• 한국재료학회지
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• 제31권12호
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• pp.697-703
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• 2021

Aluminum nitride having a dense hexagonal structure is used as a high-temperature material because of its excellent heat resistance and high mechanical strength; its excellent piezoelectric properties are also attracting attention. The structure and residual stress of AlN thin films formed on glass substrate using TFT sputtering system are examined by XRD. The deposition conditions are nitrogen gas pressures of 1 × 10^-2, 6 × 10^-3, and 3 × 10^-3, substrate temperature of 523 K, and sputtering time of 120 min. The structure of the AlN thin film is columnar, having a c-axis, i.e., a <00·1> orientation, which is the normal direction of the glass substrate. An X-ray stress measurement method for crystalline thin films with orientation properties such as columnar structure is proposed and applied to the residual stress measurement of AlN thin films with orientation <00·1>. Strength of diffraction lines other than 00·2 diffraction is very weak. As a result of stress measurement using AlN powder sample as a comparative standard sample, tensile residual stress is obtained when the nitrogen gas pressure is low, but the gas pressure increases as the residual stress is shifts toward compression. At low gas pressure, the unit cell expands due to the incorporation of excess nitrogen atoms.

• 한국자동차공학회논문집
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• 제7권8호
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• pp.43-54
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• 1999

The effects of equivalence ratio and pressure on burnt gas temperature in premixed fuel rich propane-oxygen-inert gas combustion are investigated over the wide ranges of equivalence ration from 1.5 to 2.7 and pressure from 0.1 to 7 MPa by using a specially designed disk -type constant-voume combustion chamber, The premixtures are simultaneously ignited by eight spark plugs located on the circumference of combustion chamber with 45 degree interals. The eight converging flames compress the end gases to high pressures. The burnt gas temperature is meausured by the nmodifie dtow-colr pyrometry method. The transmissivity in the chamber center during the final stage of combustion at the hightest pressure is meausred by in situ laser extinction method. It is found that a temperature difference between the burnt gas temperature measured by mofidied and conventrational two-color method is 10 to 20 K, but the accuracy of the modified two-color methdo is higher if the local transmissivity in observed region is uniform , and the combustion at higher pressures results gas density conditions and the burnt gas temperature increases as the volume fraction of argon is increased because the specific heat of argon is lower compared to that of nitrogen with a constant equivalence ratio.

• 한국가스학회:학술대회논문집
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• 한국가스학회 1997년도 추계학술발표회 논문집
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• pp.229-235
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• 1997

A low power (300 mW) catalytic bead combustible gas sensor is developed and utilized with a computer controlled sampling system for measuring heat content of natural gas. The heat content of gas is proportional to the change in the energy required to exposure to the sample of combustible gas. The heat content of natural gas samples ranging 36.30 - 39.88 MJ/$m^3$ is measured in the range of approximately $1\%$ error, which is comparable to its nominal heat content. Each gas has a slightly different curve of sensitivity vs. sensor temperature. Thus there Is no temperature at which all sensitivities are equal. In calibration process the choice of a optimum operating temperature is an important factor that influences the overall performance of the measurement system.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 춘계학술대회 논문집
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• pp.1039-1040
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• 2010

• 한국자동차공학회논문집
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• 제7권7호
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• pp.122-128
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• 1999

CARS(Coherent anti-Stokes Raman Spectroscopy) temperature measurement under engine-like condition was validated by measuring unburned gas temperatures of premixed propane-air flame in a constant volume combustion chamber. The measured temperatures were compared with predictions of 2 zone flame propagation model. End-gas temperatures were measured were measured by CARS technique in a conventional 4 cylinder DOHC spark-ignition engine fueled with PRF 80. Cylinder pressure was measured simultaneously with CARS signal and used as a parameter on fitting CARS spectrum to library of theoretical spectra. There was a good agreement between the measured temperature and adiabatic core temperature calculated from measured cylinder pressure. Significant heating by pre-flame reaction in the gas was observed in the late part of compression stroke.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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• pp.113-114
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• 2008

Conventional furnace annealing (CFA) for activating Mg-doped p-type GaN films had been performed in pure $N_2$ ambient. All sample activated the same gas ambient. The annealing process change temperature: the first process is performed at $550^{\circ}C$ for 10 min. but, the first process is the same bulk. From second to five process increase activation temperature to change $50^{\circ}C$ and annealing time keeping for 10 min. It is found that the samples characteristic measure hall measurement. Similar results were also evidenced by photoluminescence (PL) measurement.

