• Journal of the Semiconductor & Display Technology
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• v.21 no.3
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• pp.74-79
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• 2022

In this study, the plasma corrosion resistance and the change in the number of contamination particles generated using the plasma etching process and cleaning process of coating parts for semiconductor plasma etching equipment were investigated. As the coating method, atmospheric plasma spray (APS) was used, and the powder materials were Y₂O₃ and Y₃Al₅O₁₂ (YAG). There was a clear difference in the densities of the coatings due to the difference in solubility due to the melting point of the powdered material. As a plasma environment, a mixed gas of CF₄, O₂, and Ar was used, and the etching process was performed at 200 W for 60 min. After the plasma etching process, a fluorinated film was formed on the surface, and it was confirmed that the plasma resistance was lowered and contaminant particles were generated. We performed a surface cleaning process using piranha solution(H₂SO₄(3):H₂O₂(1)) to remove the defect-causing surface fluorinated film. APS-Y₂O₃ and APS-YAG coatings commonly increased the number of defects (pores, cracks) on the coating surface by plasma etching and cleaning processes. As a result, it was confirmed that the generation of contamination particles increased and the breakdown voltage decreased. In particular, in the case of APS-YAG under the same cleaning process conditions, some of the fluorinated film remained and surface defects increased, which accelerated the increase in the number of contamination particles after cleaning. These results suggest that contaminating particles and the breakdown voltage that causes defects in semiconductor devices can be controlled through the optimization of the APS coating process and cleaning process.

• Advances in aircraft and spacecraft science
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• v.9 no.5
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• pp.415-431
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• 2022

Secondary flows have a huge impact on losses generation in modern low pressure gas turbines (LPTs). At design point, the interaction of the blade profile with the end-wall boundary layer is responsible for up to 40% of total losses. Therefore, predicting accurately the end-wall flow field in a LPT is extremely important in the industrial design phase. Since the inlet boundary layer profile is one of the factors which most affects the evolution of secondary flows, the first main objective of the present work is to investigate the impact of two different inlet conditions on the end-wall flow field of the T106A, a well known LPT cascade. The first condition, labeled in the paper as C1, is represented by uniform conditions at the inlet plane and the second, C2, by a flow characterized by a defined inlet boundary layer profile. The code used for the simulations is based on the Discontinuous Galerkin (DG) formulation and solves the Reynolds-averaged Navier-Stokes (RANS) equations coupled with the Spalart Allmaras turbulence model. Secondly, this work aims at estimating the influence of viscosity and turbulence on the T106A end-wall flow field. In order to do so, RANS results are compared with those obtained from an inviscid simulation with a prescribed inlet total pressure profile, which mimics a boundary layer. A comparison between C1 and C2 results highlights an influence of secondary flows on the flow field up to a significant distance from the end-wall. In particular, the C2 end-wall flow field appears to be characterized by greater over turning and under turning angles and higher total pressure losses. Furthermore, the C2 simulated flow field shows good agreement with experimental and numerical data available in literature. The C2 and inviscid Euler computed flow fields, although globally comparable, present evident differences. The cascade passage simulated with inviscid flow is mainly dominated by a single large and homogeneous vortex structure, less stretched in the spanwise direction and closer to the end-wall than vortical structures computed by compressible flow simulation. It is reasonable, then, asserting that for the chosen test case a great part of the secondary flows details is strongly dependent on viscous phenomena and turbulence.

• Journal of Ocean Engineering and Technology
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• v.37 no.2
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• pp.58-67
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• 2023

