• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.181.2-181.2
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• 2015

Sputtering is one of the most popular physical deposition methods due to their versatility and reproducibility. Synthesis of Cr thin films by DC magnetron sputtering using glancing angle deposition (GLAD) has been reported. Chromium thin films have been prepared at two different working pressure($2.0{\times}10-2$, 30, $3.3{\times}10-3torr$) on Si-wafer substrate using magnetron sputtering with glancing angle deposition (GLAD) technique. The thickness of Cr thin films on the substrate was adjusted about 1 mm. The electrical property was measured by four-point probe method. For the measurement of density in the films, an X-ray reflectivity (XRR) was carried out. The sheet resistance and column angle increased with the increase of glancing angle. However, nanohardness and density of Cr thin films decreased as the glancing angle increased. The measured density for the Cr thin films decreased from 6.1 to 3.8 g/cc as the glancing angle increased from $0^{\circ}$ to $90^{\circ}$ degree. The low density of Cr thin films is resulted from the isolated columnar structure of samples. The evolution of the isolated columnar structure was enhanced at the conditions of low sputter pressure and high glancing angle. This GLAD technique can be potentially applied to the synthesis of thin films requiring porous and uniform coating such as thin film catalysts or gas sensors.

• Korean Journal of Materials Research
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• v.25 no.1
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• pp.54-59
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• 2015

Glancing angle deposition (GLAD) is a powerful technique to control the morphology and microstructure of thin film prepared by physical vapor deposition. Chromium (Cr) thin films were deposited on a polymer substrate by a sputtering technique using GLAD. The change in thickness and Vickers microhardness for the samples was observed with a change in the glancing angle. The adhesion properties of the critical load (Lc) by a scratch tester for the samples were also measured with varying the glancing angle. The critical load, thickness and Vickers microhardness for the samples decreased with an increase in the glancing angle. However, the thickness of the Cr thin film prepared at a $90^{\circ}$ glancing angle showed a relatively large value of 50 % compared to that of the sample prepared at $0^{\circ}$. The results of X-ray diffraction and scanning electron microscopy demonstrated that the effect of GLAD on the microstructure of samples prepared by sputter technique was not as remarkable as the samples prepared by evaporation technique. The relatively small change in thickness and microstructure of the Cr thin film is due to the superior step-coverage properties of the sputter technique.

• Journal of the Optical Society of Korea
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• v.13 no.2
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• pp.218-222
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• 2009

In this paper, we report the optical and structural properties of a bilayer circular filter fabricated by a glancing angle deposition technique. The bilayer circular filter is realized by a two-layer $TiO_2$ helical film with layers of opposite structural handedness. It is found that the bilayer circular filter reflects both right and left circularly polarized light with wavelength lying in the Bragg regime. The microstructure of the bilayer circular filter is also investigated using a scanning electron microscope.

• Journal of Sensor Science and Technology
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• v.26 no.4
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• pp.228-234
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• 2017

Gas sensors based on metal-oxide-semiconductors are predominantly used in numerous applications including monitoring indoor air quality and detecting harmful substances such as volatile organic compounds. Nanostructures, e.g., nanoparticles, nanotubes, nanodomes, or nanofibers, have been widely utilized to improve the gas sensing properties of metal-oxide-semiconductors by increasing the effective surface area participating in the surface reaction with target gas molecules. Recently, 1-dimensional (1D) metal oxide nanostructures fabricated using glancing angle deposition (GAD) method with e-beam evaporation have been widely employed to increase the surface-to-volume ratio significantly with large-area uniformity and reproducibility, leading to promising gas sensing properties. Herein, we provide a brief overview of 1D metal oxide nanostructures fabricated using GAD and their gas sensing properties in terms of fabrication methods, morphologies, and additives. Moreover, the gas sensing mechanisms and perspectives are presented.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.10a
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• pp.867-868
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• 2012

• Proceedings of the Optical Society of Korea Conference
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• 2009.02a
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• pp.409-410
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• 2009

In this paper, we report an experimental study of a linear polarization-discriminatory state inverter made of three-layer sculpture thin film fabricated by glancing angle deposition technique. The first and third layers are quarter-wave plates of zigzag structure and the middle of them is a circular Bragg reflector of left-handed helical structure.

• Proceedings of the Optical Society of Korea Conference
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• 2007.02a
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• pp.151-152
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• 2007

In this study, the optical porosity of $TiO_2$ films with helical structure deposited by glancing angle deposition (GLAD) were investigated. Helical films are of interest due to their ability to differentiate states of circularly polarized light. We designed and fabricated normal-incidence circular-polarization separator deposited by GLAD (Helical structure). The optical porosity of $TiO_2$ film deposited by helical method can be applied many optical coatings.

• Proceedings of the Optical Society of Korea Conference
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• 2008.02a
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• pp.281-282
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• 2008

The glancing angle deposition (GLAD) technique was used to fabricate $ZrO_2$ thin films by electron-beam evaporation. The crystal structure, cross-sectional structure, surface morphology and optical properties are characterized by X-ray diffraction meter (XRD, Rigaku, Cu $K{\alpha}$ - radiation), scanning electron microscope (SEM), and spectrophotometer, respectively.

• Proceedings of the Optical Society of Korea Conference
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• 2008.02a
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• pp.283-284
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• 2008

In this paper, we report a broadband circular polarization reflectors and color separators realized as cascades of helical films with different pitch thickness. These helical films were prepared by glancing angle deposition technique.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.367-367
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• 2013

Commercial applications of indium tin oxide (ITO) can be separated into two useful areas. As it is perceived to bear electrical properties and optical transparency at once, its chance to apply to promising fields, usually for an optical device, gets greater in the passing time. ITO is one of the transparent conducting oxides (TCO), and required to carry the relative resistance less than $10^{-3}{\Omega}$/cm and transmittances over 80 % in the visible wavelength of light. Because ITO has considerable refractive index, there exist applications for anti-reflection coatings. Anti-reflection properties require gradual change in refractive index from films to air. Such changes are obtained from film density or nano-clustered fractional void. Glancing angle deposition (GLAD) method is a well known process for adjusting nanostructure of the films. From its shadowing effects, GLAD helps to deposit well-controlled porous films effectively. In this study, we are comparing the reference sample to samples coated with controlled ITO multilayer accumulated by an e-beam evaporation system. At first, the single ITO layer samples are prepared to decide refractive index with ellipsometry. Afterwards, ITO multilayer samples are fabricated and fitted by multilayer ellipsometric model based on single layer data. The structural properties were measured by using atomic force microscopy (AFM), and by scanning X-ray diffraction (XRD) measurements. The ellipsometry was used to determine refractive indices and extinction coefficient. The optical transmittance of the film was investigated by using an ultraviolet-visible (UV-Vis) spectrophotometer.