Fabrication of a Bottom Electrode for a Nano-scale Beam Resonator Using Backside Exposure with a Self-aligned Metal Mask
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Lee, Yong-Seok
(Dept. of Electrical Engineering and Computer Science, Seoul National University)
Jang, Yun-Ho (Dept. of Electrical Engineering and Computer Science, Seoul National University) Bang, Yong-Seung (Dept. of Electrical Engineering and Computer Science, Seoul National University) Kim, Jung-Mu (Division of Electrical, Electronic and Computer Engineering, Chonbuk National University) Kim, Jong-Man (Dept. of Nanosystem and Nanoprocess Engineering, Pusan Nantional University) Kim, Yong-Kweon (Dept. of Electrical Engineering and Computer Science, Seoul National University) |
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