While extensive research is being conducted to reduce greenhouse gases in industrial fields, the International Maritime Organization (IMO) has implemented regulations to actively reduce CO₂ emissions from ships, such as energy efficiency design index (EEDI), energy efficiency existing ship index (EEXI), energy efficiency operational indicator (EEOI), and carbon intensity indicator (CII). These regulations play an important role for the design and operation of ships. However, the calculation of the index and indicator might be complex depending on the types and size of the ship. Here, to calculate the EEDI of two target vessels, first, the ships were set as Deadweight (DWT) 50K container and 300K very large crude-oil carrier (VLCC) considering the type and size of those ships along with the engine types and power. Equations and parameters from the marine pollution treaty (MARPOL) Annex VI, IMO marine environment protection committee (MEPC) resolution were used to estimate the EEDI and their changes. Technical measures were subsequently applied to satisfy the IMO regulations, such as reducing speed, energy saving devices (ESD), and onboard CO₂ capture system. Process simulation model using Aspen Plus v10 was developed for the onboard CO₂ capture system. The obtained results suggested that the fuel change from Marine diesel oil (MDO) to liquefied natural gas (LNG) was the most effective way to reduce EEDI, considering the limited supply of the alternative clean fuels. Decreasing ship speed was the next effective option to meet the regulation until Phase 4. In case of container, the attained EEDI while converting fuel from Diesel oil (DO) to LNG was reduced by 27.35%. With speed reduction, the EEDI was improved by 21.76% of the EEDI based on DO. Pertaining to VLCC, 27.31% and 22.10% improvements were observed, which were comparable to those for the container. However, for both vessels, additional measure is required to meet Phase 5, demanding the reduction of 70%. Therefore, onboard CO₂ capture system was designed for both KCS (Korea Research Institute of Ships & Ocean Engineering (KRISO) container ship) and KVLCC2 (KRISO VLCC) to meet the Phase 5 standard in the process simulation. The absorber column was designed with a diameter of 1.2-3.5 m and height of 11.3 m. The stripper column was 0.6-1.5 m in diameter and 8.8-9.6 m in height. The obtained results suggested that a combination of ESD, speed reduction, and fuel change was effective for reducing the EEDI; and onboard CO₂ capture system may be required for Phase 5.

• Composites Research
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• v.36 no.6
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• pp.429-434
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• 2023

In this study, aimed at improving the existing acoustic emission sensor for real time monitoring, a macro-fiber composite (MFC) transducer was employed as the acoustic emission sensor in the gas leak detection system. Prior to implementation, structural analysis was conducted to optimize the MFC's design. Consequently, the flexibility of the MFC facilitated excellent adherence to curved pipes, enabling the reception of acoustic emission (AE) signals without complications. Analysis of AE signals revealed substantial variations in parameter values for both high-pressure and low-pressure leaks. Notably, in the parameters of the Fast Fourier Transform (FFT) graph, the change amounted to 120% to 626% for high-pressure leaks compared to the case without leaks, and approximately 9% to 22% for low-pressure leaks. Furthermore, depending on the distance from the leak site, the magnitude of change in parameters tended to decrease as the distance increased. As the results, in the future, not only will it be possible to detect a leak by detecting the amount of parameter change in the future, but it will also be possible to identify the location of the leak from the amount of change.

• Korean Chemical Engineering Research
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• v.50 no.6
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• pp.1002-1007
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• 2012

The considerable portion of energy demand has been satisfied by the combustion of fossil fuel and the consequent $CO_2$ emission was considered as a main cause of global warming. As a technology option for $CO_2$ emission mitigation, absorption process has been used in $CO_2$ capture from large scale emission sources. To set up optimal operating parameters in $CO_2$ absorption and solvent regeneration units are important for the better performance of the whole $CO_2$ absorption plant. Optimal operating parameters are usually selected through a lot of actual operation data. However theoretical approach are also useful because the arbitrary change of process parameters often limited for the stability of process operation. In this paper, a theoretical approach based on vapor-liquid equilibrium was proposed to estimate optimal operating conditions of $CO_2$ absorption process. Two $CO_2$ absorption processes using 12 wt% aqueous $NH_3$ solution and 20 wt% aqueous MEA solution were investigated in this theoretical estimation of optimal operating conditions. The results showed that $CO_2$ loading of rich absorbent should be kept below 0.4 in case of 12 wt% aqueous $NH_3$ solution for $CO_2$ absorption but there was no limitation of $CO_2$ loading in case of 20 wt% aqueous MEA solution for $CO_2$ absorption. The optimal regeneration temperature was determined by theoretical approach based on $CO_2$ loadings of rich and lean absorbent, which determined to satisfy the amount of absorbed $CO_2$. The amount of heating medium at optimal regeneration temperature is also determined to meet the difference of $CO_2$ loading between rich and lean absorbent. It could be confirmed that the theoretical approach, which accurately estimate the optimal regeneration conditions of lab scale $CO_2$ absorption using 12 wt% aqueous $NH_3$ solution could estimate those of 20 wt% aqueous MEA solution and could be used for the design and operation of $CO_2$ absorption process using chemical absorbent.

