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http://dx.doi.org/10.7736/KSPE.2014.31.12.1133

Optical Straightness Measuring System Using a Ball-lens  

Lee, Minho (Department of Mechanical Design and Mechatronics, Hanyang University)
Cho, Nahm-Gyoo (Department of Mechanical Engineering, Hanyang University)
Publication Information
Journal of the Korean Society for Precision Engineering / v.31, no.12, 2014 , pp. 1133-1139 More about this Journal
Abstract
This paper proposes a simple method to improve a sensitivity of a straightness measurement system for a linear stage, which is applied to a system based on a geometric optic method. An optical system for this method is composed of a corner-cube retro-reflector, a ball-lens and a twodimensional position sensitive detector (2D PSD). The effectiveness of the proposed method was examined theoretically, and verified experimentally using a prototype measurement system. The results show that the measuring sensitivity was dependent on the size of the ball-lens and the setup position of PSD from the ball-lens, and that the proposed method is efficient method to improve the measuring sensitivity.
Keywords
Linear stage; Geometric error motion; Straightness measurement; Ball-lens; Measurement sensitivity;
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Times Cited By KSCI : 1  (Citation Analysis)
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