• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2004년도 춘계학술대회 논문집
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• pp.48-52
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• 2004

Ultrasonic machining is effective for machining of extreme hard and brittle materials, including glass, ceramic, carbide, graphite. The major machining principle involves the direct hammering as well as the impact of abrasive panicles on the workpiece. Also, it involve cavitation erosion. The general workpiece is flat side. This study attempted micro hole machining of a curved surface of glass tube. Ultrasonic machining is fault of the slow machining speed. An experiment does and got 16 seconds validity machining time as increasing the processing speed. Moreover, entrance crack and surface roughness was similar both machining speed is slow and fast. Several micro hole of glass tube machined using one micro tool, but tool wear is infinitesimal.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제53권9호
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• pp.488-493
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• 2004

In this paper, we present the fabrication of copper electrode array and test of electrochemical discharge machining(ECDM) for glass machining. An array of 72 Cu electrodes is used to machine Borofloat33 glass. The height and diameter of a Cu electrode are 400 $\mu\textrm{m}$ and 100 $\mu\textrm{m}$ respectively. It is fabricated by ICP-RIE, Au-Au thermo-compression bonding, and copper electroplating. Borofloat33 glass is machined by the fabricated copper electrode array in 60 seconds at 55 V. The surface roughness of the machined glass is measured and the machined glass is anodically bonded with silicon.

• 소성∙가공
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• 제13권3호
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• pp.262-267
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• 2004

Ultrasonic machining has been known as one of the conventional machining methods in the glass fabrication processes. In ultrasonic machining, typically, glass is removed by the impulse energy of the abrasive generated by the ultrasonic power. However, when the machining feature decrease under hundreds of micrometers, as conventional ultrasonic machining uses only the impulse energy of the abrasive, the speed of ultrasonic machining decreases significantly and the surface roughness becomes deteriorated. To overcome this size effect, the chemicals which can erode glasses, such as HF, XF, etc, are added to the slurry. The chemical-assisted ultrasonic machining method, so called, is another alternating effective way for micro machining of glasses. In previous work, we used the hydrofluoric acid (HF) as an additive chemical. But, as the HF solution is too poisonous to be used as a ultrasonic process additive, it is needed to be substituted by other safe chemicals. As results of the machinability comparison of several chemicals, the GST-500F was selected to replace the HF. The GST-500F (pH $4.0{\pm}1.0$) is non-volatile, odorless. During experimental works, it was shown that the machining rate increases 1.5 times faster than the conventional ultrasonic machining. The machining load also decreases. However, the enlargement of the hole diameter and significant tool wear are still the problems to be solved.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 춘계학술대회
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• pp.1349-1354
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• 2003

Ultrasonic Machining process is an efficient and economical means of precision machining on glass and ceramic materials. However, the mechanics of the process with respect to crack initiation and propagation, and stress development in the ceramic workpiece subsurface are still not well understood. In this research, we investigate the basic mechanism of chemical assisted ultrasonic machining(CUSM) of glass through the experimental approach. For the purpose of this study, we designed and fabricated the desktop micro ultrasonic machine. The feed is controlled precisely by using the constant load control system. During the machining experiment, the effects of HF(hydrofluoric acid) characteristics and machining condition on the surface roughness and the material removal rate are measured and compared.

• 소성∙가공
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• 제11권7호
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• pp.608-613
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• 2002

An ultrasonic machining process is efficient and economical means for precision machining of glass and ceramic materials. However, the mechanism of the process with respect to the crack initiation and propagation and the stress development in the ceramic workpiece subsurface arc still not well understood. In this research, we have investigated the basic mechanism of ultrasonic machining of ultrasonic machining of glass by the experimental approach. For this purpose, we designed and fabricated the desktop micro ultrasonic machine. The feed is controlled precisely by using the constant load control system. During machining experiments, the effects of abrasive characteristics and machining conditions on the surface roughness and the material removal rate are measured and compared.