• Journal of the Korean Wood Science and Technology
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• v.44 no.1
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• pp.19-29
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• 2016

The purpose of this study is to analyze the combustion and thermal properties in order to establish baseline data for the fire safety evaluation of imported wood. The combustion properties such as heat release rate, total heat release, gas yield, and mass loss were analyzed by the method of cone calorimeter test according to KS F ISO 5660-1 and thermogravimetric analysis (TGA). Analyzed species are five kinds of species as Merbau, Mempening, Garo Garo, Malas, and Dillenia. The heat released rate values showed the highest value of Malas as $375.52kW/m^2$, and Dillenia showed the lowest value as $133.30kW/m^2$. The data values were confirmed in the following order: Malas > Mempening > Garo Garo > Merbau > Dillenia. In case of the total heat release, it was measured in the following order: Mempening > Malas > Garo Garo > Merbau > Dillenia. The gas analysis results were that Dillenia showed the highest value of 0.034. Also, Mempening and Malas showed the lowest at 0.020 in the $CO/CO_2$. Min of mass reduction was shown as 74.79% Sargent cherry, on the other hand, Malas had a 83.52%. It showed a correlation between and of the CO and $CO_2$ generation and combustion characteristics of wood. The thermal decomposition temperature of the wood in the TGA were as follow that Merbau $348.07^{\circ}C$, Mempening $367.57^{\circ}C$, Garo Garo $350.59^{\circ}C$, Malas $352.41^{\circ}C$, Dillenia $364.33^{\circ}C$. The aim of this study is to determine the combustion properties of imported wood according to ISO 5660-1. And, based on the results of this study, we would proceed with further research for improving the fire safety of wood for construction.

• Geophysics and Geophysical Exploration
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• v.19 no.1
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• pp.1-10
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• 2016

The hypocenter distribution of microseismic events generated by hydraulic fracturing for shale gas development provides essential information for understanding characteristics of fracture network. In this study, we evaluate how inaccurate velocity models influence the inversion results of two widely used location programs, hypoellipse and hypoDD, which are developed based on an iterative linear inversion. We assume that 98 stations are densely located inside the circle with a radius of 4 km and 5 artificial hypocenter sets (S0 ~ S4) are located from the center of the network to the south with 1 km interval. Each hypocenter set contains 25 events placed on the plane. To quantify accuracies of the inversion results, we defined 6 parameters: difference between average hypocenters of assumed and inverted locations, $d_1$; ratio of assumed and inverted areas estimated by hypocenters, r; difference between dip of the reference plane and the best fitting plane for determined hypocenters, ${\theta}$; difference between strike of the reference plane and the best fitting plane for determined hypocenters, ${\phi}$; root-mean-square distance between hypocenters and the best fitting plane, $d_2$; root-mean-square error in horizontal direction on the best fitting plane, $d_3$. Synthetic travel times are calculated for the reference model having 1D layered structure and the inaccurate velocity model for the inversion is constructed by using normal distribution with standard deviations of 0.1, 0.2, and 0.3 km/s, respectively, with respect to the reference model. The parameters $d_1$, r, ${\theta}$, and $d_2$ show positive correlation with the level of velocity perturbations, but the others are not sensitive to the perturbations except S4, which is located at the outer boundary of the network. In cases of S0, S1, S2, and S3, hypoellipse and hypoDD provide similar results for $d_1$. However, for other parameters, hypoDD shows much better results and errors of locations can be reduced by about several meters regardless of the level of perturbations. In light of the purpose to understand the characteristics of hydraulic fracturing, $1{\sigma}$ error of velocity structure should be under 0.2 km/s in hypoellipse and 0.3 km/s in hypoDD.

