1 |
D. Luo, C. Kuang, and X. Liu, "Fiber-based chromatic confocal microscope with Gaussian fitting method," Opt. Laser Technol. 44, 788-793 (2012).
DOI
|
2 |
P. A. Flournoy, R. W. McClure, and G. Wyntjes, "White-light interferometric thickness gauge," Appl. Opt. 11, 1907-1915 (1972).
DOI
|
3 |
M. Hillenbrand, B. Mitschunas, C. Wenzel, A. Grewe, X. Ma, P. Fesser, M. Bichra, and S. Sinzinger, "Hybrid hyperchromats for chromatic confocal sensor systems," Adv. Opt. Technol. 1, 187-194 (2012).
DOI
|
4 |
L. Deck and P. De Groot, "High-speed noncontact profiler based on scanning white-light interferometry," Appl. Opt. 33, 7334-7338 (1994).
DOI
|
5 |
H. J. Tiziani, M. Wegner, and D. Steudle, "Confocal principle for macro-and microscopic surface and defect analysis," Opt. Eng. 39, 32-39 (2000).
DOI
|
6 |
W. V. Sorin and D. F. Gray, "Simultaneous thickness and group index measurement using optical low-coherence reflectometry," IEEE Photonics Technol. Lett. 4, 105-107 (1992).
DOI
|
7 |
T. Fukano and I. Yamaguchi, "Separation of measurement of the refractive index and the geometrical thickness by use of a wavelength-scanning interferometer with a confocal microscope," Appl. Opt. 38, 4065-4073 (1999).
DOI
|
8 |
C. Saloma, K. Matsuoka, and S. Kawata, "Optical thickness profiling using a semiconductor laser confocal microscope," Rev. Sci. Instrum. 67, 2072-2078 (1996).
DOI
|
9 |
U. Schnell, E. Zimmermann, and R. Dandliker, "Absolute distance measurement with synchronously sampled white-light channelled spectrum interferometry," Pure Appl. Opt. 4, 643-651 (1995).
DOI
|
10 |
Y. H. Yun, Y. B. Seo, and K.-N. Joo, "Elimination of the direction ambiguity and the dead zone in spectrally resolved interferometry," Meas. Sci. Technol. 27, 035004 (2016).
DOI
|
11 |
S. Kim, J. Na, M. J. Kim, and B. H. Lee, "Simultaneous measurement of refractive index and thickness by combining low-coherence interferometry and confocal optics," Opt. Express 16, 5516-5526 (2008).
DOI
|
12 |
H. J. Tiziani and H.-M. Uhde, "Three-dimensional image sensing by chromatic confocal microscopy," Appl. Opt. 33, 1838-1843 (1994).
DOI
|
13 |
A. Miks, J. Novak, and P. Novak, "Analysis of method for measuring thickness of plane-parallel plates and lenses using chromatic confocal sensor," Appl. Opt. 49, 3259-3264 (2010).
DOI
|
14 |
I. K. Ilev, R. W. Waynant, K. R. Byrnes, and J. J. Anders, "Dual-confocal fiber-optic method for absolute measurement of refractive index and thickness of optically transparent media," Opt. Lett. 27, 1693-1695 (2002).
DOI
|
15 |
H. M. Park, U. Kwon, and K.-N. Joo, "Vision chromatic confocal sensor based on a geometrical phase lens," Appl. Opt. 60, 2898-2901 (2021).
DOI
|
16 |
L. A. Aleman-Castaneda, B. Piccirillo, E. Santamato, L. Marrucci, and M. A. Alonso, "Shearing interferometry via geometric phase," Optica 6, 396-399 (2019).
DOI
|