• 대한기계학회논문집A
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• 제31권10호
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• pp.1039-1045
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• 2007

Ultrasonic machining (USM) is suitable for machining hard, brittle and non-conductive materials such as silicon, glass and ceramics. Usually, when micro holes are machined on glass by USM, roundness of hole entrance is poor and cracks appear around the hole exit. In this paper the machining characteristics were studied for roundness improvement and exit crack prevention. From experiments, the tool bending and the shape of tool tip affect hole roundness. When the tool tip is hemispherical, good roundness of holes was obtained. The feedrate and the rotational speed of the tool affect the exit crack. With the machining conditions of 150 rpm in spindle speed and $0.5\;{\mu}m/s$ in feedrate, micro holes with less than $100\;{\mu}m$ in diameter were machined without an exit crack.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.209-210
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• 2006

We have successfully termed brown colored patterns inside of a transparent borosilicate glass generally known as BK7, laying the focus of near infrared Ti: sapphire femtosecond laser beam in the bulk BK7 glass. It is important to keep the laser power well below the damage threshold of BK7 in forming the color center. Thanks to the low laser power, there was no laser induced mechanical damage such as cracks or threads in the color formed area. From the absorbance spectrum and its gaussian fitting, we found the band gap of BK7, 4.21eV, and three absorption edges.

• 대한기계학회논문집A
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• 제38권9호
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• pp.967-972
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• 2014

우수한 광투과성 및 경도를 지닌 유리는 바이오, 전자, 광학 등의 분야에서 널리 활용되고 있다. 하지만, 유리는 경도가 높고 깨지기 쉬워 일반적으로 특수가공법을 이용하여 가공이 이루어진다. 그 중 레이저는 공구가 불필요하며 가공 속도가 빠르다는 장점을 지니고 있지만 유리의 높은 광투과성 때문에 가공에 적용하기에는 많은 제약이 따른다. 이에 저출력의 나노초 펄스 레이저로 유리 가공을 하기 위하여 간접가공법인 레이저 습식 후면 식각공정을 활용하고자 한다. 기존의 연구들에서는 흡수율이 뛰어난 고가의 단파장 레이저 장비를 주로 사용하였으나 본 연구에서는 범용적인 근적외선 레이저 장비를 활용하여 유리 구조물 제작의 가능성을 실험하였다. 특히 깊은 구조물 제작시 발생하는 문제점을 확인하고 이를 해결하기 위해 초음파 부가 공정을 통한 미세 구조물 제작을 수행하였다.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1999년도 추계학술대회 논문집 - 한국공작기계학회
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• pp.377-380
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• 1999

The experimental investigating is mainly focused on the hole machining characteristics of glass fiber reinforced polyester at different surface conditions, cutting conditions and machining methods. The entrance and exit surface holes of the glass fiber reinforced polyester is observed and the surface photographs of drilled holes is showed. The cutting force is also measured.

• 대한기계학회논문집A
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• 제27권12호
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• pp.2085-2091
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• 2003

An ultrasonic machining process has been known as efficient and economical means fer precision machining of glass or ceramic materials. However, because of its complexity, the mechanism of the machining process is still not well understood. Therefore, it is hard to optimize the process parameters effectively. The conventional ultrasonic machining which uses the abrasive slurry only, furthermore, is time-consuming and gives the relatively rough surface. In order to increase the material removal rate and improve the integrity of the machined surface, we have introduced the novel ultrasonic machining technique, Chemical-assisted UltraSonic Machining(CUSM). The desktop-style micro ultrasonic machine has been developed and the z-axis feed is controlled by the constant load control algorithm. To obtain the chemical effects, the low concentration HF(hydrofluoric acid) solution, which erodes glass, added to alumina slurry. Through various experiments and comparison with conventional results, the superiority of CUSM is verified. MRR increases over 200%, the surface roughness is improved and the machining load decreases dramatically.