A study on the diagonal error compensation and squareness measurement of linear motor

리니어 모터의 직각도 측정과 대각선 오차 보정에 관한 연구

This paper introduces an approach of method to compensate accuracy error of diagonal direction. The measurement of squareness error is an important parameter in performance test of two axis Linear Motor and this exerts influence on accuracy error of diagonal test. However, previous knowledge management approaches are limited in deviation measurement of optical axis or restrictive elements of diagonal measurements using laser interferometer. But this proposed method calculated diagonal accuracy error which was occurred by squareness error and compensated squareness error using orthogonal correction method of PMAC. From this result, diagonal accuracy error is significantly reduced. This experimental results show that geometric error of squareness error is easily corrected by dynamic coordinate correction.