• Title/Summary/Keyword: Gas-phase Analysis

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Fourier Transform Infrared Spectroscopic Analysis of the Silylated Resist on Silicon Wafers in Semiconductor Lithographic Process (반도체 사진공정에서 실리콘 웨이퍼 위의 Silylated Resist의 Fourier 변환 적외선 분광분석)

  • Kang, Sung Chul;Kim, Su Jong;Son, Min Young;Park, Chun Geun
    • Analytical Science and Technology
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    • v.5 no.4
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    • pp.455-464
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    • 1992
  • Using FT-IR, we determined the depth of silylated layers produced from various gas-phase-silylation conditions was proposed by using Fourier Transform Infrared (FT-IR) spectroscopic analysis. The depth of silylated layer was determined from absorbance measurments of the significant peaks (Si-O-ph, Si-C, Si-H) of FT-IR spectra with background spectrum subtraction method. And the results were compared with thickness measurments of SEM. The results were well agree with SEM. It found to be well suited for determining silylation process window.

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Feasibility Analysis of Alternative Electricity Systems by 2030 in the Post-Fukushima Era

  • Park, Nyun-Bae;Lee, Sanghoon;Han, Jin-Yi;Jeon, Eui Chan
    • Asian Journal of Atmospheric Environment
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    • v.8 no.1
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    • pp.59-68
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    • 2014
  • The Fukushima nuclear accident in 2011 had an extensive impact on the national electricity plans. This paper outlines alternative electricity scenarios that meet the goals of nuclear phase-out and greenhouse gas (GHG) emission reduction. This paper also analyzes the results of each scenario in respect to the electricity mix, GHG emissions, costs and employment effects. The Long-range Energy Alternatives Planning system (LEAP) model was used to simulate the annual electricity demand and supply system from 2011 to 2030. The reference year was 2009. Scenarios are reference (where existing plans are continued), A1, A2, B1, B2, and C2 (where the levels of demand management and nuclear phase-out are different). The share of renewable energy in the electricity mix in 2030 for each scenario will be increased from about 1% in 2009 to 8% in the reference scenario and from 11% to 31% in five alternative scenarios. Total cumulative cost increases up to 14% more than the reference scenario by replacing nuclear power plants with renewable energy in alternative scenarios could be affordable. Deploying enough renewable energy to meet such targets requires a roadmap for electricity price realization, expansion of research, development and deployment for renewable energy technologies, establishment of an organization dedicated to renewable energy, and ambitious targets for renewable energy.

A Study on Analysis and Assessment of the LCCO2 Emissions for Building Construction by Using the Life Cycle Assessment Methodology (전과정평가 방법론을 이용한 건물의 전과정 탄소 배출량 평가 및 분석에 관한 연구)

  • Cho, Su-Hyun
    • Proceedings of the Korean Institute of Building Construction Conference
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    • 2016.05a
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    • pp.259-260
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    • 2016
  • Recently, world-wide focusing on the interest for the reduction of greenhouse gas emissions associated with climate change and global warming, South Korea also has set up a national greenhouse gas reduction target and action plans seeking to achieve them. In particular, in the construction area, to encourage green building certification of the building and carbon labeling acquisition of building products, in order to reduce the environmental impact caused by the industrial activities have been in steady efforts. Therefore, this study estimates the life cycle carbon footprint of building construction materials applied to carbon emissions reduction technology and analyzes the results. Through the CO2 emissions analysis in construction phase and maintenance phase of the building, it provides basic resource for future research expansion and establishes a step-by-step whole life cycle carbon emissions reduction plan in new construction and existing buildings.

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Gas-phase Dehydration of Glycerol over Supported Silicotungstic Acids Catalysts

  • Kim, Yong-Tae;Jung, Kwang-Deog;Park, Eun-Duck
    • Bulletin of the Korean Chemical Society
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    • v.31 no.11
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    • pp.3283-3290
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    • 2010
  • The gas-phase dehydration of glycerol to acrolein was carried out over 10 wt % HSiW catalysts supported on different supports, viz. $\gamma-Al_2O_3$, $SiO_2-Al_2O_3$, $TiO_2$, $ZrO_2$, $SiO_2$, AC, $CeO_2$ and MgO. The same reaction was also conducted over each support without HSiW for comparison. Several characterization techniques, $N_2$-physisorption, thermogravimetric analysis (TGA), differential scanning calorimetry (DSC), the temperature-programmed desorption of ammonia ($NH_3$-TPD), temperature-programmed oxidation (TPO) with mass spectroscopy and CHNS analysis were employed to characterize the catalysts. The glycerol conversion generally increased with increasing amount of acid sites. Ceria showed the highest 1-hydroxyacetone selectivity at $315^{\circ}C$ among the various metal oxides. The supported HSiW catalyst showed superior catalytic activity to that of the corresponding support. Among the supported HSiW catalysts, HSiW/$ZrO_2$ and HSiW/$SiO_2-Al_2O_3$ showed the highest acrolein selectivity. In the case of HSiW/$ZrO_2$, the initial catalytic activity was recovered after the removal of the accumulated carbon species at $550^{\circ}C$ in the presence of oxygen.

Effect of surface roughness on the quality of silicon epitaxial film grown after UV-irradiated gas phase cleaning

  • Kwon, Sung-Ku;Kim, Du-Hyun
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.9 no.5
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    • pp.504-509
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    • 1999
  • In-situ cleaning and subsequent silicon epitaxial film growth were performed in a load-locked reactor equipped with Hg-grid UV lamp and PBN heater to obtain the smooth and contaminant-free underlying surface and develop low-temperature epitaxial film growth process. The removals of organic and native oxide were investigated using UV-excited $O_2$ and $NF_{3}/H_{2}$, and the effect of the surface condition was examined on the quality of silicon epitaxial film grown at temperature as low as $750^{\circ}C$. UV-excited gas phase cleaning was found to be effective in removing the organic and native oxide successfully providing a smooth surface with RMS roughness of 0.5$\AA$ at optimal condition. Crystalline quality of epitaxial film was determined by smoothness of cleaned surface and the presence of native oxide and impurity. Crystalline defects such as dislocation loops or voids due to the surface roughness were observed by XTEM.

