• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.21 no.2
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• pp.208-213
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• 2012

In this paper, the radial error of a rotary table at five-axis machine tool is evaluated by utilizing ISO 230-2 and estimation method using double ball-bar. The geometric error of a rotary table is defined as position dependent geometric errors or position independent geometric errors according to their physical character. Then estimation method of geometric errors using double ball-bar is simply summarized including measurement path, parametric modeling and least squares approach. To estimate representative radial error, offset error, set-up error which affect to the double ball-bar data, mean value of measured data including CCW/CW-direction are used at estimation process. Radial errors are separated from measured data and used for evaluation with ISO 230-2. Finally, suggested evaluation method is applied to a rotary table at five-axis machine tool and its result is analyzed to improve the accuracy of the rotary table.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.115-118
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• 2005

A workpiece with a large surface area is likely to be uneven due to form error and waviness. These geometric disturbances can cause inaccurate micro shapes to be formed when micro features are micro-grooved into the surface and cause the resulting workpiece to fail to function as desired. Thus, real-time measurement and compensation is required to guarantee the form accuracy of micro features while machining a workpiece with a large surface area. In this study, a method is suggested for real-time measurement of geometric error for the micro grooving of a large flat surface using a laser displacement sensor. The measurements are demonstrated for the workpieces with large surface areas and the experimental results show that the waviness and form error are well detected.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.35 no.1
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• pp.53-58
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• 2011

Ultra-precision miniaturized machine tools essential for manufacturing accurate machine components in micro/meso-scale have been developed. To realize high accuracy using mMTs, geometric errors, which are considered as the main sources of inaccuracy should be identified and compensated. The conventional systems for measuring geometric errors, such as a laser interferometer, can measure only one geometric error in a single setup and they involve complicated measurement procedures. A measurement system using PSDs is a promising alternative but the measurable range of such systems is limited to the active range of the PSDs. The proposed measurement system using PSDs can overcome the limit of small measurable range. Further, the mounting errors that could occur during set-up process can be avoided. In this paper, an algorithm corresponding to the system was analyzed and experiments were carried out.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.04a
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• pp.637-642
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• 1995

For measuring the error motion of ultra-precision spindle, eliminating the geometric errors is a must. Unless it is achieved, geometric errors will be dominant in data. Here, the roundness error and alignment error between spindle and sensor are to be removed. That's because typical error range of such spindle is muchless than geometric one. A capacitive transducer of cylidricalshape was developed, which takes full advantage of the spatial-averaging effect by using large area compared tpo the geometric error. This idea was first proposed by Chapman and here it is modified for better performance with nomical gap of 50 .mu. m and with newly designed guards which encompass the respective sensor to rectify the electrical field distribution in good shape. The measurement system is made to get the orbit of Ultra-Precision Air Spindle which is supposed to have its runout under 1 .mu. m. The Calibration data of this sensor is presented and the spindle orbit from 2000rpm to 5500rpm is showed. It is quite reasonable to use this sensor in the range of 60 .mu. m with an accuracy of several tens of nm.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.15 no.1
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• pp.1-7
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• 2006

A method of the volumetric error measurement and calibration of NC machine tools is studied using an artifact method. In this study, a hole-pate is designed and machined using stainless steel. We tested and applied the hole-plate artifact in a commercial CMM(Coordinate Measuring Machine), after calibration of the hole-plate using a precise CMM. It has been shown that not only the measurement of geometric error components but also the 2D length error calculation in a working volume is available using the hole-pate artifact method. The results of study can also be used in NC machine with touch probe as the same method in CMM.

• International Journal of Precision Engineering and Manufacturing
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• v.6 no.2
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• pp.12-18
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• 2005

A geometric compensation of thin-walled molded parts in reverse engineering is presented. Researches in reverse engineering have focused on the fitting of points to curves and surfaces. However, the reconstructed model is not the geometric model because the molded parts have some dimensional errors in measurements and deformation during molding. Geometric information can give an improved accuracy in reverse engineering. Thus, measurement data must be compensated with geometric information to reconstruct the mathematical model. The functional and geometric concepts of the part can be derived from geometric information. LSM (Least square method) is adopted to determine the geometric information. Also, an example of geometric compensation is given to improve the accuracy of geometric model and to inspect the reconstructed model.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1733-1736
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• 2005

Many studies have been carried out to produce 3D features in the size range between $10{\mu}m\~10,000{\mu}m$, called Meso-scale. If these miniaturized systems have high relative accuracy and good volumetric utilization, it is possible to manufacture more complex and accurate shapes with various materials as well as there are advantages of reducing energy, space and resources. Due to imperfect components and misalignment in assembly, it is necessary to assess the accuracy of the miniaturized system itself to obtain high relative accuracy. Laser interferometers are widely used to measure geometric errors called as quasi-static errors. For miniaturized system, however, it is difficult to install the required accessories such as optics and the measuring range is limited because of the size of the system and also this method is very expensive. Moreover, it is impossible to measure each error component simultaneously. A new system to measure simultaneously multiple geometric errors is proposed using capacitance sensors. Each error was measured using capacitance sensors and a measurement algorithm was mathematically derived. The experiments show that the proposed measurement system can be used effectively to assess the accuracy of miniaturized system at a low cost.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.399-404
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• 2002

Improvement of measuring accuracy is an essential part of quality control manufacturing process. The OMM is less than the CMM in measure accuracy but the OMM system is more efficient, easier to use than other measurement system. About 40~70% of the machine tool errors are induced by the thermal errors. Therefore, a key requirement for improving the measuring accuracy is to reduce the geometric and thermal errors. Thermal errors are measured by a ball bar system and predicted by the thermal error modeling. Furthermore, using the pre-defined thermal error map approach compensates the geometric accuracy of the OMM. Appropriate experiments are performed using ball-bar system, temperature measuring devices and touch-type probe. Compensated results are compared with those obtained using CMM to verify the proposed methods.

• Proceedings of the KSME Conference
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• 2000.11a
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• pp.548-553
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• 2000

A new design of cylindrical capacitive sensor(CCS) for the displacement measurement of precision active magnetic bearing(AMB) spindle is presented in this paper. This research is motivated by the problem that existing 4-segment CCS is still sensitive to the $3^{rd}$ harmonic component of the geometric errors of a rotor. The procedure of designing new CCS starts from the modeling and error analysis of CCS. The angular size of CCS is set up as a design parameter, and new 8-segment CCS is introduced to possess an arbitrary angular size. The optimum geometry of CCS to minimize the effect of geometric errors is determined through minimum norm approach. Experimental results with test rotors have confirmed the improvement in geometric error suppression.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.287-288
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• 2006

This paper introduces an approach of method to compensate accuracy error of diagonal direction. The measurement of squareness error is an important parameter in performance test of two axis Linear Motor and this exerts influence on accuracy error of diagonal test. However, previous knowledge management approaches are limited in deviation measurement of optical axis or restrictive elements of diagonal measurements using laser interferometer. But this proposed method calculated diagonal accuracy error which was occurred by squareness error and compensated squareness error using orthogonal correction method of PMAC. From this result, diagonal accuracy error is significantly reduced. This experimental results show that geometric error of squareness error is easily corrected by dynamic coordinate correction.