• Proceedings of the IEEK Conference
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• 2002.06b
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• pp.201-204
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• 2002

A large area inductively coupled plasma which is applicable to LCD processing is built with a modified single loop RF antenna. Combination of parallel and series paths of RF current through the antenna induces local enhancement of plasma density, which in turn provides uniform plasma density near the substrate. The plasma density distribution is measured and compared with that of the conventional single loop antenna. Aisotropic etching of photoresist is performed, and it is found that etch uniformity is improved by 3％ from 15% of the conventional etcher over 350$\times$300mm glass substrates. Photoresist etching rate and uniformity can be further improved by applying a periodic weak axial magnetic fieid.

• Proceedings of the Korean Society For Composite Materials Conference
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• 2001.05a
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• pp.74-77
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• 2001

The impact response and damage of CLAS panel was investigated experimentally. The facesheet material used was RO4003 woven-glass hydrocarbon/ceramic and the core material was Nomex honeycomb with a cell size of 3.2mm and a density of 96 kg/$\textrm{m}^{3}$. The shield plane used was RO4003 and 2024-T3 aluminum. Static indentation and impact test was conducted to characterize the type and extent of the damage observed in two CLAS panels, and the performance of antenna used in a wireless LAN system. Correlation of peak contact force, residual indentation and the delamination area shows impact damage of the panel with an aluminum shield plane is larger than that of the panel with RO4003 shield plane, although tile former is more penetration resistant. The damage was observed by naked eye, ultrasonic inspection and cross sectioning. The shape and size of delamination was estimated by ultrasonic inspection, and the area of delamination linearly increases as impact energy increases. The performance of impact damaged antenna was estimated by measuring return loss and radiation pattern.

• Journal of the Korean institute of surface engineering
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• v.39 no.3
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• pp.142-146
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• 2006

A novel internal-type linear inductive antenna, which we refer to as a double comb-type antenna, was developed for a large-area plasma source with substrate size of $880\;mm{\times}660\;mm$ ($4^{th}$ generation glass size). In this study, effect of plasma confinement by applying multi-polar magnetic field was investigated. High density plasmas of the order of $3.18{\times}10^{11}\;cm^{-3}$ could be obtained with a pressure of 15 mTorr Ar at an inductive power of 5000 W with good plasma stability. This plasma density is higher than that obtained for the conventional double comb-type antenna, possibly due to the plasma confinement, low rf voltage, resulting in high power transfer efficiency. Also, due to the remarkable reduction in the antenna rf voltage and length, a plasma uniformity of less than 3% could be obtained within a substrate area of $880\;mm{\times}660\;mm$ as rf power increased.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.17 no.2
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• pp.372-377
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• 2016

Communication flow is changing rapidly. Recently, a range of wearable devices such as wearable glasses and wearable watch, have been launched. These kinds of wearable devices help people to live a more comfortable life. Wearable devices most have an antenna for wireless communication. This paper reports a transparent antenna that is made of an optically transparent material for wearable glasses. Transparent antenna can be applied to smart windows and will not disturb the view of user. IZTO/Ag/IZTO multilayer electrode has higher electrical and optical properties. This antenna is available because of its good electrical properties. This study measured the performance of the proposed transparent antenna, which is made of a multilayer electrode, applied to a lens. The proposed antenna was simulated with several substrates. The antenna impedance was matched with length and width of the antenna. The antenna's conductivity and transparency was measured using a HMS-3000 and UV-spectrometer. A 40nm thick Ag single layer antenna was fabricated on a flexible polyimide substrate for comparing the antenna performances. The fabricated antenna is useable at a frequency of 2.4-2.5GHz, which is suitable for Wifi communications and has peak gain of 2.89dBi and an efficiency of 34%.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.2
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• pp.387-398
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• 2002

The impact response and damage of CLAS panel was investigated experimentally. The facesheet material used was RO4003 woven-glass hydrocarbon/ceramic and the core material was Nomex honeycomb with a cell size of 3.2mm and a density of 96 kg/㎥. The shield plane used was RO4003 and 2024-T3 aluminum. Static indentation and impact test was conducted to characterize the type and extent of the damage observed in two CLAS panels, and the performance of antenna used in a wireless LAN system. Correlation of peak contact force, residual indentation and the delamination area shows impact damage of the panel with an aluminum shield plane is larger than that of the panel with RO4003 shield plane, although the former is more penetration resistant. The damage was observed by naked eye, ultrasonic inspection and cross sectioning. The shape and size of delamination was estimated by ultrasonic inspection, and the area of delamination linearly increases as impact energy increases. The performance of impact damaged antenna was estimated by measuring return loss and radiation pattern. It was revealed that the performance of antenna was related to the impact damage and there was a threshold that the performance of antenna fell as impact energy level changed. The threshold was between the impact energies of 1.5J and 1.75J.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.41 no.11
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• pp.891-899
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• 2013