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Two phase analysis of solid rocket motor plume as particle characteristics (입자 특성에 따른 고체모터 플룸 이상유동 해석)

  • Kim, Seong-Lyong;Kim, In-Sun
    • Aerospace Engineering and Technology
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    • v.9 no.1
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    • pp.17-27
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    • 2010
  • KSLV-I KM plume including alumina particle has been studied using the continuum solver. Alumina particles are assumed to have 7 different diameters, and the specific ratio of the plume gas is assumed to be 1.2, with which the internal nozzle flow characteristics are similar to those of the chemically equilibrium analysis results. The results showed that the expansion angle of the particles is smaller than that of the gas phase, and that the big sized alumina particles are gathered in the plume core and the expansion angles of the big sized particles are smaller than those of the light particles. When the emissivity of the particles are assumed to be 0.1, the radiative heat flux is equivalent to those measured during the flight test of KSLV-I.

The characteristics of pyrolysis and combustion for a hollow cylindrical solid fuel (중공 원통형 고체연료의 열분해 및 연소특성)

  • 민성기;김호영
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.13 no.3
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    • pp.517-527
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    • 1989
  • A theoretical analysis for the characteristics of pyrolysis and combustion of solid fuel was carried out in the present study. The hollow cylindrical combustion model including gas phase and solid fuel at inside and outside respectively was developed for the numerical analysis and parametric studies. The effects of volatile contents in the porous solid fuel and Reynolds number at inlet of gas phase on the characteristics of pyrolysis and combustion such as the radial, axial and time variations of volatile mass flux through porous solid fuel, temperature, mass fractions of gaseous fuel and oxidizer, and flame shape were investigated in the parametric studies. The results of the present study show that the flame produced by the volatiles moves to the downstream of fuel with accelerating velocity with time until extinction is occurred resulting from the completion of pyrolysis. When flame is employed with smaller amount of volatiles content in the solid fuel, the flame sheet exists closer to the inner wall of solid fuel. As Reynolds number at inlet increases, the flame sheet moves to the inner wall due to effect of convection even though the volatiles by pyrolysis increases.

Drivers of Carbon Decoupling in Transportation Sector and the Effect of Energy Transition: Panel Analysis of 25 OECD Countries (교통부문 탄소배출 탈동조화 현상의 원인분석 및 에너지전환의 효과: OECD 25개국 패널분석)

  • Lim, Hyungwoo;Jo, Ha-Hyun
    • Environmental and Resource Economics Review
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    • v.29 no.3
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    • pp.389-418
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    • 2020
  • Some OECD countries are showing signs of decoupling in the transportation sector. In terms of sustainable development, the decoupling of economic activities and greenhouse gas emissions in the transportation sector is very important. This study calculated a decoupling index of greenhouse gas emissions in the transportation sector for 25 OECD countries. Also this study analyzed the impact of energy transition on decoupling regimes. According to the analysis, a considerable number of countries have reached the decoupling phase, and some countries have shown strong decoupling regime in which greenhouse gas emissions are reduced despite economic growth. From ordered panel logit analysis, energy transition had significant impact on achieving decoupling phase. Electrification of transport had a positive effect on the decoupling, while the gasification was not significant. In addition, small traffic, high urbanization rates, strong environmental policies, and high trade opening have had significant effects on achieving decoupling.

Analytical Study on the Behavior of the Bubble in the Micro Two-Phase Closed Thermosyphon (초소형 밀폐형 이상 써모싸이폰 기포의 거동에 관한 해석적인 연구)

  • Lee, Y.P.;Lee, Y.S.;Lee, Y.
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.5 no.2
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    • pp.85-93
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    • 1993
  • The rise of a large gas bubble or slug in a Micro Two-Phase Closed Thermosyphon with a thin wire insert has been analiged by the potential flow theory. The effect of the interfacial surface tension is explicitly accounted by application of the Kelvin-Laplace equation and solved for the bubble shape. The solution is expressed in terms of the Stokes stream function which consists of an infinite series of Bessel functions. The conditions of the bubble movement in a Micro Two-Phase Closed Thermosyphon were theoretically ascertained.

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Efficient Computation of Two-Phase Flow by Eulerian-Lagrangian Method Using Separate grids for the Particles and Flow Field (Eulerian-Lagrangian 방법에서 입자 및 유동 격자계 분리를 통한 2상 유동의 효율적 계산)

  • Pak S. I.;Lee J K.;Chang K. S.
    • 한국전산유체공학회:학술대회논문집
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    • 2003.08a
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    • pp.43-48
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    • 2003
  • When the Eulerian-Lagrangian method is used to analyze the particle laden two-phase flow, a large number of particles should be used to obtain statistically meaningful solutions. Then it takes too much time to track the particles and to average the particle properties in the numerical analysis of two-phase flow. The purpose of this paper is to reduce the computation time by means of a set of particle gird separate to the flow grid. Particle motion equation here is the simplified B-B-O equation, which is integrated to get the particle trajectories. Particle turbulent dispersion, wall collision, and wall roughness effects are considered but the two-way coupling effects between gas and particles are neglected. Particle laden 2-D channel flow is solved and it is shown that the computational efficiency is indeed improved by using the current method

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