Browse > Article
http://dx.doi.org/10.5757/JKVS.2013.22.5.225

Measurement of the Ar Recovery Time of a Cryopump and Analysis on the Ar Instability  

In, Sang Ryul (Fusion Engineering Development Center, KAERI)
Lee, Dong Ju (GVT)
Publication Information
Journal of the Korean Vacuum Society / v.22, no.5, 2013 , pp. 225-230 More about this Journal
Abstract
Cryopump removes gas molecules by condensation and adsorption. Therefore, cryo-surface temperature and corresponding vapor pressure influence directly the pumping performance. If the surface temperature of any part is neither low nor high, there occurs the desorption of gas molecules condensed or adsorbed, and the emitted molecules can be captured again, which leads to a time-consuming and fluctuating change of the pressure. Though every gas can show such a pressure instability at a specified temperature range, the instability generated in a sputter system using Ar as a working gas and operating with a cryopump is especially undesirable. In this paper the cause of the argon instability is analyzed and corrective is provided through the measurement of the Ar recovery time.
Keywords
Cryopump; Condensation; Ar instability; Suface temperature; Vapor pressure;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
1 H. D. Kishorenath, J. E. de Rijke, and M. O. Foreman, Patent US5386708 (1995).
2 S. R. In and S. P. Kang, J. Korean Vac. Soc. 22, 45 (2013).   DOI   ScienceOn
3 D. M. Hoffman, B. Singh, and J. H. Thomas III, Handbook of Vacuum Science and Technology, (Academic Press, San Diego, 1998), p. 168.
4 K. Welch, Capture Pumping Technology, (Elsevier, Amsterdam, 2001), p. 311.
5 M. J. Eacobacci and D. A. Olsen, Patent US4546613 (1985).