• 한국정밀공학회지
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• 제14권11호
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• pp.84-92
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• 1997

The purpose of this study is to develop a geometric error model and path compensation algorithm for rotating axes of the 5-axis machine tools, by a method to calibrate a rotary table using one master ball and three LVDTs. It was developed a new methodology to measure 3 translation errors of the rotary table and with a compensation procedure for setup errors of the master ball. The method is experimentally verified using a ball-table and on-machine inspection method. The results showed that the geometric error models with the path compensation strategy can be practically used as a means for improving the accuracy of the machine tools with rotary table.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2007년도 춘계학술대회 논문집
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• pp.3-4
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• 2007

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2011년도 춘계학술대회 논문집
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• pp.535-536
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• 2011

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2011년도 춘계학술대회 논문집
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• pp.809-810
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• 2011

• 대한기계학회논문집A
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• 제20권3호
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• pp.945-959
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• 1996

In this paper, a comprehensive computer model is described which can be used to generate the volumetric error map combining the machine parametric errors and the measurement prove error, for most types of CMMs and axis configurations currently in use.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 춘계학술대회 논문집
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• pp.917-921
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• 2000

One of the major limitations of productivity and quality in machining is machining accuracy of the machine tools. The machining accuracy is affected by geometric, volumetric errors of the machine tools. This paper suggests the enhancement method of machining accuracy for precision machining of high quality metal reflection mirror or optics lens, etc. In this paper, we study 1) the compensation of linear pitch error with NC controller compensation function using laser interferometer measurement, 2) the method for enhancing the accuracy of NC milling machining by modeling and compensation of volumetric error, 3) the generation of the parabolic face profile. And the method is verified by the parabolic face machining experiment with a vertical three axes NC milling machine. After this study, we will inspect using On-machine measurement and study the repetitive machining by a compensated path

• 한국공작기계학회논문집
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• 제10권2호
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• pp.56-63
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• 2001

The objective of this research is to develop a measurement error compensation method for On-Machine Measurement (OMM) process based on a closed-loop configuration. Geometric errors of vertical machining center are measured using ball-bar system, and probing errors are measured using master ball. The errors are represented using homogeneous trans-formation matrices and the closed-loop configuration method is applied to calculate 3-dimensional errors. To verify the effectiveness of the method proposed in this research, compensated results are compared to the data using CMM process, and the results are analyzed. The results show the proposed method can be applied in OMM process to make the measured data more reliable.

• International Journal of Precision Engineering and Manufacturing
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• 제9권4호
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• pp.26-31
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• 2008

A precision four-degree-of-freedom measurement system has been developed for simultaneous measurement of four motion errors of a linear stage, which include straightness and angular errors, The system employs a retro-reflector to detect the straightness errors and a plane mirror to detect the angular errors. A common-path compensation method for laser beam drift is put forward, and the experimental results show that the influences of beam drift on four motion errors can be reduced simultaneously. In comparison with the API 5D laser measuring system, the accuracy for straightness measurement is about ${\pm}1.5{\mu}m$ within the measuring range of ${\pm}650{\mu}m$, and the accuracy for pitch and yaw measurements is about ${\pm}1.5$ arc-seconds within the range of ${\pm}600$ arc-seconds.

• 한국정밀공학회지
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• 제31권12호
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• pp.1133-1139
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• 2014

This paper proposes a simple method to improve a sensitivity of a straightness measurement system for a linear stage, which is applied to a system based on a geometric optic method. An optical system for this method is composed of a corner-cube retro-reflector, a ball-lens and a twodimensional position sensitive detector (2D PSD). The effectiveness of the proposed method was examined theoretically, and verified experimentally using a prototype measurement system. The results show that the measuring sensitivity was dependent on the size of the ball-lens and the setup position of PSD from the ball-lens, and that the proposed method is efficient method to improve the measuring sensitivity.

• 한국광학회지
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• 제33권6호
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• pp.317-323
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• 2022

본 논문에서는 투명한 물질의 두께를 측정하기 위한 방법으로 기하 위상 렌즈 기반의 색공초점 센서를 개발하고, 성능 개선을 위한 보정 방법을 제시한다. 일반적인 색공초점 센서의 복잡한 설계로 인한 한계를 극복하기 위해, 기하 위상 렌즈를 이용하여 전체 시스템의 크기를 줄이고, 시스템 오차를 보상하기 위한 파장 첨두 위치 추출 방법과 계통 오차 제거 방법을 설명한다. 색공초점 센서를 이용하여 투명한 물질의 두께를 측정하기 위한 이론을 설명하고, 이를 사파이어 및 BK7 물질의 두께를 측정함으로써 실험적으로 검증한다. 색공초점 센서를 이용한 두께 측정 방법은 기존의 간섭계 및 공초점 센서의 방법들에 비해 측정 속도가 빠르고, 분산 등에 의한 두께 측정 영역 제한이 없기 때문에 많은 응용이 가능하다.