• 대한용접접합학회:학술대회논문집
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• 대한용접접합학회 1994년도 특별강연 및 추계학술발표 개요집
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• pp.111-114
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• 1994

This paper describes a method to measure a weldment surface temperature for estimating variations of the weld pool size in the gas metal arc(GMA) welding processes. An Infrared sensing system is designed to measure the radiation emitted from the top surface of the weldment, The interference effect of the electric arc to the measurement is rejected by detecting the low peaks of the noisy signal. An optimizing criterion, in which the correlation between the weld quality and the measured temperature is maximized, is also proposed to determine the optimal measurement location.

• 대한기계학회논문집B
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• 제34권3호
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• pp.245-250
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• 2010

초음속 유동에서의 공기 방전에 대한 기체 (회전) 온도를 측정하는 과정이 자세하게 소개되었다. 초음속 유동에서는 직접적인 온도 측정이 어려우므로 질소 분자 이온 스펙트럼의 광학적 발광 분광법을 이용하는 비침투 방식의 측정법이 사용되었다. 질소 분자 이온의 발광 스펙트럼 구조를 이해하기 위하여 발광선의 세기를 나타내는 관계식들에 대한 자세한 설명이 소개되었다. 유도된 발광 스펙트럼의 표현식을 이용하여 질소 이온의 first negative system을 구현하였고 실험으로 측정된 스펙트럼과 비교하였다. 합성 스펙트럼과 측정된 스펙트럼들은 밴드 스펙트럼 전 범위에 걸쳐서 6-8%의 상대오차 이내로 서로 일치함을 보여주었다. 마하 3의 초음속 경계층에서 25 mA의 직류 방전에 의한 기체 온도 분포 곡선을 측정한 결과 온도값이 최대 약 350 K인 선형적인 변화를 보여주었다.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2003년도 ICCAS
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• pp.1201-1206
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• 2003

A measurement device for gas flow rate using hot-wire module is developed for the utilization in low-accuracy industrial applications. The module has three wires of measuring and heating, and a bridge circuit is installed to detect electric current through the wire in the module. An amplification of the signal and conversion to digital output are conducted for the online measurement with a personal computer. In addition, temperature distribution in the module is numerically analyzed to examine the measured outcome from the module experiment. The flow rate of air and carbon dioxide gas is separately measured for the performance examination of the device. The experimental relation of measurement and flow agrees with the prediction from the numerical analysis. The outcome of the performance test indicates that the accuracy and reproducibility of the module is satisfactory for the purpose of industrial applications.

• 한국진공학회지
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• 제22권5호
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• pp.225-230
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• 2013

크라이오펌프는 응축과 흡착을 통해 기체를 배기하므로 극저온 표면 온도와 증기압이 배기성능에 큰 영향을 미친다. 어느 부분의 온도가 어중간하면 한번 응축했던 기체분자가 방출과 재응축 또는 재흡착을 반복하여 진공용기 압력이 어느 선 이하로 떨어지지 않고 심한 요동을 나타낸다. 어떤 기체나 특정 온도 범위에서 이런 불안정성이 나타날 수 있지만 크라이오펌프를 많이 사용하는 스퍼터 장치의 공정기체인 알곤을 배기할 때 불안정성이 발생하는 것은 좋지 않다. 본 논문에서는 알곤 회복시간 측정실험을 수행하면서 크라이오펌프의 알곤 불안정성의 원인과 대책을 분석했다.