• Journal of the Korean Wood Science and Technology
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• v.46 no.5
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• pp.597-609
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• 2018

Korea Forest Service has supplied 76 industrial wood pellet boilers from 2011 to 2015 through subsidy programs. Since carbon monoxide (CO) and nitrogen oxides ($NO_x$) generated during boiler combustion are substances that lead to death in the case of acute poisoning, it is very important to reduce emissions. Therefore, the CO and $NO_x$ emission values of 63 boilers excluding the hot air blower and some boilers initially supplied were analyzed. The emission factor was also calculated from the measured exhaust gas concentration (based on exhaust gas $O_2$ concentration of 12%). The average value of CO emitted from industrial wood pellet boilers was 49 ppm and it was confirmed that the CO concentration was decreasing as the years passed. The emission factor of CO was 0.73 g/kg. The average value of $NO_x$ emitted from industrial wood pellet boilers was 67 ppm and the emission factor of $NO_x$ was 1.63 g/kg. Unlike CO, there was no tendency to decrease according to the installation year. Both CO and $NO_x$ measurements met the limits of the Ministry of Environment. These $NO_x$ emission factors were compared with the $NO_x$ emission factors produced by certified low $NO_x$ burners. The $NO_x$ emission factor of industrial wood pellet boilers was about 1.9 times that of certified low $NO_x$ LNG combustors and about 0.92 times that of coal combustion.

• Journal of Life Science
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• v.31 no.1
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• pp.90-99
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• 2021

In this study, to reduce the production cost of poly(3-hydroxyalkanoates) (PHA), optimal cell growth and PHA biosynthesis conditions of the isolated strain Pseudomonas sp. EML8 were established using waste frying oil (WFO) as the cheap carbon source. Gas chromatography (GC) and GC mass spectrometry analysis of the medium-chain-length PHA (mcl-PHAWFO) obtained by Pseudomonas sp. EML8 of WFO indicated that it was composed of 7.28 mol% 3-hydrxoyhexanoate, 39.04 mol% 3-hydroxyoctanoate, 37.11 mol% 3-hydroxydecanoate, and 16.58 mol% 3-hydroxvdodecanoate monomers. When Pseudomonas sp. EML8 were culture in flask, the maximum dry cell weight (DCW) and the mcl-PHAWFO yield (g/l) were showed under WFO (20 g/l), (NH4)2SO4 (0.5 g/l), pH 7, and 25℃ culture conditions. Based on this, the highest DCW, mcl-PHAWFO content, and mcl-PHAWFO yield from 3-l-jar fermentation was obtained after 48 hr. Similar results were obtained using 20 g/l of fresh frying oil (FFO) as a control carbon source. In this case, the DCW, the mcl-PHAFFO content, and the mcl-PHAFFO yields were 2.7 g/l, 62 wt%, and 1.6 g/l, respectively. Gel permeation chromatography analysis confirmed the average molecular weight of the mcl-PHAWFO and mcl-PHAFFO to be between 165-175 kDa. Thermogravimetric analysis showed decomposition temperature values of 260℃ and 274.7℃ for mcl-PHAWFO and mcl-PHAFFO, respectively. In conclusion, Pseudomonas sp. EML8 and WFO could be suggested as a new candidate and substrate for the industrial production of PHA.

• Economic and Environmental Geology
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• v.51 no.1
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• pp.67-76
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• 2018

This study reviews three eco-friendly energy towns with hybrid thermal energy supply systems and borehole thermal energy storage (BTES) in Canada and Denmark. The district heating and cooling systems were designed by using multi-source energy for the higher efficiency and reliability as well as environment. ADEU (Alexandra District Energy Utility) located at the developing area in the city of Richmond, Canada was designed to supply district energy with the installation of 726 borehole heat exchangers (BHEs) and a backup boiler using natural gas. DLSC (Drake Landing Solar Community) located in the town of Okotoks, Canada is a district system to store solar thermal energy underground during the summer season by seasonal BTES with 144 BHEs. Brædstrup Solpark district heating system located in Denmark has been conducted energy supply from multiple energy sources of solar thermal, heat pump, boiler plants and seasonal BTES with 48 BHEs. These systems are designed based on social and economic benefits as well as nature-friendly living space according to the city based energy perspective. Each system has the energy center which distribute the stored thermal energy to each house for heating during the winter season. The BHE depth and ground thermal storage volume are designed by the heating and cooling load as well as the condition of ground water flow and thermophysical properties of the ground. These systems have been proved the reliance and economic benefits by providing consistent energy supply with competitive energy price for many years. In addition, the several expansions of the service area in ADEU and Brædstrup Solpark have been processed based on energy supply master plan. In order to implement this kind of project in our country, the regulation and policy support of government or related federal organization are required. As well as the government have to make a energy management agency associated with long-term supply energy plan.