with its bipyridine ring on the metal surfaces. A strong appearance of the carboxylate band at ~1370 cm-1 indicates that the carboxyl group will likely be deprotonated on the metal surfaces. As the electric potential is shifted from ?0.8 to 0.0 V, the ν (NCS) band at ~2100 cm-1 on the electrode surfaces appears to undergo a shift in frequency and intensity change. This indicated that the charge transfer between the dye and metal electrode surfaces had occurred. Electric-field-dependent charge transfer differs somewhat depending on the type of metal surfaces as suggested from the dissimilar frequency positions of the ν (NCS) band.

• Bulletin of the Korean Chemical Society
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• 제35권7호
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• pp.2072-2076
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• 2014

Sub-micrometer size gold particles were electrodeposited on a transparent fluorine-doped tin oxide (FTO) from acetonitrile solution containing $AuCl_4{^-}$ and tetramethylammonium tetraflouroborate (TMATFB) for detecting $NO_2{^-}$. A series of two-electron ($2e^-$) and one-electron ($1e^-$) reductions of the $AuCl_4{^-}-AuCl_2{^-}-Au$ redox systems were observed at FTO and a highly stable and homogeneous distribution of Au on FTO (Au/FTO) was obtained by stepping the potential from 0 to -0.55 V (vs. Ag/$Ag^+$). The Au/FTO electrode exhibited sufficiently high catalytic activity toward the oxidation of $NO_2{^-}$ with a detection limit (S/N = 3) and sensitivity of 2.95 ${\mu}M$ and 223.4 ${\mu}A{\cdot}cm^{-2}{\cdot}mM^{-1}$, respectively, under optimal conditions. It exhibited an interference-free signal for $NO_2{^-}$ detection with excellent recoveries from real samples.

• 한국전기전자재료학회논문지
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• 제18권6호
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• pp.560-570
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• 2005

In this paper, a microelectrode away DNA chip was fabricated on glass slide using photolithography technology. Several probe DNAs consisting of mercaptohexyl moiety at their 5' end were immobilized on the gold electrodes by DNA arrayer utilizing the affinity between gold and sulfu. Then target DNAs were hybridized and reacted with Hoechst 33258, which is a DNA minor groove binder and electrochemically active dye. Cyclic voltammetry in 5mA ferricyanide/ferrocyanide solution at 100 mV/s confirmed the immobilization of probe DNA on the gold electrodes. Linear sweep voltammetry or cyclic voltammetry showed a difference between target DNA and control DNA in the anodic peak current values. It was derived from Hoechst 33258 concentrated at the electrode surface through association with formed hybrid. It suggested that this DNA chip could recognize the sequence specific genes. It suggested that multichannel electrochemical DNA microarray is useful to develop a portable device for clinical gene diagnostic system.

• 공업화학
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• 제22권5호
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• pp.575-578
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• 2011

전기화학적 증착 기법을 이용하여 간단하고 빠르게 3차원적 구조를 가지는 다공성 금 박막(NPGF : nanoporous gold thin film)을 금 기판 위에 제작하였다. 제작된 3차원적 구조의 NPGF는 주사 전자 현미경(SEM)을 이용하여 표면을 분석하였고, 이를 통하여 표면상에 30~50 nm 크기의 균일한 다공성 박막이 생성되었음을 확인하였다. Differential pulse voltammetry(DPV) 기법을 기반으로 3차원적 구조체를 가진 NPGF기판을 전극으로 사용하여 GABA를 농도별($10{\sim}100{\mu}M$)로 측정하였다. 본 연구에서 제안된 방법은 향후, 바이오센서 응용분야에 널리 사용될 수 있을 것으로 기대된다.

• 전기화학회지
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• 제14권1호
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• pp.44-49
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• 2011

This paper describes an electrochemical immunosensor for simple, fast and quantitative detection of a urinary hippuric acid which is one of major biological indicator in toluene-exposed humans. The feature of this electrochemical system for immunoassay of hippuric acid is based on the direct conjugation of ferrocene to a hippuric acid. With the competition between the ferrocene-hippuric acid complex and hippuric acid for binding to the anti-hippuric acid monoclonal antibody coated onto gold nanoparticles, the electrical signals are turned out to be proportional to urinary hippuric acid in the range of 0.01-10 mg/mL, which is enough to be used for the point-of-care. The proposed electrochemical method could extend its applications to detect a wide range of different small molecules of antigens in the health care area.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2000년도 하계학술대회 논문집
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• pp.675-678
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• 2000

Using the principle of the cross capacitor, a precise system for measuring the electric constants of liquids has been developed. The four electrodes of the cross capacitor were formed around fused-silica tube by plating a gold film. The effect of a non-uniform tube wall ok the measured permittivity was investigated As the individual characteristics of the tubes were determined to be constant, the pure dielectric constants extracted from any effect of the fused-silica material could be precisely derived with uncertainty of less than ${\pm}$ 0.02∼0.05 %.