This paper suggests a test and evaluation procedure of conformal load-bearing antenna structure(CLAS) for high speed military jet application. A log periodic patch type antenna was designed for multi-band communication and navigation antenna. Carbon/Glass fiber reinforced polymer was used as a structure supporting aerodynamic loads and honeycomb layer was used to improve antenna performance. Multi-layers were stacked and cured in a hot temperature oven. Gain, VSWR and polarization pattern of CLAS were measured using anechoic chamber within 0.15~2.0 GHz frequency range. Tension, shear, fatigue and impact load test were performed to evaluate structural strength of CLAS. Antenna performance test after every structural strength test was conducted to check the effect of structural test to antenna performance. After the application of new test and evaluation procedure to validate a new CLAS, a design improvement was found.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.29 no.4
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• pp.277-284
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• 2018

This paper reports the transparent electrode, which would be applied to transparent displays and smart glasses. Herein, a squared metal mesh with the most widely used copper wire in microwaves is studied for the alternating thin-film-type transparent and conducting indium tin oxide(ITO), with a low conductivity(sheet resistance > $5{\Omega}/sq.$). The electromagnetic performance of a patch antenna with metal mesh is analyzed. This paper presents the results of the optical(OT, optical transparent) and electrical(sheet resistance) characteristics of a squared metal mesh, which is a basic design. To improve the OT, copper wire(w=0.2 mm) is used in fabricating the squared metal mesh and the relationship between the OT and the antenna performance(radiation gain, radiation pattern) was analyzed according to the mesh size(l=1, 2 mm). The measurement results show that the antenna performance and the optical characteristic are in inverse proportion to each other. In real applications, the optical and electrical characteristics, and the costs of production are to be considered.

• Journal of the Korean Ceramic Society
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• v.40 no.10
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• pp.954-960
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• 2003

To develop mobile phone antenna modules, glass-ceramics composites that are 20∼80 dielectric constant materials which has been fabricated. The glass-ceramics composites were based in the BNT (BaO-Nd$_2$O$_3$-TiO$_2$), and properties-a sintering and dielectric property-were investigated in its composites according to the $K_2$O-CaO-P$_2$O$_{5}$ system glass frits. The prepared ceramics were sintered at 900∼120$0^{\circ}C$ with the glass frit contents ranging from 10 to 40 wt%. The shrinkage and relative density grew into increasing glass frits and sintering temperature. Sintered composites showed the tendency that the dielectric constant ($\varepsilon$$_{r}$) and quality factor (Q${\times}$f) decreased in increasing glass frits and sintering temperature.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2007.04a
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• pp.80-81
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• 2007

평판 디스플레이의 대면적 플라즈마 공정을 위하여 내장형 선형 안테나를 설치하였고 실질적인 식각 균일도를 알아보기 위하여 floating antenna의 전압 분포 조건에서 glass 위에 $2{\mu}m$의 photoresist가 도포된 시편을 사용하여 식각을 하였다. 식각 균일도 실험은 5 kW의 입력전력과 15mTorr의 $O_2$ gas 조건에서 40분 동안 진행하였다. 그 결과 $2,300\;mm{\times}2,000\;mm$의 기판 상에서 약 11 %의 식각 균일도를 얻을 수 있었다.

• Journal of electromagnetic engineering and science
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• v.10 no.3
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• pp.158-165
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• 2010

This study reviewed terahertz technologies of time domain spectroscopy, T-ray imaging, and high rate wireless data transfer. The main topics of the terahertz research area were investigation of materials and package modules for terahertz wave generation and detection, and setup of the terahertz system for time domain spectroscopy(TDS), T-ray imaging and sub-THz wireless communication. In addition to Poly-GaAs film as a photoconductive switching antenna material, a table-top scale for the THz-TDS/imaging system and terahertz continuous wave(CW) generation systems for sub-THz data transfer and narrow band T-ray imaging were designed. Dielectric properties of ferroelectric BSTO($Ba_xSr_{1-x}TiO_3$) films and chalcogenide glass systems were characterized with the THz-TDS system at the THz frequency range. Package modules for terahertz wave transmitter/receiver(Tx/Rx) photoconductive antenna were developed.